Shingo Ichimura

教授(任期付)

  • 2657 Citations
  • 24 h-Index
1977 …2015

Research output per year

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Research Output

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Article
2015

Development of standards for reliable surface analyses by ISO technical committee 201 on surface chemical analysis

Powell, C. J., Shimizu, R., Yoshihara, K. & Ichimura, S., 2015 Jan 1, In : Surface and Interface Analysis. 47, 1, p. 127-134 8 p.

Research output: Contribution to journalArticle

4 Citations (Scopus)
2013

Emission characteristics of a charged-droplet beam source using vacuum electrospray of an ionic liquid

Fujiwara, Y., Saito, N., Nonaka, H. & Ichimura, S., 2013 Jan 1, In : Surface and Interface Analysis. 45, 1, p. 517-521 5 p.

Research output: Contribution to journalArticle

6 Citations (Scopus)
2012

Beam characteristics of positively and negatively charged droplets generated by vacuum electrospray of an ionic liquid

Fujiwara, Y., Saito, N., Nonaka, H. & Ichimura, S., 2012 Mar 1, In : Japanese journal of applied physics. 51, 3 PART 1, 036701.

Research output: Contribution to journalArticle

5 Citations (Scopus)

Component analysis of a mixed beam generated by vacuum electrospray of an ionic liquid

Fujiwara, Y., Saito, N., Nonaka, H. & Ichimura, S., 2012 Mar 15, In : Journal of Applied Physics. 111, 6, 064901.

Research output: Contribution to journalArticle

12 Citations (Scopus)
2011

AFM Tip Characterizer fabricated by Si/SiO2 multilayers

Takenaka, H., Hatayama, M., Ito, H., Ohchi, T., Takano, A., Kurosawa, S., Itoh, H. & Ichimura, S., 2011 Jul 16, In : e-Journal of Surface Science and Nanotechnology. 9, p. 293-296 4 p.

Research output: Contribution to journalArticle

2 Citations (Scopus)

Characteristics of a charged-droplet beam generated by vacuum electrospray of an ionic liquid

Fujiwara, Y., Saito, N., Nonaka, H., Nakanaga, T. & Ichimura, S., 2011 Jan 7, In : Chemical Physics Letters. 501, 4-6, p. 335-339 5 p.

Research output: Contribution to journalArticle

17 Citations (Scopus)

Time-of-Flight secondary ion mass spectrometry (TOF-SIMS) using the metal-cluster-complex primary ion of Ir4(CO)7+

Fujiwara, Y., Saito, N., Nonaka, H., Suzuki, A., Nakanaga, T., Fujimoto, T., Kurokawa, A. & Ichimura, S., 2011 Jan 1, In : Surface and Interface Analysis. 43, 1-2, p. 245-248 4 p.

Research output: Contribution to journalArticle

4 Citations (Scopus)
2010
12 Citations (Scopus)
7 Citations (Scopus)

Evaluation of outermost surface temperature of silicon substrates during UV-excited ozone oxidation at low temperature

Kameda, N., Nishiguchi, T., Morikawa, Y., Kekura, M., Nakamura, K., Ushiyama, T., Nonaka, H. & Ichimura, S., 2010, In : Analytical Sciences. 26, 2, p. 273-276 4 p.

Research output: Contribution to journalArticle

1 Citation (Scopus)

Interface properties of the two step oxide layers by UV light excited ozone silicon oxidation and chemical vapor deposition (CVD)-SiO2 film

Kameda, N., Nishiguchi, T., Morikawa, Y., Kekura, M., Ushiyama, T., Nonaka, H. & Ichimura, S., 2010 Jun 21, In : Journal of the Vacuum Society of Japan. 53, 3, p. 230-233 4 p.

