• 772 Citations
  • 16 h-Index
20042019

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Review article
2006

Effect of sputtering geometry on (112̄0) textured ZnO piezofilm

Miyamoto, Y., Yanagitani, T., Matsukawa, M. & Watanabe, Y., 2006 Jan 9, In : Acoustical Science and Technology. 27, 1, p. 53-55 3 p.

Research output: Contribution to journalReview article

5 Citations (Scopus)