A comparison study: Direct wafer bonding of SiC-SiC by standard surface-activated bonding and modified surface-activated bonding with Si-containing Ar ion beam

Fengwen Mu, Kenichi Iguchi, Haruo Nakazawa, Yoshikazu Takahashi, Masahisa Fujino, Ran He, Tadatomo Suga

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

In this study, the results of direct wafer bonding of SiC-SiC at room temperature by standard surface-activated bonding (SAB) and modified SAB with a Si-containing Ar ion beam were compared, in terms of bonding energy, interface structure and composition, and the effects of rapid thermal annealing (RTA) at 1273K in Ar gas. Compared with that obtained by the standard SAB, the bonding interface obtained by the modified SAB with a Si-containing Ar ion beam is >30% stronger and almost completely recrystallized without oxidation during RTA, which should be due to the in situ Si compensation during surface activation by the Si-containing Ar ion beam.

Original languageEnglish
Article number081302
JournalApplied Physics Express
Volume9
Issue number8
DOIs
Publication statusPublished - 2016 Aug 1
Externally publishedYes

Fingerprint

Wafer bonding
Ion beams
ion beams
wafers
Rapid thermal annealing
annealing
Chemical activation
Oxidation
activation
oxidation
Chemical analysis
Gases
room temperature
gases

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

A comparison study : Direct wafer bonding of SiC-SiC by standard surface-activated bonding and modified surface-activated bonding with Si-containing Ar ion beam. / Mu, Fengwen; Iguchi, Kenichi; Nakazawa, Haruo; Takahashi, Yoshikazu; Fujino, Masahisa; He, Ran; Suga, Tadatomo.

In: Applied Physics Express, Vol. 9, No. 8, 081302, 01.08.2016.

Research output: Contribution to journalArticle

Mu, Fengwen ; Iguchi, Kenichi ; Nakazawa, Haruo ; Takahashi, Yoshikazu ; Fujino, Masahisa ; He, Ran ; Suga, Tadatomo. / A comparison study : Direct wafer bonding of SiC-SiC by standard surface-activated bonding and modified surface-activated bonding with Si-containing Ar ion beam. In: Applied Physics Express. 2016 ; Vol. 9, No. 8.
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