A 3-Axis Catch-and-Release Gyroscope with Pantograph Vibration for Low-Power and Fast Start-Up Applications

Akiko Yuzawa, Ryunosuke Gando, Kei Masunishi, Etsuji Ogawa, Hiroki Hiraga, Yasushi Tomizawa, Tetsuro Itakura, Tamio Ikehashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents the first 3-axis MEMS gyroscope that employs intermittent free vibration realized by a "Catch-and-Release (CR)" method. While CR enables drive power reduction and instant start-up, its application to multi-axis tuning-fork (TF) gyroscope is not straightforward, since the increased degrees-of-freedom is likely to induce hazardous beat during the free vibration. To prevent this, a pantograph structure is introduced, in which drive motion is constrained by fixed-length joints, thereby eliminating the spurious beat. The fabricated gyroscope shows 3-axis sensitivities of 0.3-0.6 aF/dps and <2% cross-axis sensitivities. The consecutive CR operation with a release DC voltage at 25 V and a high Q factor of 440k at 20 kHz of pantograph mode are confirmed.

Original languageEnglish
Title of host publication2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages430-433
Number of pages4
ISBN (Electronic)9781728120072
DOIs
Publication statusPublished - 2019 Jun 1
Event20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany
Duration: 2019 Jun 232019 Jun 27

Publication series

Name2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
CountryGermany
CityBerlin
Period19/6/2319/6/27

Fingerprint

Pantograph
Pantographs
Gyroscope
Start-up
Gyroscopes
gyroscopes
Vibration
vibration
free vibration
Free Vibration
Beat
Q factors
tuning fork gyroscopes
synchronism
MEMS
sensitivity
Tuning
Micro-electro-mechanical Systems
Instant
microelectromechanical systems

Keywords

  • 3-axis
  • Gyroscope
  • low power
  • MEMS
  • Vibratory Gyroscope

ASJC Scopus subject areas

  • Process Chemistry and Technology
  • Spectroscopy
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Control and Optimization
  • Instrumentation

Cite this

Yuzawa, A., Gando, R., Masunishi, K., Ogawa, E., Hiraga, H., Tomizawa, Y., ... Ikehashi, T. (2019). A 3-Axis Catch-and-Release Gyroscope with Pantograph Vibration for Low-Power and Fast Start-Up Applications. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 430-433). [8808391] (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2019.8808391

A 3-Axis Catch-and-Release Gyroscope with Pantograph Vibration for Low-Power and Fast Start-Up Applications. / Yuzawa, Akiko; Gando, Ryunosuke; Masunishi, Kei; Ogawa, Etsuji; Hiraga, Hiroki; Tomizawa, Yasushi; Itakura, Tetsuro; Ikehashi, Tamio.

