Motohiro Tomita

次席研究員(研究院講師)

  • 153 Citations
  • 8 h-Index
20112020

Research output per year

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Research Output

  • 153 Citations
  • 8 h-Index
  • 16 Conference contribution
  • 15 Article
  • 1 Conference article

Effect of Thermal Boundary Resistance between the Interconnect Metal and Dielectric Interlayer on Temperature Increase of Interconnects in Deeply Scaled VLSI

Zhan, T., Oda, K., Ma, S., Tomita, M., Jin, Z., Takezawa, H., Mesaki, K., Wu, Y. J., Xu, Y., Matsukawa, T., Matsuki, T. & Watanabe, T., 2020 May 13, In : ACS Applied Materials and Interfaces. 12, 19, p. 22347-22356 10 p.

Research output: Contribution to journalArticle

  • マイクロギャップ電極デバイスを用いたシリカ/エポキシ界面の破壊経路の直接観察

    Translated title of the contribution: Direct observation of dielectric breakdown path at silica/epoxy interface with a micro-gap electrode deviceSankawa, R., Onishi, T., Takahashi, K., Tomita, M., Mura, K., Nakamura, T., Yoshimitsu, T., Imai, T. & Watanabe, T., 2020, In : IEEJ Transactions on Fundamentals and Materials. 140, 2, p. 64-69 6 p.

    Research output: Contribution to journalArticle

  • Cavity-free micro thermoelectric energy harvester with Si nanowires

    Watanabe, T., Tomita, M., Zhan, T., Shima, K., Himeda, Y., Yamato, R., Matsukawa, T. & Matsuki, T., 2019 Jan 1, Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 9. Kakushima, K., Obeng, Y. S., Gusev, E. P., De Gendt, S., Timans, P. J., Karim, Z., Roozeboom, F., Misra, D. & Jagannathan, H. (eds.). 3 ed. Electrochemical Society Inc., p. 95-110 16 p. (ECS Transactions; vol. 89, no. 3).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Open Access
  • 10μW/cm2-class high power density planar Si-nanowire thermoelectric energy harvester compatible with CMOS-VLSI technology

    Tomita, M., Oba, S., Himeda, Y., Yamato, R., Shima, K., Kumada, T., Xu, M., Takezawa, H., Mesaki, K., Tsuda, K., Hashimoto, S., Zhan, T., Zhang, H., Kamakura, Y., Suzuki, Y., Inokawa, H., Ikeda, H., Matsukawa, T., Matsuki, T. & Watanabe, T., 2018 Oct 25, 2018 IEEE Symposium on VLSI Technology, VLSI Technology 2018. Institute of Electrical and Electronics Engineers Inc., Vol. 2018-June. p. 93-94 2 p. 8510659

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • 1 Citation (Scopus)