Shingo Ichimura

教授(任期付)

  • 2657 Citations
  • 24 h-Index
1977 …2015

Research output per year

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Research Output

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Conference contribution
2005

Observation of a sputtered Si surface irradiated by metal cluster complex ions

Teranishi, Y., Kondou, K., Fujiwara, Y., Nonaka, H., Yamamoto, K., Fujimoto, T. & Ichimura, S., 2005 Jan 1, Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference. IEEE Computer Society, p. 146-147 2 p. 1595256. (Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference; vol. 2005).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2002

Application of 100% ozone gas process to rapid low-temperature oxidation

Nonaka, H., Ichimura, S., Nishiguchi, T., Morikawa, Y., Kekura, M. & Miyamoto, M., 2002 Jan 1, 10th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2002. Institute of Electrical and Electronics Engineers Inc., p. 119-123 5 p. 1039449

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
1994

Electron beam induced degradation of 2DEG in AlGaAs/GaAs heterostructure

Wada, T., Kanayama, T., Ichimura, S., Sugiyama, Y. & Komuro, M., 1994 Jan 1, Materials Research Society Symposium Proceedings. Publ by Materials Research Society, p. 67-72 6 p. (Materials Research Society Symposium Proceedings; vol. 325).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1984

PROPOSALS AND EXPERIMENTS ON LARGE AREA EXPOSURE IN SYNCHROTRON RADIATION LITHOGRAPHY.

Tanino, H., Hoh, K., Hirata, M., Atoda, N. & Ichimura, S., 1984 Jan 1, Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena. 1 ed. Vol. 3. p. 232-236 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution