@inproceedings{a0129c7c8aca4905bc11700bddf3a82d,
title = "A 3-Axis Catch-and-Release Gyroscope with Pantograph Vibration for Low-Power and Fast Start-Up Applications",
abstract = "This paper presents the first 3-axis MEMS gyroscope that employs intermittent free vibration realized by a {"}Catch-and-Release (CR){"} method. While CR enables drive power reduction and instant start-up, its application to multi-axis tuning-fork (TF) gyroscope is not straightforward, since the increased degrees-of-freedom is likely to induce hazardous beat during the free vibration. To prevent this, a pantograph structure is introduced, in which drive motion is constrained by fixed-length joints, thereby eliminating the spurious beat. The fabricated gyroscope shows 3-axis sensitivities of 0.3-0.6 aF/dps and <2% cross-axis sensitivities. The consecutive CR operation with a release DC voltage at 25 V and a high Q factor of 440k at 20 kHz of pantograph mode are confirmed.",
keywords = "3-axis, Gyroscope, MEMS, Vibratory Gyroscope, low power",
author = "Akiko Yuzawa and Ryunosuke Gando and Kei Masunishi and Etsuji Ogawa and Hiroki Hiraga and Yasushi Tomizawa and Tetsuro Itakura and Tamio Ikehashi",
year = "2019",
month = jun,
doi = "10.1109/TRANSDUCERS.2019.8808391",
language = "English",
series = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "430--433",
booktitle = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",
note = "20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII ; Conference date: 23-06-2019 Through 27-06-2019",
}