• 772 Citations
  • 16 h-Index
20042019

Research output per year

If you made any changes in Pure these will be visible here soon.

Research Output

Filter
Conference contribution
2019

A Method for Extracting Mechanical Q Factor of the Piezoelectric Film without Etching Substrate

Kinoshita, S. & Yanagitani, T., 2019 Oct, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Computer Society, p. 299-300 2 p. 8926088. (IEEE International Ultrasonics Symposium, IUS; vol. 2019-October).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

A method to estimate kt2 of piezoelectric films from the change of lattice strain by XRD without removing substrate

Soutome, T. & Yanagitani, T., 2019 Oct, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Computer Society, p. 301-304 4 p. 8925766. (IEEE International Ultrasonics Symposium, IUS; vol. 2019-October).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Effect of negative ions generation from sputtering target on crystalline orientation and kt2 of ScAlN thin films

Kihara, R., Takayanagi, S. & Yanagitani, T., 2019 Oct, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Computer Society, p. 1120-1123 4 p. 8925983. (IEEE International Ultrasonics Symposium, IUS; vol. 2019-October).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Improvement of c-Axis Parallel Orientaition of ZnO film on Silica Glass Pipes with Various Diameters for SH-SAW Pipe Sensor

Wakabayashi, T., Takayanagi, S., Matukawa, M., Takamura, Y. & Yanagitani, T., 2019 Oct, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Computer Society, p. 671-674 4 p. 8925796. (IEEE International Ultrasonics Symposium, IUS; vol. 2019-October).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ion beam induced a-axis in-plane oriented c-axis oriented AlN thin film growth for high-Q BAW resonator application

Masamune, C. & Yanagitani, T., 2019 Oct, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Computer Society, p. 1127-1128 2 p. 8926047. (IEEE International Ultrasonics Symposium, IUS; vol. 2019-October).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

ScAlN polarization inverted resonators and enhancement of kt2 in new YbAlN materials for BAW devices

Yanagitani, T. & Jia, J., 2019 Oct, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Computer Society, p. 894-899 6 p. 8925786. (IEEE International Ultrasonics Symposium, IUS; vol. 2019-October).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Shear Mode Polarity Inverted ScAlN Multilayer for Application to BAW Transformer in Rectifying Antenna

Kinoshita, S. & Yanagitani, T., 2019 Oct, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Computer Society, p. 847-848 2 p. 8926197. (IEEE International Ultrasonics Symposium, IUS; vol. 2019-October).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Shear Mode Polarity Inverted ScAlN Multilayer for Application to BAW Transformer in Rectifying Antenna

Kinoshita, S. & Yanagitani, T., 2019 Oct, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Computer Society, p. 1118-1119 2 p. 8925674. (IEEE International Ultrasonics Symposium, IUS; vol. 2019-October).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2018

C-Axis Tilted ScAIN Film Shear Mode Resonators for Biosensing

Yazaki, H., Soutome, T., Karasawa, R., Takayanagi, S., Yoshida, K. & Yanagitani, T., 2018 Dec 17, 2018 IEEE International Ultrasonics Symposium, IUS 2018. IEEE Computer Society, 8580191. (IEEE International Ultrasonics Symposium, IUS; vol. 2018-October).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

High Efficiency Ultrasonic Transducer Using Polarity Inverted ZnO Film

Majima, T., Shimidzu, T. & Yanagitani, T., 2018 Dec 17, 2018 IEEE International Ultrasonics Symposium, IUS 2018. IEEE Computer Society, Vol. 2018-October. 8579933

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Investigation of Morphotropic Phase Boundary in Sputter-Grown Pb(Zrx, Ti1-x)03 Epitaxial Films

Noda, R., Shimidzu, T., Wasa, K. & Yanagitani, T., 2018 Dec 17, 2018 IEEE International Ultrasonics Symposium, IUS 2018. IEEE Computer Society, Vol. 2018-October. 8580154

Research output: Chapter in Book/Report/Conference proceedingConference contribution

PZT Epitaxial Thick Film for Ultrasonic Transducer at Frequencies below 100 MHz

Mazda, Y., Shimidzu, T. & Yanagitani, T., 2018 Dec 17, 2018 IEEE International Ultrasonics Symposium, IUS 2018. IEEE Computer Society, Vol. 2018-October. 8580215

Research output: Chapter in Book/Report/Conference proceedingConference contribution