Research output: Contribution to journalArticle

2009

Advantage of highly concentrated (≥90%) ozone for chemical vapor deposition SiO2 grown under 200 °c using hexamethyldisilazane and ultraviolet light excited ozone

Kameda, N., Nishiguchi, T., Morikawa, Y., Kekura, M., Nonaka, H. & Ichimura, S., 2009 May 1, In : Japanese journal of applied physics. 48, 5 PART 2, p. 05DB011-05DB014

Research output: Contribution to journalArticle

6 Citations (Scopus)

Characterizing atomic force microscopy tip shape in use

Itoh, H., Wang, C., Sun, J., Hu, J., Shen, D. & Ichimura, S., 2009 Feb 1, In : Journal of Nanoscience and Nanotechnology. 9, 2, p. 803-808 6 p.

Research output: Contribution to journalArticle

11 Citations (Scopus)

Current standardization activities for the measurement and characterization of nanomaterials and structures

Ichimura, S., Itoh, H. & Fujimoto, T., 2009 Jan 1, In : Journal of Physics: Conference Series. 159, 012001.

Research output: Contribution to journalArticle

2 Citations (Scopus)

Focusing of ion beams by using a capillary

Watanabe, K., Kondou, K., Fujiwara, Y., Saito, N., Nonaka, H. & Ichimura, S., 2009, In : Journal of the Vacuum Society of Japan. 52, 3, p. 117-120 4 p.

Research output: Contribution to journalArticle

Improvement in chemical-vapor-deposited-SiO2 film properties by annealing with UV-light-excited ozone

Nishiguchi, T., Saito, S., Kameda, N., Kekura, M., Nonaka, H. & Ichimura, S., 2009 Dec 1, In : Japanese journal of applied physics. 48, 11, 116509.

Research output: Contribution to journalArticle

4 Citations (Scopus)

Ion beam generation from an electrolyte solution containing polyatomic cations and anions for secondary ion mass spectrometry

Fujiwara, Y., Watanabe, K., Saito, N., Nonaka, H., Suzuki, A., Nakanaga, T., Fujimoto, T., Kurokawa, A., Ichimura, S. & Tomita, M., 2009 Dec 1, In : Japanese journal of applied physics. 48, 12, 126005.

Research output: Contribution to journalArticle

8 Citations (Scopus)

Metal cluster complex primary ion beam source for secondary ion mass spectrometry (SIMS)

Fujiwara, Y., Watanabe, K., Nonaka, H., Saito, N., Suzuki, A., Fujimoto, T., Kurokawa, A. & Ichimura, S., 2009 Dec 10, In : Vacuum. 84, 5, p. 544-549 6 p.

Research output: Contribution to journalArticle

9 Citations (Scopus)

Silicon oxidation by ozone

Fink, C. K., Nakamura, K., Ichimura, S. & Jenkins, S. J., 2009 May 11, In : Journal of Physics Condensed Matter. 21, 18, 183001.

Research output: Contribution to journalArticle

39 Citations (Scopus)
2008

Application of UV-light excited ozone to large-sized si wafer at low temperature

Kameda, N., Saito, S., Nishiguchi, T., Morikawa, Y., Kekura, M., Nonaka, H. & Ichimura, S., 2008 Jan 1, In : Journal of the Vacuum Society of Japan. 51, 3, p. 228-231 4 p.

Research output: Contribution to journalArticle

1 Citation (Scopus)

Cluster SIMS using metal cluster complex ions

Fujiwara, Y., Kondou, K., Teranishi, Y., Watanabe, K., Nonaka, H., Saito, N., Itoh, H., Fujimoto, T., Kurokawa, A., Ichimura, S. & Tomita, M., 2008 Dec 15, In : Applied Surface Science. 255, 4, p. 916-921 6 p.

Research output: Contribution to journalArticle

5 Citations (Scopus)

Dissociative ionization of a large molecule studied by intense phase-controlled laser fields

Ohmura, H., Saito, N., Nonaka, H. & Ichimura, S., 2008 May 15, In : Physical Review A - Atomic, Molecular, and Optical Physics. 77, 5, 053405.

