• 762 Citations
  • 16 h-Index
20042019

Research output per year

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Research Output

A Method for Extracting Mechanical Q Factor of the Piezoelectric Film without Etching Substrate

Kinoshita, S. & Yanagitani, T., 2019 Oct, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Computer Society, p. 299-300 2 p. 8926088. (IEEE International Ultrasonics Symposium, IUS; vol. 2019-October).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • A method to estimate kt2 of piezoelectric films from the change of lattice strain by XRD without removing substrate

    Soutome, T. & Yanagitani, T., 2019 Oct, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Computer Society, p. 301-304 4 p. 8925766. (IEEE International Ultrasonics Symposium, IUS; vol. 2019-October).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Effect of negative ions generation from sputtering target on crystalline orientation and kt2 of ScAlN thin films

    Kihara, R., Takayanagi, S. & Yanagitani, T., 2019 Oct, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Computer Society, p. 1120-1123 4 p. 8925983. (IEEE International Ultrasonics Symposium, IUS; vol. 2019-October).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Open Access
  • Frequency-switchable polarity-inverted BAW resonators based on PZT/PTO epitaxial films using difference in coercive field

    Shimidzu, T., Mori, T. & Yanagitani, T., 2019 May 27, In : Applied Physics Letters. 114, 21, 212902.

    Research output: Contribution to journalArticle

    Open Access