• 772 Citations
  • 16 h-Index
20042019

Research output per year

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Research Output

2019

A Method for Extracting Mechanical Q Factor of the Piezoelectric Film without Etching Substrate

Kinoshita, S. & Yanagitani, T., 2019 Oct, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Computer Society, p. 299-300 2 p. 8926088. (IEEE International Ultrasonics Symposium, IUS; vol. 2019-October).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

A method to estimate kt2 of piezoelectric films from the change of lattice strain by XRD without removing substrate

Soutome, T. & Yanagitani, T., 2019 Oct, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Computer Society, p. 301-304 4 p. 8925766. (IEEE International Ultrasonics Symposium, IUS; vol. 2019-October).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Effect of negative ions generation from sputtering target on crystalline orientation and kt2 of ScAlN thin films

Kihara, R., Takayanagi, S. & Yanagitani, T., 2019 Oct, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Computer Society, p. 1120-1123 4 p. 8925983. (IEEE International Ultrasonics Symposium, IUS; vol. 2019-October).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
Open Access

Frequency-switchable polarity-inverted BAW resonators based on PZT/PTO epitaxial films using difference in coercive field

Shimidzu, T., Mori, T. & Yanagitani, T., 2019 May 27, In : Applied Physics Letters. 114, 21, 212902.

Research output: Contribution to journalArticle

Open Access

Improvement of c-Axis Parallel Orientaition of ZnO film on Silica Glass Pipes with Various Diameters for SH-SAW Pipe Sensor

Wakabayashi, T., Takayanagi, S., Matukawa, M., Takamura, Y. & Yanagitani, T., 2019 Oct, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Computer Society, p. 671-674 4 p. 8925796. (IEEE International Ultrasonics Symposium, IUS; vol. 2019-October).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ion beam induced a-axis in-plane oriented c-axis oriented AlN thin film growth for high-Q BAW resonator application

Masamune, C. & Yanagitani, T., 2019 Oct, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Computer Society, p. 1127-1128 2 p. 8926047. (IEEE International Ultrasonics Symposium, IUS; vol. 2019-October).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

ScAlN polarization inverted resonators and enhancement of kt2 in new YbAlN materials for BAW devices

Yanagitani, T. & Jia, J., 2019 Oct, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Computer Society, p. 894-899 6 p. 8925786. (IEEE International Ultrasonics Symposium, IUS; vol. 2019-October).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Shear Mode Polarity Inverted ScAlN Multilayer for Application to BAW Transformer in Rectifying Antenna

Kinoshita, S. & Yanagitani, T., 2019 Oct, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Computer Society, p. 847-848 2 p. 8926197. (IEEE International Ultrasonics Symposium, IUS; vol. 2019-October).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Shear Mode Polarity Inverted ScAlN Multilayer for Application to BAW Transformer in Rectifying Antenna

Kinoshita, S. & Yanagitani, T., 2019 Oct, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Computer Society, p. 1118-1119 2 p. 8925674. (IEEE International Ultrasonics Symposium, IUS; vol. 2019-October).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2018

C-Axis Tilted ScAIN Film Shear Mode Resonators for Biosensing

Yazaki, H., Soutome, T., Karasawa, R., Takayanagi, S., Yoshida, K. & Yanagitani, T., 2018 Dec 17, 2018 IEEE International Ultrasonics Symposium, IUS 2018. IEEE Computer Society, 8580191. (IEEE International Ultrasonics Symposium, IUS; vol. 2018-October).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

High Efficiency Ultrasonic Transducer Using Polarity Inverted ZnO Film

Majima, T., Shimidzu, T. & Yanagitani, T., 2018 Dec 17, 2018 IEEE International Ultrasonics Symposium, IUS 2018. IEEE Computer Society, Vol. 2018-October. 8579933

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Investigation of Morphotropic Phase Boundary in Sputter-Grown Pb(Zrx, Ti1-x)03 Epitaxial Films

