Shingo Ichimura

教授(任期付)

  • 2657 Citations
  • 24 h-Index
1977 …2015

Research output per year

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Research Output

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Paper
1998

Application of high purity ozone beam in the formation and characterization of SiO2 and other oxide thin films

Ichimura, S., Nonaka, H., Kurokawa, A. & Nakamura, K., 1998 Jan 1, p. 100-109. 10 p.

Research output: Contribution to conferencePaper

1 Citation (Scopus)
1986

REACTIVE GAS ION SOURCE.

Murakami, H., Ichimura, S., Shimizu, H., Kudo, I., Komaki, S., Tajima, T., Tanaka, Y. & Naitho, H., 1986 Dec 1, p. 83-86. 4 p.

Research output: Contribution to conferencePaper

1 Citation (Scopus)
1983

LITHOGRAPHY EXPERIMENTS USING SYNCHROTRON RADIATION FROM ETL STORAGE RING.

Hoh, K., Hirata, M., Atoda, N., Tanino, H., Ichimura, S. & Onuki, H., 1983, p. 611-612. 2 p.

Research output: Contribution to conferencePaper

2 Citations (Scopus)
1979

APPLICATION OF MONTE CARLO CALCULATION TECHNIQUE TO QUANTITATIVE ANALYSES BY AUGER ELECTRON SPECTROSCOPY.

Shimizu, R., Ichimura, S. & Aratama, M., 1979 Jan 1, p. 30-34. 5 p.

Research output: Contribution to conferencePaper

1 Citation (Scopus)