A creep-immune electrostatic actuator for RF-MEMS tunable capacitor

Etsuji Ogawa, Tamio Ikehashi, Tomohiro Saito, Hiroaki Yamazaki, Kei Masunishi, Yasushi Tomizawa, Tatsuya Ohguro, Yoshiaki Sugizaki, Yoshiaki Toyoshima, Hideki Shibata

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

A high creep-immunity MEMS actuator is proposed for RF-MEMS tunable capacitor. The creep-immunity is attained using silicon nitride, SiN, for the spring portions, where the stress is concentrated. Compared with an aluminum spring, the creep-induced deformation is reduced by a factor of 23 at 100 °C. We also confirmed by a billion cycle test that the SiN spring does not develop a brittle fracture.

Original languageEnglish
Pages (from-to)373-377
Number of pages5
JournalSensors and Actuators, A: Physical
Volume169
Issue number2
DOIs
Publication statusPublished - 2011 Oct 1
Externally publishedYes

Fingerprint

Electrostatic actuators
immunity
microelectromechanical systems
MEMS
capacitors
Creep
Capacitors
actuators
electrostatics
silicon nitrides
Brittle fracture
Aluminum
aluminum
Silicon nitride
cycles
Actuators

Keywords

  • Brittle material
  • Creep
  • Electrostatic actuator
  • RF-MEMS
  • Tunable capacitor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

Cite this

Ogawa, E., Ikehashi, T., Saito, T., Yamazaki, H., Masunishi, K., Tomizawa, Y., ... Shibata, H. (2011). A creep-immune electrostatic actuator for RF-MEMS tunable capacitor. Sensors and Actuators, A: Physical, 169(2), 373-377. https://doi.org/10.1016/j.sna.2011.04.014

A creep-immune electrostatic actuator for RF-MEMS tunable capacitor. / Ogawa, Etsuji; Ikehashi, Tamio; Saito, Tomohiro; Yamazaki, Hiroaki; Masunishi, Kei; Tomizawa, Yasushi; Ohguro, Tatsuya; Sugizaki, Yoshiaki; Toyoshima, Yoshiaki; Shibata, Hideki.

In: Sensors and Actuators, A: Physical, Vol. 169, No. 2, 01.10.2011, p. 373-377.

Research output: Contribution to journalArticle

Ogawa, E, Ikehashi, T, Saito, T, Yamazaki, H, Masunishi, K, Tomizawa, Y, Ohguro, T, Sugizaki, Y, Toyoshima, Y & Shibata, H 2011, 'A creep-immune electrostatic actuator for RF-MEMS tunable capacitor', Sensors and Actuators, A: Physical, vol. 169, no. 2, pp. 373-377. https://doi.org/10.1016/j.sna.2011.04.014
Ogawa, Etsuji ; Ikehashi, Tamio ; Saito, Tomohiro ; Yamazaki, Hiroaki ; Masunishi, Kei ; Tomizawa, Yasushi ; Ohguro, Tatsuya ; Sugizaki, Yoshiaki ; Toyoshima, Yoshiaki ; Shibata, Hideki. / A creep-immune electrostatic actuator for RF-MEMS tunable capacitor. In: Sensors and Actuators, A: Physical. 2011 ; Vol. 169, No. 2. pp. 373-377.
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