Noda, R., Shimidzu, T., Wasa, K. & Yanagitani, T., 2018 Dec 17, 2018 IEEE International Ultrasonics Symposium, IUS 2018. IEEE Computer Society, Vol. 2018-October. 8580154

Research output: Chapter in Book/Report/Conference proceedingConference contribution

PZT Epitaxial Thick Film for Ultrasonic Transducer at Frequencies below 100 MHz

Mazda, Y., Shimidzu, T. & Yanagitani, T., 2018 Dec 17, 2018 IEEE International Ultrasonics Symposium, IUS 2018. IEEE Computer Society, Vol. 2018-October. 8580215

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Rapid wave velocity measurement by Brillouin scattering using coherent phonons induced by ScAlN piezoelectric thin-film transducer

Kawabe, M., Takayanagi, S., Ichihashi, H., Suzuki, M., Yanagitani, T. & Matsukawa, M., 2018 Jul 18, (Accepted/In press) In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control.

Research output: Contribution to journalArticle

ScAlN Free-Standing 0.1 mm Plates with 30-50 MHz Resonance Frequency

Masamune, C., Karasawal, R. & Yanagitani, T., 2018 Dec 17, 2018 IEEE International Ultrasonics Symposium, IUS 2018. IEEE Computer Society, Vol. 2018-October. 8579797

Research output: Chapter in Book/Report/Conference proceedingConference contribution

ScAlN thick film ultrasonic transducer in 40 MHz–80 MHz

Sano, K. H., Karasawa, R. & Yanagitani, T., 2018 Aug 23, (Accepted/In press) In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control.

Research output: Contribution to journalArticle

7 Citations (Scopus)

Shear Mode Polarity Inverted ScAIN Multilayer for Application to Transformer in Rectifying Antenna

Karasawa, R. & Yanagitani, T., 2018 Jan 1, In : IEEE International Ultrasonics Symposium, IUS. 2018-January, 8580083.

Research output: Contribution to journalConference article

Temperature Characteristics of ScAlN/SiO 2 BAW Resonators

Igeta, H., Totsuka, M., Suzuki, M. & Yanagitani, T., 2018 Jan 1, In : IEEE International Ultrasonics Symposium, IUS. 2018-January, 8580165.

Research output: Contribution to journalConference article

The Influence of Negative Ions Generation on the Arc-Melted and Hot Press Sintered Scal Alloy Targets to the Crystalline Orientation and kt 2 of the Scaln Films

Endo, Y., Karasawa, R., Takayanagi, S., Imakawa, M., Morisaka, K., Suzuki, Y. & Yanagitani, T., 2018 Dec 17, 2018 IEEE International Ultrasonics Symposium, IUS 2018. IEEE Computer Society, Vol. 2018-October. 8579841

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Ultrasonically-induced electrical potentials in demineralized bovine cortical bone

Mori, S., Makino, T., Koyama, D., Takayanagi, S., Yanagitani, T. & Matsukawa, M., 2018 Apr 1, In : AIP Advances. 8, 4, 045007.

Research output: Contribution to journalArticle

3 Citations (Scopus)
2017

A new type wide-frequency-range shear viscosity sensor using c-axis tilted ScAlN thin film on temperature stable AT-cut quartz thick plate

Yamakawa, Y., Sano, K., Karasawa, R. & Yanagitani, T., 2017 Oct 31, 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 8092520

Research output: Chapter in Book/Report/Conference proceedingConference contribution

A new type wide-frequency-range shear viscosity sensor using c-axis tilted ScAlN thin film on temperature stable AT-cut quartz thick plate

Yamakawa, Y., Sano, K. H., Karasawa, R. & Yanagitani, T., 2017 Oct 31, 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 8092486

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Broadband frequency viscositymeasurement using low TCF shear mode resonators consisting of C-axis tilted scaln thin film on thick at-cut quartz plate

Yamakawa, Y., Sano, K., Karasawa, R. & Yanagitani, T., 2017 Jul 26, TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., p. 2135-2138 4 p. 7994497

