A disposable, dead volume-free and leak-free in-plane PDMS microvalve

Jeung Sang Go, Shuichi Shoji

    Research output: Contribution to journalArticle

    69 Citations (Scopus)

    Abstract

    The align-less three-dimensional in-plane PDMS microvalve is presented. The device is entirely made from PDMS. The hemisphere with smooth surface ensures dead volume- and leak-free, which is formed by bulging of UV-curable glue. Also, the spin-coated PDMS membrane is bonded to the molded PDMS substrate for 3D structure fabrication indicating that align-less assembly is possible. In particular, the curing ratio, defined as the ratio of soft cure time and the full cure time of PDMS at the soft cure temperature, is for the first time introduced for PDMS-to-PDMS bonding. The best bonding judged from bonding feature and bonding strength is shown at the temperature of 50°C and 29min implying the curing ratio of 0.06. Finally, a membrane-inserted in-plane PDMS microvalve is fabricated and its performance is visually evaluated.

    Original languageEnglish
    Pages (from-to)438-444
    Number of pages7
    JournalSensors and Actuators, A: Physical
    Volume114
    Issue number2-3
    DOIs
    Publication statusPublished - 2004 Sep 1

    Fingerprint

    Free volume
    curing
    Curing
    bulging
    membranes
    Membranes
    glues
    Glues
    hemispheres
    assembly
    Fabrication
    Temperature
    fabrication
    temperature
    Substrates

    Keywords

    • Curing ratio
    • Microvalve
    • PDMS membrane
    • PDMS-to-PDMS bonding
    • UV-curable glue

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Mechanical Engineering
    • Instrumentation

    Cite this

    A disposable, dead volume-free and leak-free in-plane PDMS microvalve. / Go, Jeung Sang; Shoji, Shuichi.

    In: Sensors and Actuators, A: Physical, Vol. 114, No. 2-3, 01.09.2004, p. 438-444.

    Research output: Contribution to journalArticle

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