A creep-immune electrostatic actuator for RF-MEMS tunable capacitor

Etsuji Ogawa*, Tamio Ikehashi, Tomohiro Saito, Hiroaki Yamazaki, Kei Masunishi, Yasushi Tomizawa, Tatsuya Ohguro, Yoshiaki Sugizaki, Yoshiaki Toyoshima, Hideki Shibata

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

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