Research output: Contribution to journalArticle

18 Citations (Scopus)

Fabrication of a silicon oxide film by ozone and 1,1,1,3,3,3- hexamethyldisilazane (HMDS): Infrared Absorption analysis on a photochemical reaction in the gas phase

Nakamura, K., Nonaka, H., Kameda, N., Nishiguchi, T. & Ichimura, S., 2008 Jan 1, In : Journal of the Vacuum Society of Japan. 51, 3, p. 224-227 4 p.

Research output: Contribution to journalArticle

3 Citations (Scopus)

Factorial analysis of cluster-SIMS depth profiling using metal-cluster-complex ion beams

Fujiwara, Y., Kondou, K., Watanabe, K., Nonaka, H., Saito, N., Fujimoto, T., Kurokawa, A., Ichimura, S. & Tomita, M., 2008 Dec 15, In : Applied Surface Science. 255, 4, p. 1338-1340 3 p.

Research output: Contribution to journalArticle

Geometric characterization of carbon nanotubes by atomic force microscopy in conjunction with a tip characterizer

Wang, C., Itoh, H., Homma, Y., Sun, J., Hu, J. & Ichimura, S., 2008 Jul 18, In : Japanese journal of applied physics. 47, 7 PART 3, p. 6128-6133 6 p.

Research output: Contribution to journalArticle

7 Citations (Scopus)

High depth resolution SIMS analysis using metal cluster complex ion bombardment

Tomita, M., Kinno, T., Koike, M., Tanaka, H., Takeno, S., Fujiwara, Y., Kondou, K., Teranishi, Y., Nonaka, H., Fujimoto, T., Kurokawa, A. & Ichimura, S., 2008 Mar 1, In : Journal of Physics: Conference Series. 100, 1, 012001.

Research output: Contribution to journalArticle

3 Citations (Scopus)

Photochemical reaction of ozone and 1,1,1,3,3,3-hexamethyldisilazane: Analysis of the gas reaction between precursors in a photochemical vapor deposition process

Nakamura, K., Nonaka, H., Kameda, N., Nishiguchi, T. & Ichimura, S., 2008 Sep 12, In : Japanese journal of applied physics. 47, 9 PART 1, p. 7349-7355 7 p.

Research output: Contribution to journalArticle

3 Citations (Scopus)

Rapid oxidation of SiC using highly concentrated ozone and characterization of oxide films

Nonaka, H., Ichimura, S., Kosugi, R., Fukuda, K. & Arai, K., 2008 Jan 1, In : Journal of the Vacuum Society of Japan. 51, 3, p. 221-223 3 p.

Research output: Contribution to journalArticle

1 Citation (Scopus)
2007

Beam-induced nanoscale ripple formation on silicon with the metal-cluster-complex ion of Ir4(CO)7+

Fujiwara, Y., Kondou, K., Watanabe, K., Nonaka, H., Saito, N., Itoh, H., Fujimoto, T., Kurokawa, A., Ichimura, S. & Tomita, M., 2007 Sep 7, In : Japanese Journal of Applied Physics, Part 2: Letters. 46, 33-35, p. L854-L857

Research output: Contribution to journalArticle

4 Citations (Scopus)

Characteristics of altered layers formed by sputtering with a massive molecular ion containing diverse elements with large mass differences

Fujiwara, Y., Kondou, K., Nonaka, H., Saito, N., Fujimoto, T., Kurokawa, A., Ichimura, S. & Tomita, M., 2007 Oct 22, In : Journal of Applied Physics. 102, 7, 073509.

Research output: Contribution to journalArticle

2 Citations (Scopus)

Etching-enhanced surface stress relaxation during initial ozone oxidation

Narushima, T., Kitajima, M., Itakura, A. N., Kurokawa, A., Ichimura, S. & Miki, K., 2007 Mar 1, In : Surface Science. 601, 5, p. 1384-1388 5 p.

