A creep-immune electrostatic actuator for RF-MEMS tunable capacitor

Etsuji Ogawa, Tamio Ikehashi, Tomohiro Saito, Hiroaki Yamazaki, Kei Masunishi, Yasushi Tomizawa, Tatsuya Ohguro, Yoshiaki Sugizaki, Yoshiaki Toyoshima, Hideki Shibata

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

A high creep-immunity MEMS actuator is proposed for RF-MEMS tunable capacitor. The creep-immunity is attained using silicon nitride, SiN, for the spring portions, where the stress is concentrated. Compared with an aluminum spring, the creep-induced deformation is reduced by a factor of 23 at 100 °C. We also confirmed by a billion cycle test that the SiN spring does not develop a brittle fracture.

Original languageEnglish
Pages (from-to)373-377
Number of pages5
JournalSensors and Actuators, A: Physical
Volume169
Issue number2
DOIs
Publication statusPublished - 2011 Oct 1

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Keywords

  • Brittle material
  • Creep
  • Electrostatic actuator
  • RF-MEMS
  • Tunable capacitor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

Cite this

Ogawa, E., Ikehashi, T., Saito, T., Yamazaki, H., Masunishi, K., Tomizawa, Y., Ohguro, T., Sugizaki, Y., Toyoshima, Y., & Shibata, H. (2011). A creep-immune electrostatic actuator for RF-MEMS tunable capacitor. Sensors and Actuators, A: Physical, 169(2), 373-377. https://doi.org/10.1016/j.sna.2011.04.014