A Catch-and-Release drive MEMS gyroscope with enhanced sensitivity by mode-matching

Ryunosuke Gando, Haruka Kubo, Kei Masunishi, Yasushi Tomizawa, Etsuji Ogawa, Shunta Maeda, Yohei Hatakeyama, Tetsuro Itakura, Tamio Ikehashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

This paper presents a novel MEMS gyroscope that employs intermittent free vibration and mode matching. An intermittent operation is realized by a 'Catch-and-Release (CR)' technique, which enables significant reduction of the drive power. Sensitivities of the mode-matching and mode-split conditions are investigated by electrostatically tuning the sense-mode frequency. A sensitivity as high as 2.14 mV/dps, 52 times higher than the mode-split case, is obtained when the drive and sense frequency difference Δ is reduced to 50 Hz. Optimization for mode matching and quadrature nulling is also demonstrated.

Original languageEnglish
Title of host publication4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages50-53
Number of pages4
ISBN (Electronic)9781509032334
DOIs
Publication statusPublished - 2017 May 30
Externally publishedYes
Event4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Kauai, United States
Duration: 2017 Mar 272017 Mar 30

Publication series

Name4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings

Conference

Conference4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017
CountryUnited States
CityKauai
Period17/3/2717/3/30

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Keywords

  • intermittent drive
  • MEMS gyroscope
  • mode matching
  • quadratue nulling

ASJC Scopus subject areas

  • Instrumentation

Cite this

Gando, R., Kubo, H., Masunishi, K., Tomizawa, Y., Ogawa, E., Maeda, S., Hatakeyama, Y., Itakura, T., & Ikehashi, T. (2017). A Catch-and-Release drive MEMS gyroscope with enhanced sensitivity by mode-matching. In 4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings (pp. 50-53). [7935660] (4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISISS.2017.7935660