ScAlN Free-Standing 0.1 mm Plates with 30-50 MHz Resonance Frequency

Masamune, C., Karasawal, R. & Yanagitani, T., 2018 Dec 17, 2018 IEEE International Ultrasonics Symposium, IUS 2018. IEEE Computer Society, Vol. 2018-October. 8579797

Research output: Chapter in Book/Report/Conference proceedingConference contribution

The Influence of Negative Ions Generation on the Arc-Melted and Hot Press Sintered Scal Alloy Targets to the Crystalline Orientation and kt 2 of the Scaln Films

Endo, Y., Karasawa, R., Takayanagi, S., Imakawa, M., Morisaka, K., Suzuki, Y. & Yanagitani, T., 2018 Dec 17, 2018 IEEE International Ultrasonics Symposium, IUS 2018. IEEE Computer Society, Vol. 2018-October. 8579841

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
2017

A new type wide-frequency-range shear viscosity sensor using c-axis tilted ScAlN thin film on temperature stable AT-cut quartz thick plate

Yamakawa, Y., Sano, K., Karasawa, R. & Yanagitani, T., 2017 Oct 31, 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 8092520

Research output: Chapter in Book/Report/Conference proceedingConference contribution

A new type wide-frequency-range shear viscosity sensor using c-axis tilted ScAlN thin film on temperature stable AT-cut quartz thick plate

Yamakawa, Y., Sano, K. H., Karasawa, R. & Yanagitani, T., 2017 Oct 31, 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 8092486

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Broadband frequency viscositymeasurement using low TCF shear mode resonators consisting of C-axis tilted scaln thin film on thick at-cut quartz plate

Yamakawa, Y., Sano, K., Karasawa, R. & Yanagitani, T., 2017 Jul 26, TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., p. 2135-2138 4 p. 7994497

Research output: Chapter in Book/Report/Conference proceedingConference contribution

C-Axiszig-zag polarization inverted ScAlN multilayer for FBAR transformer rectifying antenna

Karasawa, R. & Yanagitani, T., 2017 Oct 31, 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 8092551

Research output: Chapter in Book/Report/Conference proceedingConference contribution

C-Axis zig-zag polarization inverted ScAlN multilayer for FBAR transformer rectifying antenna

Karasawa, R. & Yanagitani, T., 2017 Oct 31, 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 8091618

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Effects of negative oxygen ions generated during Sc ingot sputtering on electromechanical coupling of ScAlN film

Takayanagi, S. & Yanagitani, T., 2017 Oct 31, 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 8092666

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Film growth of c-axis parallel oriented ZnO on entire surface of silica glass pipe for SH-SAW pipe sensor

Takamura, Y., Takayanagi, S., Matsukawa, M., Ishida, C. & Yanagitani, T., 2017 Oct 31, 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 8091911

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Film growth of c-axis tilted ScAlN on the sapphire substrate for SAW devices

Tokuda, S., Takayanagi, S., Matsukawa, M. & Yanagitani, T., 2017 Oct 31, 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 8092718

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Film growth of c-axis tilted ScAlN on the sapphire substrate for SAW devices

Tokuda, S., Takayanagi, S., Matsukawa, M. & Yanagitani, T., 2017 Oct 31, 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 8092072

Research output: Chapter in Book/Report/Conference proceedingConference contribution

High electromechanical coefficient kt 2=19% thick ScAlN piezoelectric films for ultrasonic transducer in low frequency of 80 MHz

Sano, K. H., Karasawa, R. & Yanagitani, T., 2017 Oct 31, 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 8092425

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

High electromechanical coefficient kt 2=19% thick ScAlN piezoelectric films for ultrasonic transducer in low frequency of 80 MHz

Sano, K. H., Karasawa, R. & Yanagitani, T., 2017 Oct 31, 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 8092005

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

The frequency switchable multi-layered BST/BaTiO3 epitaxial film resonator

Shimidzu, T., Yanagitani, T. & Wasa, K., 2017 Oct 31, 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 8091518

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

The frequency switchable multi-layered BST/BaTiO3 epitaxial film resonator

Shimidzu, T., Yanagitani, T. & Wasa, K., 2017 Oct 31, 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 8092735

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Thick ScAlN film for high efficient ultrasonic transducer in low frequency of 81 MHz