Research output: Chapter in Book/Report/Conference proceedingConference contribution

C-Axiszig-zag polarization inverted ScAlN multilayer for FBAR transformer rectifying antenna

Karasawa, R. & Yanagitani, T., 2017 Oct 31, 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 8092551

Research output: Chapter in Book/Report/Conference proceedingConference contribution

C-Axis zig-zag polarization inverted ScAlN multilayer for FBAR transformer rectifying antenna

Karasawa, R. & Yanagitani, T., 2017 Oct 31, 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 8091618

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Effect of anisotropy on stress-induced electrical potentials in bovine bone using ultrasound irradiation

Matsukawa, S., Makino, T., Mori, S., Koyama, D., Takayanagi, S., Mizuno, K., Yanagitani, T. & Matsukawa, M., 2017 Apr 3, In : Applied Physics Letters. 110, 14, 143701.

Research output: Contribution to journalArticle

6 Citations (Scopus)

Effects of negative oxygen ions generated during Sc ingot sputtering on electromechanical coupling of ScAlN film

Takayanagi, S. & Yanagitani, T., 2017 Oct 31, 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 8092666

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Evaluation of the acoustoelectric effect in the thickness direction of c -plane ZnO single crystals by Brillouin scattering

Tomita, S., Yanagitani, T., Takayanagi, S., Ichihashi, H., Shibagaki, Y., Hayashi, H. & Matsukawa, M., 2017 Jun 21, In : Journal of Applied Physics. 121, 23, 235102.

Research output: Contribution to journalArticle

Film growth of c-axis parallel oriented ZnO on entire surface of silica glass pipe for SH-SAW pipe sensor

Takamura, Y., Takayanagi, S., Matsukawa, M., Ishida, C. & Yanagitani, T., 2017 Oct 31, 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 8091911

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Film growth of c-axis tilted ScAlN on the sapphire substrate for SAW devices

Tokuda, S., Takayanagi, S., Matsukawa, M. & Yanagitani, T., 2017 Oct 31, 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 8092718

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Film growth of c-axis tilted ScAlN on the sapphire substrate for SAW devices

Tokuda, S., Takayanagi, S., Matsukawa, M. & Yanagitani, T., 2017 Oct 31, 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 8092072

Research output: Chapter in Book/Report/Conference proceedingConference contribution

High electromechanical coefficient kt 2=19% thick ScAlN piezoelectric films for ultrasonic transducer in low frequency of 80 MHz

Sano, K. H., Karasawa, R. & Yanagitani, T., 2017 Oct 31, 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 8092425

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

High electromechanical coefficient kt 2=19% thick ScAlN piezoelectric films for ultrasonic transducer in low frequency of 80 MHz

Sano, K. H., Karasawa, R. & Yanagitani, T., 2017 Oct 31, 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 8092005

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Quantitative thickness measurement of polarity-inverted piezoelectric thin-film layer by scanning nonlinear dielectric microscopy

Odagawa, H., Terada, K., Tanaka, Y., Nishikawa, H., Yanagitani, T. & Cho, Y., 2017 Oct 1, In : Japanese Journal of Applied Physics. 56, 10, 10PF18.

Research output: Contribution to journalArticle

The frequency switchable multi-layered BST/BaTiO3 epitaxial film resonator

Shimidzu, T., Yanagitani, T. & Wasa, K., 2017 Oct 31, 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 8091518

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

The frequency switchable multi-layered BST/BaTiO3 epitaxial film resonator

Shimidzu, T., Yanagitani, T. & Wasa, K., 2017 Oct 31, 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 8092735

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Thick ScAlN film for high efficient ultrasonic transducer in low frequency of 81 MHz

Sano, K. H., Karasawa, R. & Yanagitani, T., 2017 Jul 26, TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., p. 862-865 4 p. 7994185

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2016

Acoustic-Wave Velocities and Refractive Indices in an m-Plane GaN Single-Crystal Plate and c-Axis-Oriented ScAlN Films Measured by Brillouin Scattering Techniques

Ichihashi, H., Yanagitani, T., Suzuki, M., Takayanagi, S., Kawabe, M., Tomita, S. & Matsukawa, M., 2016 May 1, In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 63, 5, p. 117-125 9 p., 7438921.

