Abstract
This paper presents the first 3-axis MEMS gyroscope that employs intermittent free vibration realized by a "Catch-and-Release (CR)" method. While CR enables drive power reduction and instant start-up, its application to multi-axis tuning-fork (TF) gyroscope is not straightforward, since the increased degrees-of-freedom is likely to induce hazardous beat during the free vibration. To prevent this, a pantograph structure is introduced, in which drive motion is constrained by fixed-length joints, thereby eliminating the spurious beat. The fabricated gyroscope shows 3-axis sensitivities of 0.3-0.6 aF/dps and <2% cross-axis sensitivities. The consecutive CR operation with a release DC voltage at 25 V and a high Q factor of 440k at 20 kHz of pantograph mode are confirmed.
| Original language | English |
|---|---|
| Title of host publication | 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 430-433 |
| Number of pages | 4 |
| ISBN (Electronic) | 9781728120072 |
| DOIs | |
| Publication status | Published - 2019 Jun 1 |
| Event | 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany Duration: 2019 Jun 23 → 2019 Jun 27 |
Publication series
| Name | 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII |
|---|
Conference
| Conference | 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII |
|---|---|
| Country | Germany |
| City | Berlin |
| Period | 19/6/23 → 19/6/27 |
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Keywords
- 3-axis
- Gyroscope
- low power
- MEMS
- Vibratory Gyroscope
ASJC Scopus subject areas
- Process Chemistry and Technology
- Spectroscopy
- Electrical and Electronic Engineering
- Mechanical Engineering
- Electronic, Optical and Magnetic Materials
- Control and Optimization
- Instrumentation
Cite this
A 3-Axis Catch-and-Release Gyroscope with Pantograph Vibration for Low-Power and Fast Start-Up Applications. / Yuzawa, Akiko; Gando, Ryunosuke; Masunishi, Kei; Ogawa, Etsuji; Hiraga, Hiroki; Tomizawa, Yasushi; Itakura, Tetsuro; Ikehashi, Tamio.
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. p. 430-433 8808391 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - A 3-Axis Catch-and-Release Gyroscope with Pantograph Vibration for Low-Power and Fast Start-Up Applications
AU - Yuzawa, Akiko
AU - Gando, Ryunosuke
AU - Masunishi, Kei
AU - Ogawa, Etsuji
AU - Hiraga, Hiroki
AU - Tomizawa, Yasushi
AU - Itakura, Tetsuro
AU - Ikehashi, Tamio
PY - 2019/6/1
Y1 - 2019/6/1
N2 - This paper presents the first 3-axis MEMS gyroscope that employs intermittent free vibration realized by a "Catch-and-Release (CR)" method. While CR enables drive power reduction and instant start-up, its application to multi-axis tuning-fork (TF) gyroscope is not straightforward, since the increased degrees-of-freedom is likely to induce hazardous beat during the free vibration. To prevent this, a pantograph structure is introduced, in which drive motion is constrained by fixed-length joints, thereby eliminating the spurious beat. The fabricated gyroscope shows 3-axis sensitivities of 0.3-0.6 aF/dps and <2% cross-axis sensitivities. The consecutive CR operation with a release DC voltage at 25 V and a high Q factor of 440k at 20 kHz of pantograph mode are confirmed.
AB - This paper presents the first 3-axis MEMS gyroscope that employs intermittent free vibration realized by a "Catch-and-Release (CR)" method. While CR enables drive power reduction and instant start-up, its application to multi-axis tuning-fork (TF) gyroscope is not straightforward, since the increased degrees-of-freedom is likely to induce hazardous beat during the free vibration. To prevent this, a pantograph structure is introduced, in which drive motion is constrained by fixed-length joints, thereby eliminating the spurious beat. The fabricated gyroscope shows 3-axis sensitivities of 0.3-0.6 aF/dps and <2% cross-axis sensitivities. The consecutive CR operation with a release DC voltage at 25 V and a high Q factor of 440k at 20 kHz of pantograph mode are confirmed.
KW - 3-axis
KW - Gyroscope
KW - low power
KW - MEMS
KW - Vibratory Gyroscope
UR - http://www.scopus.com/inward/record.url?scp=85071948007&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85071948007&partnerID=8YFLogxK
U2 - 10.1109/TRANSDUCERS.2019.8808391
DO - 10.1109/TRANSDUCERS.2019.8808391
M3 - Conference contribution
AN - SCOPUS:85071948007
T3 - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
SP - 430
EP - 433
BT - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PB - Institute of Electrical and Electronics Engineers Inc.
ER -