Research output: Contribution to journalArticle

3 Citations (Scopus)

Global standardization of scanning probe microscopy

Fujita, D., Itoh, H., Ichimura, S. & Kurosawa, T., 2007 Feb 28, In : Nanotechnology. 18, 8, 084002.

Research output: Contribution to journalArticle

39 Citations (Scopus)

High quality gate dielectric film on poly-silicon grown at room temperature using UV light excited ozone

Kameda, N., Nishiguchi, T., Morikawa, Y., Kekura, M., Nonaka, H. & Ichimura, S., 2007 Aug 6, In : Journal of the Electrochemical Society. 154, 9, p. H769-H772

Research output: Contribution to journalArticle

18 Citations (Scopus)

Irradiation characteristics of metal-cluster-complex ions containing diverse multi-elements with large mass differences

Fujiwara, Y., Kondou, K., Teranishi, Y., Nonaka, H., Saito, N., Fujimoto, T., Kurokawa, A., Ichimura, S. & Tomita, M., 2007 Apr 1, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 257, 1-2 SPEC. ISS., p. 653-657 5 p.

Research output: Contribution to journalArticle

6 Citations (Scopus)

Observation of a Si surface sputtered by an ion irradiation system using a prototype compact cluster ion source

Teranishi, Y., Kondou, K., Mizota, T., Fujiwara, Y., Nonaka, H., Yamamoto, K., Fujimoto, T. & Ichimura, S., 2007 Aug 5, In : Surface and Coatings Technology. 201, 19-20 SPEC. ISS., p. 8641-8645 5 p.

Research output: Contribution to journalArticle

2 Citations (Scopus)

Oxidation on poly silicon at low temperature using UV light-excited ozone gas

Kameda, N., Nishiguchi, T., Morikawa, Y., Kekura, M., Nonaka, H. & Ichimura, S., 2007 Jun 28, In : Shinku/Journal of the Vacuum Society of Japan. 50, 3, p. 208-210 3 p.

Research output: Contribution to journalArticle

3 Citations (Scopus)

Rapid oxidation of silicon using UV-light irradiation in low-pressure, highly concentrated ozone gas below 300°C

Nishiguchi, T., Saitoh, S., Kameda, N., Morikawa, Y., Kekura, M., Nonaka, H. & Ichimura, S., 2007 May 8, In : Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 46, 5 A, p. 2835-2839 5 p.

Research output: Contribution to journalArticle

8 Citations (Scopus)

Reaction analysis of initial oxidation of silicon by UV-light-excited ozone and the application to rapid and uniform SiO2 film growth

Tosaka, A., Nonaka, H., Ichimura, S. & Nishiguchi, T., 2007 Feb 26, In : Journal of Applied Physics. 101, 3, 034909.

Research output: Contribution to journalArticle

8 Citations (Scopus)

Secondary-ion-mass-spectrometry depth profiling of ultra-shallow boron delta layers in silicon with massive molecular ion beam of Ir 4(CO)7+

Fujiwara, Y., Kondou, K., Watanabe, K., Nonaka, H., Saito, N., Fujimoto, T., Kurokawa, A., Ichimura, S. & Tomita, M., 2007 Nov 6, In : Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 46, 11, p. 7599-7601 3 p.

Research output: Contribution to journalArticle

7 Citations (Scopus)

SIMS depth profile study using metal cluster complex ion bombardment

Tomita, M., Kinno, T., Koike, M., Tanaka, H., Takeno, S., Fujiwara, Y., Kondou, K., Teranishi, Y., Nonaka, H., Fujimoto, T., Kurokawa, A. & Ichimura, S., 2007 May 1, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 258, 1, p. 242-245 4 p.

Research output: Contribution to journalArticle

12 Citations (Scopus)

Sputtered Si surface irradiated by metal cluster complex ions such as Os3(CO)12 and Ir4(CO)12

Teranishi, Y., Kondou, K., Fujiwara, Y., Nonaka, H., Fujimoto, T., Ichimura, S. & Tomita, M., 2007 Apr 1, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 257, 1-2 SPEC. ISS., p. 670-676 7 p.