Research output: Contribution to journalArticle

4 Citations (Scopus)

Effects of energetic negative ions generated from sputtering targets on ScAlN film growth

Takayanagi, S., Matsukawa, M. & Yanagitani, T., 2016 Nov 1, 2016 IEEE International Ultrasonics Symposium, IUS 2016. IEEE Computer Society, Vol. 2016-November. 7728836

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Method for measuring polarity-inverted layered structure in dielectric thin films using scanning nonlinear dielectric microscopy

Odagawa, H., Terada, K., Nishikawa, H., Yanagitani, T. & Cho, Y., 2016 Aug 31, In : Ferroelectrics. 498, 1, p. 47-51 5 p.

Research output: Contribution to journalArticle

1 Citation (Scopus)

Rapid and simultaneous measurement of longitudinal and shear wave velocities by Brillouin scattering from artificially induced phonons

Kawabe, M., Shibagaki, Y., Matsukawa, M., Yanagitani, T., Suzuki, M. & Takayanagi, S., 2016 Nov 1, 2016 IEEE International Ultrasonics Symposium, IUS 2016. IEEE Computer Society, 7728801. (IEEE International Ultrasonics Symposium, IUS; vol. 2016-November).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2015

Effects of microstructure and water on the electrical potentials in bone induced by ultrasound irradiation

Tsuneda, H., Matsukawa, S., Takayanagi, S., Mizuno, K., Yanagitani, T. & Matsukawa, M., 2015 Feb 16, In : Applied Physics Letters. 106, 7, 073704.

Research output: Contribution to journalArticle

12 Citations (Scopus)

Fast wave velocity measurement by Brillouin scattering using coherent induced phonon from ScAlN piezoelectric thin film

Kawabe, M., Ichihashi, H., Takayanagi, S., Matsukawa, M., Yanagitani, T. & Suzuki, M., 2015 Nov 13, 2015 IEEE International Ultrasonics Symposium, IUS 2015. Institute of Electrical and Electronics Engineers Inc., 7329292

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

High- Tc/high-coupling relaxed PZT-based single crystal thin films

Wasa, K., Matsushima, T., Adachi, H., Matsunaga, T., Yanagitani, T. & Yamamoto, T., 2015 Mar 28, In : Journal of Applied Physics. 117, 12, 124106.

Research output: Contribution to journalArticle

9 Citations (Scopus)

Shear mode properties of c-axis parallel oriented ScxAl1-xN films grown by RF bias sputtering

Takayanagi, S., Matsukawa, M. & Yanagitani, T., 2015 Nov 13, 2015 IEEE International Ultrasonics Symposium, IUS 2015. Institute of Electrical and Electronics Engineers Inc., 7329631

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
2014

Effect of Sc concentration on shear wave velocities in ScAlN films measured by micro-Brillouin scattering technique

Ichihashi, H., Yanagitani, T., Suzuki, M., Takayanagi, S. & Matsukawa, M., 2014 Oct 20, IEEE International Ultrasonics Symposium, IUS. IEEE Computer Society, p. 2521-2524 4 p. 6932363. (IEEE International Ultrasonics Symposium, IUS).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Electromechanical coupling and gigahertz elastic properties of ScAlN films near phase boundary

Yanagitani, T. & Suzuki, M., 2014 Sep 22, In : Applied Physics Letters. 105, 12, 122907.

Research output: Contribution to journalArticle

37 Citations (Scopus)

Enhanced piezoelectricity in YbGaN films near phase boundary

Yanagitani, T. & Suzuki, M., 2014 Jan 1, In : Applied Physics Letters. 104, 8, 082911.

Research output: Contribution to journalArticle

9 Citations (Scopus)