A 3V operation RF MEMS variable capacitor using piezoelectric and electrostatic actuation with lithographical bending control

T. Ikehashi, E. Ogawa, H. Yamazaki, T. Ohguro

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A 3V operation RF MEMS variable capacitor using hybrid actuation of piezoelectric and electrostatic forces is presented. Bending of the piezoelectric actuator is controlled by a lithographical pattern formed on top of the actuator. The hybrid actuation and the optimized bending enabled 2.6V pull-in voltage with the pull-out voltage as high as 2.0V. The measured capacitance ratio is 14.

Original languageEnglish
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages149-152
Number of pages4
DOIs
Publication statusPublished - 2007 Dec 1
Externally publishedYes
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: 2007 Jun 102007 Jun 14

Publication series

NameTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

Conference4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
CountryFrance
CityLyon
Period07/6/1007/6/14

Keywords

  • Bending
  • PZT
  • Piezoelectric
  • RF MEMS
  • Variable capacitor

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Ikehashi, T., Ogawa, E., Yamazaki, H., & Ohguro, T. (2007). A 3V operation RF MEMS variable capacitor using piezoelectric and electrostatic actuation with lithographical bending control. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 149-152). [4300093] (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2007.4300093