A 3V operation RF MEMS variable capacitor using piezoelectric and electrostatic actuation with lithographical bending control

Tamio Ikehashi, E. Ogawa, H. Yamazaki, T. Ohguro

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A 3V operation RF MEMS variable capacitor using hybrid actuation of piezoelectric and electrostatic forces is presented. Bending of the piezoelectric actuator is controlled by a lithographical pattern formed on top of the actuator. The hybrid actuation and the optimized bending enabled 2.6V pull-in voltage with the pull-out voltage as high as 2.0V. The measured capacitance ratio is 14.

Original languageEnglish
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages149-152
Number of pages4
DOIs
Publication statusPublished - 2007 Dec 1
Externally publishedYes
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: 2007 Jun 102007 Jun 14

Publication series

NameTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

Conference4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
CountryFrance
CityLyon
Period07/6/1007/6/14

Fingerprint

MEMS
Electrostatics
Capacitors
Electrostatic force
Piezoelectric actuators
Electric potential
Capacitance
Actuators

Keywords

  • Bending
  • Piezoelectric
  • PZT
  • RF MEMS
  • Variable capacitor

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Cite this

Ikehashi, T., Ogawa, E., Yamazaki, H., & Ohguro, T. (2007). A 3V operation RF MEMS variable capacitor using piezoelectric and electrostatic actuation with lithographical bending control. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 149-152). [4300093] (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2007.4300093

A 3V operation RF MEMS variable capacitor using piezoelectric and electrostatic actuation with lithographical bending control. / Ikehashi, Tamio; Ogawa, E.; Yamazaki, H.; Ohguro, T.

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 149-152 4300093 (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ikehashi, T, Ogawa, E, Yamazaki, H & Ohguro, T 2007, A 3V operation RF MEMS variable capacitor using piezoelectric and electrostatic actuation with lithographical bending control. in TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems., 4300093, TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, pp. 149-152, 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07, Lyon, France, 07/6/10. https://doi.org/10.1109/SENSOR.2007.4300093
Ikehashi T, Ogawa E, Yamazaki H, Ohguro T. A 3V operation RF MEMS variable capacitor using piezoelectric and electrostatic actuation with lithographical bending control. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 149-152. 4300093. (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2007.4300093
Ikehashi, Tamio ; Ogawa, E. ; Yamazaki, H. ; Ohguro, T. / A 3V operation RF MEMS variable capacitor using piezoelectric and electrostatic actuation with lithographical bending control. TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. pp. 149-152 (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems).
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