A Catch-and-Release drive MEMS gyroscope with enhanced sensitivity by mode-matching

Ryunosuke Gando; Haruka Kubo; Kei Masunishi; Yasushi Tomizawa; Etsuji Ogawa; Shunta Maeda; Yohei Hatakeyama; Tetsuro Itakura; Tamio Ikehashi

doi:10.1109/ISISS.2017.7935660

A Catch-and-Release drive MEMS gyroscope with enhanced sensitivity by mode-matching

Ryunosuke Gando, Haruka Kubo, Kei Masunishi, Yasushi Tomizawa, Etsuji Ogawa, Shunta Maeda, Yohei Hatakeyama, Tetsuro Itakura, Tamio Ikehashi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

6 Citations (Scopus)

Abstract

This paper presents a novel MEMS gyroscope that employs intermittent free vibration and mode matching. An intermittent operation is realized by a 'Catch-and-Release (CR)' technique, which enables significant reduction of the drive power. Sensitivities of the mode-matching and mode-split conditions are investigated by electrostatically tuning the sense-mode frequency. A sensitivity as high as 2.14 mV/dps, 52 times higher than the mode-split case, is obtained when the drive and sense frequency difference Δ is reduced to 50 Hz. Optimization for mode matching and quadrature nulling is also demonstrated.

Original language	English
Title of host publication	4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	50-53
Number of pages	4
ISBN (Electronic)	9781509032334
DOIs	https://doi.org/10.1109/ISISS.2017.7935660
Publication status	Published - 2017 May 30
Externally published	Yes
Event	4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Kauai, United States Duration: 2017 Mar 27 → 2017 Mar 30

Publication series

Name	4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings

Conference

Conference	4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017
Country/Territory	United States
City	Kauai
Period	17/3/27 → 17/3/30

Keywords

MEMS gyroscope
intermittent drive
mode matching
quadratue nulling

ASJC Scopus subject areas

Instrumentation

Access to Document

10.1109/ISISS.2017.7935660

Cite this

Gando, R., Kubo, H., Masunishi, K., Tomizawa, Y., Ogawa, E., Maeda, S., Hatakeyama, Y., Itakura, T., & Ikehashi, T. (2017). A Catch-and-Release drive MEMS gyroscope with enhanced sensitivity by mode-matching. In 4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings (pp. 50-53). [7935660] (4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISISS.2017.7935660

A Catch-and-Release drive MEMS gyroscope with enhanced sensitivity by mode-matching. / Gando, Ryunosuke; Kubo, Haruka; Masunishi, Kei et al.

4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2017. p. 50-53 7935660 (4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Gando, R, Kubo, H, Masunishi, K, Tomizawa, Y, Ogawa, E, Maeda, S, Hatakeyama, Y, Itakura, T & Ikehashi, T 2017, A Catch-and-Release drive MEMS gyroscope with enhanced sensitivity by mode-matching. in 4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings., 7935660, 4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings, Institute of Electrical and Electronics Engineers Inc., pp. 50-53, 4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017, Kauai, United States, 17/3/27. https://doi.org/10.1109/ISISS.2017.7935660

Gando R, Kubo H, Masunishi K, Tomizawa Y, Ogawa E, Maeda S et al. A Catch-and-Release drive MEMS gyroscope with enhanced sensitivity by mode-matching. In 4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2017. p. 50-53. 7935660. (4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings). doi: 10.1109/ISISS.2017.7935660

Gando, Ryunosuke ; Kubo, Haruka ; Masunishi, Kei et al. / A Catch-and-Release drive MEMS gyroscope with enhanced sensitivity by mode-matching. 4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 50-53 (4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings).

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abstract = "This paper presents a novel MEMS gyroscope that employs intermittent free vibration and mode matching. An intermittent operation is realized by a 'Catch-and-Release (CR)' technique, which enables significant reduction of the drive power. Sensitivities of the mode-matching and mode-split conditions are investigated by electrostatically tuning the sense-mode frequency. A sensitivity as high as 2.14 mV/dps, 52 times higher than the mode-split case, is obtained when the drive and sense frequency difference Δ is reduced to 50 Hz. Optimization for mode matching and quadrature nulling is also demonstrated.",

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AU - Maeda, Shunta

AU - Hatakeyama, Yohei

AU - Itakura, Tetsuro

AU - Ikehashi, Tamio

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N2 - This paper presents a novel MEMS gyroscope that employs intermittent free vibration and mode matching. An intermittent operation is realized by a 'Catch-and-Release (CR)' technique, which enables significant reduction of the drive power. Sensitivities of the mode-matching and mode-split conditions are investigated by electrostatically tuning the sense-mode frequency. A sensitivity as high as 2.14 mV/dps, 52 times higher than the mode-split case, is obtained when the drive and sense frequency difference Δ is reduced to 50 Hz. Optimization for mode matching and quadrature nulling is also demonstrated.

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A Catch-and-Release drive MEMS gyroscope with enhanced sensitivity by mode-matching

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Keywords

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