Sano, K. H., Karasawa, R. & Yanagitani, T., 2017 Jul 26, TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., p. 862-865 4 p. 7994185

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2016

Effects of energetic negative ions generated from sputtering targets on ScAlN film growth

Takayanagi, S., Matsukawa, M. & Yanagitani, T., 2016 Nov 1, 2016 IEEE International Ultrasonics Symposium, IUS 2016. IEEE Computer Society, Vol. 2016-November. 7728836

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Rapid and simultaneous measurement of longitudinal and shear wave velocities by Brillouin scattering from artificially induced phonons

Kawabe, M., Shibagaki, Y., Matsukawa, M., Yanagitani, T., Suzuki, M. & Takayanagi, S., 2016 Nov 1, 2016 IEEE International Ultrasonics Symposium, IUS 2016. IEEE Computer Society, 7728801. (IEEE International Ultrasonics Symposium, IUS; vol. 2016-November).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2015

Fast wave velocity measurement by Brillouin scattering using coherent induced phonon from ScAlN piezoelectric thin film

Kawabe, M., Ichihashi, H., Takayanagi, S., Matsukawa, M., Yanagitani, T. & Suzuki, M., 2015 Nov 13, 2015 IEEE International Ultrasonics Symposium, IUS 2015. Institute of Electrical and Electronics Engineers Inc., 7329292

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Shear mode properties of c-axis parallel oriented ScxAl1-xN films grown by RF bias sputtering

Takayanagi, S., Matsukawa, M. & Yanagitani, T., 2015 Nov 13, 2015 IEEE International Ultrasonics Symposium, IUS 2015. Institute of Electrical and Electronics Engineers Inc., 7329631

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
2014

Effect of Sc concentration on shear wave velocities in ScAlN films measured by micro-Brillouin scattering technique

Ichihashi, H., Yanagitani, T., Suzuki, M., Takayanagi, S. & Matsukawa, M., 2014 Oct 20, IEEE International Ultrasonics Symposium, IUS. IEEE Computer Society, p. 2521-2524 4 p. 6932363. (IEEE International Ultrasonics Symposium, IUS).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

High electromechanical coupling in PZT epitaxial thick film resonators at 550 °C

Yanagitani, T., Katada, K., Suzuki, M. & Wasa, K., 2014 Jan 1, IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings. IEEE Computer Society, 6859872. (IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

High Tc/high coupling perovskite thin films

Wasa, K., Matsushima, T., Adachi, H., Matsunaga, T., Yanagitani, T. & Yamamoto, T., 2014 Oct 13, 2014 Joint IEEE International Symposium on the Applications of Ferroelectric, International Workshop on Acoustic Transduction Materials and Devices and Workshop on Piezoresponse Force Microscopy, ISAF/IWATMD/PFM 2014. Institute of Electrical and Electronics Engineers Inc., 6923017. (2014 Joint IEEE International Symposium on the Applications of Ferroelectric, International Workshop on Acoustic Transduction Materials and Devices and Workshop on Piezoresponse Force Microscopy, ISAF/IWATMD/PFM 2014).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Multiple shear wave roundtrips liquid sensor by c-axis parallel oriented ZnO film/silica glass pipe structure

Hiyama, S., Yanagitani, T., Takayanagi, S., Kato, Y. & Matsukawa, M., 2014 Oct 20, IEEE International Ultrasonics Symposium, IUS. IEEE Computer Society, p. 765-768 4 p. 6932056. (IEEE International Ultrasonics Symposium, IUS).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Second harmonic mode polarization inverted resonator consisting of PbTiO3 thin film

Katada, K., Yanagitani, T., Suzuki, M. & Wasa, K., 2014 Jan 1, IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings. IEEE Computer Society, 6859871. (IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)
2012

Fast hypersonic velocity measurement by Brillouin scattering from induced phonons

Sugimoto, T., Yanagitani, T., Takayanagi, S. & Matsukawa, M., 2012 Dec 1, 2012 IEEE International Ultrasonics Symposium, IUS 2012. 6562324. (IEEE International Ultrasonics Symposium, IUS).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Polarization inverted (0001) / (000-1) ScAIN film resonators operating in second overtone mode

Suzuki, M., Yanagitani, T. & Odagawa, H., 2012 Dec 1, 2012 IEEE International Ultrasonics Symposium, IUS 2012. 6562094. (IEEE International Ultrasonics Symposium, IUS).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
2011

