A disposable, dead volume-free and leak-free monolithic PDMS microvalve

Jeung Sang Go, T. Yamazaki, M. Kanai, H. Sato, S. Kawakami, Shuichi Shoji

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    11 Citations (Scopus)

    Abstract

    A new fabrication method of a membrane-inserted pneumatically-driven microvalve is presented. The device is entirely made from PDMS. To ensure dead volume-free and leak-free, the valve chamber is formed with smooth surface using molding of UV-curable bond. Also, to place a PDMS membrane on the molded PDMS substrate, bonding with spin-coated PDMS membrane is performed, indicating to align-less assembly. As a reference of bonding characterization, the curing ratio, defined as the ratio of soft bake time and hard cure time of PDMS at the same soft cure temperature, is introduced. The best bonding feature is obtained at the curing ratio of 0.06. The maximum tensile bonding strength is examined. Finally, the performance of the membrane-inserted monolithic PDMS valve is tested.

    Original languageEnglish
    Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
    PublisherInstitute of Electrical and Electronics Engineers Inc.
    Pages643-646
    Number of pages4
    Volume1
    ISBN (Print)0780377311, 9780780377318
    DOIs
    Publication statusPublished - 2003
    Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
    Duration: 2003 Jun 82003 Jun 12

    Other

    Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
    CountryUnited States
    CityBoston
    Period03/6/803/6/12

    Fingerprint

    Free volume
    Membranes
    Curing
    Molding
    Fabrication
    Substrates
    Temperature

    Keywords

    • Bonding
    • Curing
    • Fabrication
    • Glass
    • Microchannel
    • Microfluidics
    • Microvalves
    • Optical surface waves
    • Silicon
    • Valves

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering

    Cite this

    Go, J. S., Yamazaki, T., Kanai, M., Sato, H., Kawakami, S., & Shoji, S. (2003). A disposable, dead volume-free and leak-free monolithic PDMS microvalve. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (Vol. 1, pp. 643-646). [1215555] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1215555

    A disposable, dead volume-free and leak-free monolithic PDMS microvalve. / Go, Jeung Sang; Yamazaki, T.; Kanai, M.; Sato, H.; Kawakami, S.; Shoji, Shuichi.

    TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Vol. 1 Institute of Electrical and Electronics Engineers Inc., 2003. p. 643-646 1215555.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Go, JS, Yamazaki, T, Kanai, M, Sato, H, Kawakami, S & Shoji, S 2003, A disposable, dead volume-free and leak-free monolithic PDMS microvalve. in TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. vol. 1, 1215555, Institute of Electrical and Electronics Engineers Inc., pp. 643-646, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers, Boston, United States, 03/6/8. https://doi.org/10.1109/SENSOR.2003.1215555
    Go JS, Yamazaki T, Kanai M, Sato H, Kawakami S, Shoji S. A disposable, dead volume-free and leak-free monolithic PDMS microvalve. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Vol. 1. Institute of Electrical and Electronics Engineers Inc. 2003. p. 643-646. 1215555 https://doi.org/10.1109/SENSOR.2003.1215555
    Go, Jeung Sang ; Yamazaki, T. ; Kanai, M. ; Sato, H. ; Kawakami, S. ; Shoji, Shuichi. / A disposable, dead volume-free and leak-free monolithic PDMS microvalve. TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Vol. 1 Institute of Electrical and Electronics Engineers Inc., 2003. pp. 643-646
    @inproceedings{8206e8361e9d4f30987cd37739b31aa8,
    title = "A disposable, dead volume-free and leak-free monolithic PDMS microvalve",
    abstract = "A new fabrication method of a membrane-inserted pneumatically-driven microvalve is presented. The device is entirely made from PDMS. To ensure dead volume-free and leak-free, the valve chamber is formed with smooth surface using molding of UV-curable bond. Also, to place a PDMS membrane on the molded PDMS substrate, bonding with spin-coated PDMS membrane is performed, indicating to align-less assembly. As a reference of bonding characterization, the curing ratio, defined as the ratio of soft bake time and hard cure time of PDMS at the same soft cure temperature, is introduced. The best bonding feature is obtained at the curing ratio of 0.06. The maximum tensile bonding strength is examined. Finally, the performance of the membrane-inserted monolithic PDMS valve is tested.",
    keywords = "Bonding, Curing, Fabrication, Glass, Microchannel, Microfluidics, Microvalves, Optical surface waves, Silicon, Valves",
    author = "Go, {Jeung Sang} and T. Yamazaki and M. Kanai and H. Sato and S. Kawakami and Shuichi Shoji",
    year = "2003",
    doi = "10.1109/SENSOR.2003.1215555",
    language = "English",
    isbn = "0780377311",
    volume = "1",
    pages = "643--646",
    booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
    publisher = "Institute of Electrical and Electronics Engineers Inc.",

    }

    TY - GEN

    T1 - A disposable, dead volume-free and leak-free monolithic PDMS microvalve

    AU - Go, Jeung Sang

    AU - Yamazaki, T.

    AU - Kanai, M.

    AU - Sato, H.

    AU - Kawakami, S.

    AU - Shoji, Shuichi

    PY - 2003

    Y1 - 2003

    N2 - A new fabrication method of a membrane-inserted pneumatically-driven microvalve is presented. The device is entirely made from PDMS. To ensure dead volume-free and leak-free, the valve chamber is formed with smooth surface using molding of UV-curable bond. Also, to place a PDMS membrane on the molded PDMS substrate, bonding with spin-coated PDMS membrane is performed, indicating to align-less assembly. As a reference of bonding characterization, the curing ratio, defined as the ratio of soft bake time and hard cure time of PDMS at the same soft cure temperature, is introduced. The best bonding feature is obtained at the curing ratio of 0.06. The maximum tensile bonding strength is examined. Finally, the performance of the membrane-inserted monolithic PDMS valve is tested.

    AB - A new fabrication method of a membrane-inserted pneumatically-driven microvalve is presented. The device is entirely made from PDMS. To ensure dead volume-free and leak-free, the valve chamber is formed with smooth surface using molding of UV-curable bond. Also, to place a PDMS membrane on the molded PDMS substrate, bonding with spin-coated PDMS membrane is performed, indicating to align-less assembly. As a reference of bonding characterization, the curing ratio, defined as the ratio of soft bake time and hard cure time of PDMS at the same soft cure temperature, is introduced. The best bonding feature is obtained at the curing ratio of 0.06. The maximum tensile bonding strength is examined. Finally, the performance of the membrane-inserted monolithic PDMS valve is tested.

    KW - Bonding

    KW - Curing

    KW - Fabrication

    KW - Glass

    KW - Microchannel

    KW - Microfluidics

    KW - Microvalves

    KW - Optical surface waves

    KW - Silicon

    KW - Valves

    UR - http://www.scopus.com/inward/record.url?scp=3042852132&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=3042852132&partnerID=8YFLogxK

    U2 - 10.1109/SENSOR.2003.1215555

    DO - 10.1109/SENSOR.2003.1215555

    M3 - Conference contribution

    AN - SCOPUS:3042852132

    SN - 0780377311

    SN - 9780780377318

    VL - 1

    SP - 643

    EP - 646

    BT - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

    PB - Institute of Electrical and Electronics Engineers Inc.

    ER -