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. p. 430-433 8808391 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yuzawa, A, Gando, R, Masunishi, K, Ogawa, E, Hiraga, H, Tomizawa, Y, Itakura, T & Ikehashi, T 2019, A 3-Axis Catch-and-Release Gyroscope with Pantograph Vibration for Low-Power and Fast Start-Up Applications. in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII., 8808391, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Institute of Electrical and Electronics Engineers Inc., pp. 430-433, 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Berlin, Germany, 19/6/23. https://doi.org/10.1109/TRANSDUCERS.2019.8808391
Yuzawa A, Gando R, Masunishi K, Ogawa E, Hiraga H, Tomizawa Y et al. A 3-Axis Catch-and-Release Gyroscope with Pantograph Vibration for Low-Power and Fast Start-Up Applications. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc. 2019. p. 430-433. 8808391. (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). https://doi.org/10.1109/TRANSDUCERS.2019.8808391
Yuzawa, Akiko ; Gando, Ryunosuke ; Masunishi, Kei ; Ogawa, Etsuji ; Hiraga, Hiroki ; Tomizawa, Yasushi ; Itakura, Tetsuro ; Ikehashi, Tamio. / A 3-Axis Catch-and-Release Gyroscope with Pantograph Vibration for Low-Power and Fast Start-Up Applications. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 430-433 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).
@inproceedings{a0129c7c8aca4905bc11700bddf3a82d,
title = "A 3-Axis Catch-and-Release Gyroscope with Pantograph Vibration for Low-Power and Fast Start-Up Applications",
abstract = "This paper presents the first 3-axis MEMS gyroscope that employs intermittent free vibration realized by a {"}Catch-and-Release (CR){"} method. While CR enables drive power reduction and instant start-up, its application to multi-axis tuning-fork (TF) gyroscope is not straightforward, since the increased degrees-of-freedom is likely to induce hazardous beat during the free vibration. To prevent this, a pantograph structure is introduced, in which drive motion is constrained by fixed-length joints, thereby eliminating the spurious beat. The fabricated gyroscope shows 3-axis sensitivities of 0.3-0.6 aF/dps and <2{\%} cross-axis sensitivities. The consecutive CR operation with a release DC voltage at 25 V and a high Q factor of 440k at 20 kHz of pantograph mode are confirmed.",
keywords = "3-axis, Gyroscope, low power, MEMS, Vibratory Gyroscope",
author = "Akiko Yuzawa and Ryunosuke Gando and Kei Masunishi and Etsuji Ogawa and Hiroki Hiraga and Yasushi Tomizawa and Tetsuro Itakura and Tamio Ikehashi",
year = "2019",
month = "6",
day = "1",
doi = "10.1109/TRANSDUCERS.2019.8808391",
language = "English",
series = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "430--433",
booktitle = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",

}

TY - GEN

T1 - A 3-Axis Catch-and-Release Gyroscope with Pantograph Vibration for Low-Power and Fast Start-Up Applications

AU - Yuzawa, Akiko

AU - Gando, Ryunosuke

AU - Masunishi, Kei

AU - Ogawa, Etsuji

AU - Hiraga, Hiroki

AU - Tomizawa, Yasushi

AU - Itakura, Tetsuro

AU - Ikehashi, Tamio

PY - 2019/6/1

Y1 - 2019/6/1

N2 - This paper presents the first 3-axis MEMS gyroscope that employs intermittent free vibration realized by a "Catch-and-Release (CR)" method. While CR enables drive power reduction and instant start-up, its application to multi-axis tuning-fork (TF) gyroscope is not straightforward, since the increased degrees-of-freedom is likely to induce hazardous beat during the free vibration. To prevent this, a pantograph structure is introduced, in which drive motion is constrained by fixed-length joints, thereby eliminating the spurious beat. The fabricated gyroscope shows 3-axis sensitivities of 0.3-0.6 aF/dps and <2% cross-axis sensitivities. The consecutive CR operation with a release DC voltage at 25 V and a high Q factor of 440k at 20 kHz of pantograph mode are confirmed.

AB - This paper presents the first 3-axis MEMS gyroscope that employs intermittent free vibration realized by a "Catch-and-Release (CR)" method. While CR enables drive power reduction and instant start-up, its application to multi-axis tuning-fork (TF) gyroscope is not straightforward, since the increased degrees-of-freedom is likely to induce hazardous beat during the free vibration. To prevent this, a pantograph structure is introduced, in which drive motion is constrained by fixed-length joints, thereby eliminating the spurious beat. The fabricated gyroscope shows 3-axis sensitivities of 0.3-0.6 aF/dps and <2% cross-axis sensitivities. The consecutive CR operation with a release DC voltage at 25 V and a high Q factor of 440k at 20 kHz of pantograph mode are confirmed.

KW - 3-axis

KW - Gyroscope

KW - low power

KW - MEMS

KW - Vibratory Gyroscope

UR - http://www.scopus.com/inward/record.url?scp=85071948007&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85071948007&partnerID=8YFLogxK

U2 - 10.1109/TRANSDUCERS.2019.8808391

DO - 10.1109/TRANSDUCERS.2019.8808391

M3 - Conference contribution

AN - SCOPUS:85071948007

T3 - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

SP - 430

EP - 433

BT - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

PB - Institute of Electrical and Electronics Engineers Inc.

ER -