Brillouin scattering from induced phonons excited by the ZnO piezoelectric thin film with a coaxial resonator

Sugimoto, T., Sano, H., Yanagitani, T., Takayanagi, S. & Matsukawa, M., 2011 Dec 1, 2011 IEEE International Ultrasonics Symposium, IUS 2011. p. 1099-1102 4 p. 6293432. (IEEE International Ultrasonics Symposium, IUS).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

C-axis parallel oriented A1N film resonator fabricated by ion-beam assisted RF magnetron sputtering

Suzuki, M. & Yanagitani, T., 2011 Dec 1, 2011 IEEE International Ultrasonics Symposium, IUS 2011. p. 1230-1233 4 p. 6293526. (IEEE International Ultrasonics Symposium, IUS).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

C-axis parallel oriented ZnO film SH-SAW sensor for electrical conductivity measurement in liquid

Nakahigashi, Y., Yanagitani, T., Matsukawa, M. & Watanabe, Y., 2011 Dec 1, 2011 IEEE International Ultrasonics Symposium, IUS 2011. p. 810-813 4 p. 6293741. (IEEE International Ultrasonics Symposium, IUS).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Polarization-inverted multilayered pure shear mode AlN film resonator

Suzuki, M. & Yanagitani, T., 2011 Dec 1, 2011 IEEE International Ultrasonics Symposium, IUS 2011. p. 312-315 4 p. 6293063. (IEEE International Ultrasonics Symposium, IUS).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Quantitative analysis of the effect of energetic particle bombardment during deposition on (1120) texture formation in ZnO films

Takayanagi, S., Yanagitani, T., Matsukawa, M. & Watanabe, Y., 2011 Dec 1, 2011 IEEE International Ultrasonics Symposium, IUS 2011. p. 2317-2320 4 p. 6293444. (IEEE International Ultrasonics Symposium, IUS).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)
2010

Anisotropy of longitudinal wave velocity in spherically shaped bovine cortical bone

Yamamoto, K., Nakatsuji, T., Indo, M., Yanagitani, T., Matsukawa, M. & Yamazaki, K., 2010, The Third International Conference on the Development of Biomedical Engineering in Vietnam. p. 102-105 4 p. (IFMBE Proceedings; vol. 27).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

A simple technique for obtaining (112̄0) or (101̄0) textured ZnO films by RF bias sputtering

Takayanagi, S., Yanagitani, T., Matsukawa, M. & Watanabe, Y., 2010 Dec 1, 2010 IEEE International Ultrasonics Symposium, IUS 2010. p. 1060-1063 4 p. 5935655. (Proceedings - IEEE Ultrasonics Symposium).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Deposition techniques of c-axis-tilted ScAlN films by conventional RF magnetron sputtering

Arakawa, K., Yanagitani, T., Kano, K., Teshigahara, A. & Akiyama, M., 2010 Dec 1, 2010 IEEE International Ultrasonics Symposium, IUS 2010. p. 1050-1053 4 p. 5935747. (Proceedings - IEEE Ultrasonics Symposium).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

17 Citations (Scopus)

Giant shear mode electromechanical coupling coefficient k15 in c-axis tilted ScAlN films

Yanagitani, T., Arakawa, K., Kano, K., Teshigahara, A. & Akiyama, M., 2010 Dec 1, 2010 IEEE International Ultrasonics Symposium, IUS 2010. p. 2095-2098 4 p. 5935791. (Proceedings - IEEE Ultrasonics Symposium).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

36 Citations (Scopus)

Influence of shadowing effect on shear mode acoustic properties in the c-axis tilted AlN films

Suzuki, M. & Yanagitani, T., 2010 Dec 1, 2010 IEEE International Ultrasonics Symposium, IUS 2010. p. 1478-1481 4 p. 5935561. (Proceedings - IEEE Ultrasonics Symposium).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)
2009

Measurement of electric properties in a ZnO single crystal via electromechanical coupling using Brillouin scattering method

Yanagitani, T., Sano, H. & Matsukawa, M., 2009, 2009 IEEE International Ultrasonics Symposium and Short Courses, IUS 2009. Institute of Electrical and Electronics Engineers Inc., p. 1074-1077 4 p. 5441851. (Proceedings - IEEE Ultrasonics Symposium).

Research output: Chapter in Book/Report/Conference proceedingConference contribution