Shingo Ichimura

教授(任期付)

  • 2657 Citations
  • 24 h-Index
1977 …2015

Research output per year

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Research Output

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Conference article
2004

Partial-pressure measurement of atmospheric-pressure binary gas using two pressure gauges

Kurokawa, A., Odaka, K. & Ichimura, S., 2004 Mar 19, In : Vacuum. 73, 2, p. 301-304 4 p.

Research output: Contribution to journalConference article

16 Citations (Scopus)
2000

Effects of ozone treatment of 4H-SiC(0001) surface

Kosugi, R., Ichimura, S., Kurokawa, A., Koike, K., Fukuda, K., Suzuki, S., Okushi, H., Yoshida, S. & Arai, K., 2000 Jun, In : Applied Surface Science. 159, p. 550-555 6 p.

Research output: Contribution to journalConference article

10 Citations (Scopus)

Estimation of surface excitation correction factor for 200-5000 eV in Ni from absolute elastic scattering electron spectroscopy

Tanuma, S., Ichimura, S. & Goto, K., 2000 Aug 1, In : Surface and Interface Analysis. 30, 1, p. 212-216 5 p.

Research output: Contribution to journalConference article

69 Citations (Scopus)

XPS analysis of ultrathin SiO2 film growth on Si by ozone

Ichimura, S., Koike, K., Kurokawa, A., Nakamura, K. & Itoh, H., 2000 Aug 1, In : Surface and Interface Analysis. 30, 1, p. 497-501 5 p.

Research output: Contribution to journalConference article

10 Citations (Scopus)
1999

Measurement of outgassing characteristics from a vacuum chamber fabricated for pressure calibration in UHV/XHV region

Ichimura, S., Kokubun, K., Hirata, M., Tsukahara, S., Saito, K. & Ikeda, Y., 1999 May, In : Vacuum. 53, 1-2, p. 291-294 4 p.

Research output: Contribution to journalConference article

13 Citations (Scopus)

Ultrathin silicon dioxide formation by ozone on ultraflat SI surface

Kurokawa, A., Maeda, T., Sakamoto, K., Itoh, H., Nakamura, K., Koike, K., Moon, D. W., Ha, Y. H., Ichimura, S. & Ando, A., 1999, In : Materials Research Society Symposium - Proceedings. 567, p. 21-26 6 p.

Research output: Contribution to journalConference article

6 Citations (Scopus)
1998

Hydrogen passivation and ozone oxidation of silicon surface

Kurokawa, A., Nakamura, K. & Ichimura, S., 1998 Jan 1, In : Materials Research Society Symposium - Proceedings. 513, p. 37-42 6 p.

Research output: Contribution to journalConference article

4 Citations (Scopus)
1997

Comparison of high-purity-ozone oxidation on Si(111) and Si(100)

Kurokawa, A., Ichimura, S. & Moon, D. W., 1997 Jan 1, In : Materials Research Society Symposium - Proceedings. 477, p. 359-364 6 p.

Research output: Contribution to journalConference article

10 Citations (Scopus)

Ozone cleaning of carbon-related contaminants on Si wafers and other substrate materials

Nonaka, H., Kurokawa, A., Ichimura, S. & Moon, D. W., 1997 Jan 1, In : Materials Research Society Symposium - Proceedings. 477, p. 493-498 6 p.

Research output: Contribution to journalConference article

3 Citations (Scopus)

Surface oxidation of Si(111) by high purity ozone and negative ions produced by Rydberg electron transfer

Nonaka, H., Kurokawa, A., Nakamura, K. & Ichimura, S., 1997 Jan 1, In : Materials Research Society Symposium - Proceedings. 446, p. 53-58 6 p.

Research output: Contribution to journalConference article

1 Citation (Scopus)
1996

Low temperature oxidation processing with high purity ozone

Kurokawa, A., Ichimura, S., Kang, H. J. & Moon, D. W., 1996, In : Materials Research Society Symposium - Proceedings. 429, p. 269-274 6 p.

Research output: Contribution to journalConference article

1 Citation (Scopus)
1990

New ion counting system for laser sputtered neutral mass spectrometry

Ichimura, S., Shimizu, H., Kokuban, K., Hashizume, H. & Goto, K., 1990, In : Vacuum. 41, 7 -9 Pt3, p. 1788-1789 2 p.

Research output: Contribution to journalConference article

1988

Simulation of electron/solid interaction and application to quantitative analysis by electron spectroscopies

Ichimura, S., Ding, Z. J. & Shimizu, R., 1988 Jul 1, In : Surface and Interface Analysis. 12, 1-12

Research output: Contribution to journalConference article

2 Citations (Scopus)
1983

DIFFRACTION EFFECTS ON PATTERN REPLICATION WITH SYNCHROTRON RADIATION.

Atoda, N., Kawakatsu, H., Tanino, H., Ichimura, S., Hirata, M. & Hoh, K., 1983 Jan 1, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 1, 4, p. 1267-1270 4 p.

Research output: Contribution to journalConference article

17 Citations (Scopus)

DIRECT ENGRAVING ON POSITIVE RESISTS BY SYNCHROTRON RADIATION.

Ichimura, S., Hirata, M., Tanino, H., Atoda, N., Ono, M. & Hoh, K., 1983 Jan 1, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 1, 4, p. 1076-1079 4 p.

Research output: Contribution to journalConference article

13 Citations (Scopus)