Research output: Contribution to journalArticle

3 Citations (Scopus)
2006

Analysis of O (1D) distribution by time-resolved measurement of ozone density for application of UV-light excited ozone to oxidation process

Tosaka, A., Nishiguchi, T., Nonaka, H. & Ichimura, S., 2006 Jun 28, In : Shinku/Journal of the Vacuum Society of Japan. 49, 3, p. 123-125 3 p.

Research output: Contribution to journalArticle

4 Citations (Scopus)

Analysis of Oxygen and Hydrogen Adsorption on Nb(100) Surface by Scanning Tunneling Microscopy

An, B., Wen, M., Fukuyama, S., Yokogawa, K., Ichimura, S. & Yoshimura, M., 2006 Jan 1, In : Shinku/Journal of the Vacuum Society of Japan. 49, 1, p. 6-11 6 p.

Research output: Contribution to journalArticle

A possible hydrogen sensing method with dual pressure gauges

Suzuki, A., Kurokawa, A., Nonaka, H. & Ichimura, S., 2006 Feb 28, In : Sensors and Actuators, A: Physical. 127, 1, p. 37-40 4 p.

Research output: Contribution to journalArticle

16 Citations (Scopus)

Characteristics of a cluster-ion beam of Os3(CO) n+ (n = 7 or 8) for low-damage sputtering

Fujiwara, Y., Kondou, K., Teranishi, Y., Nonaka, H., Fujimoto, T., Kurokawa, A., Ichimura, S. & Tomita, M., 2006 Dec 1, In : Surface and Interface Analysis. 38, 12-13, p. 1539-1544 6 p.

Research output: Contribution to journalArticle

7 Citations (Scopus)

Depth resolution improvement in secondary ion mass spectrometry analysis using metal cluster complex ion bombardment

Tomita, M., Kinno, T., Koike, M., Tanaka, H., Takeno, S., Fujiwara, Y., Kondou, K., Teranishi, Y., Nonaka, H., Fujimoto, T., Kurokawa, A. & Ichimura, S., 2006 Sep 14, In : Applied Physics Letters. 89, 5, 053123.

Research output: Contribution to journalArticle

24 Citations (Scopus)

Fragmentation analysis by superconducting ion detectors in matrix-assisted laser desorption/ionization (MALDI)

Ohkubo, M., Shigeri, Y., Kinumi, T., Saito, N., Ukibe, M., Chen, Y. E., Kushino, A., Kurokawa, A., Sato, H. & Ichimura, S., 2006 Apr 14, In : Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 559, 2, p. 779-781 3 p.

Research output: Contribution to journalArticle

15 Citations (Scopus)

Ion-beam characteristics of the metal cluster complex of Ir 4(CO)12

Fujiwara, Y., Kondou, K., Teranishi, Y., Nonaka, H., Fujimoto, T., Kurokawa, A., Ichimura, S. & Tomita, M., 2006 Sep 11, In : Journal of Applied Physics. 100, 4, 043305.

Research output: Contribution to journalArticle

21 Citations (Scopus)

Production of stable ion beam of Os3(CO)12 with compact metal-cluster-complex ion source

Fujiwara, Y., Kondou, K., Teranishi, Y., Nonaka, H., Fujimoto, T., Kurokawa, A. & Ichimura, S., 2006 Jul 7, In : Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 45, 7, p. 6000-6007 8 p.

Research output: Contribution to journalArticle

17 Citations (Scopus)

Secondary ion mass spectrometry of organic thin films using metal-cluster-complex ion source

Fujiwara, Y., Kondou, K., Nonaka, H., Saito, N., Itoh, H., Fujimoto, T., Kurokawa, A., Ichimura, S. & Tomita, M., 2006 Sep 8, In : Japanese Journal of Applied Physics, Part 2: Letters. 45, 33-36, p. L987-L990

Research output: Contribution to journalArticle

14 Citations (Scopus)