A disposable, dead volume-free and leak-free monolithic PDMS microvalve

Jeung Sang Go, T. Yamazaki, M. Kanai, H. Sato, S. Kawakami, Shuichi Shoji

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    11 Citations (Scopus)

    Abstract

    A new fabrication method of a membrane-inserted pneumatically-driven microvalve is presented. The device is entirely made from PDMS. To ensure dead volume-free and leak-free, the valve chamber is formed with smooth surface using molding of UV-curable bond. Also, to place a PDMS membrane on the molded PDMS substrate, bonding with spin-coated PDMS membrane is performed, indicating to align-less assembly. As a reference of bonding characterization, the curing ratio, defined as the ratio of soft bake time and hard cure time of PDMS at the same soft cure temperature, is introduced. The best bonding feature is obtained at the curing ratio of 0.06. The maximum tensile bonding strength is examined. Finally, the performance of the membrane-inserted monolithic PDMS valve is tested.

    Original languageEnglish
    Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
    PublisherInstitute of Electrical and Electronics Engineers Inc.
    Pages643-646
    Number of pages4
    Volume1
    ISBN (Print)0780377311, 9780780377318
    DOIs
    Publication statusPublished - 2003
    Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
    Duration: 2003 Jun 82003 Jun 12

    Other

    Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
    CountryUnited States
    CityBoston
    Period03/6/803/6/12

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    Keywords

    • Bonding
    • Curing
    • Fabrication
    • Glass
    • Microchannel
    • Microfluidics
    • Microvalves
    • Optical surface waves
    • Silicon
    • Valves

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering

    Cite this

    Go, J. S., Yamazaki, T., Kanai, M., Sato, H., Kawakami, S., & Shoji, S. (2003). A disposable, dead volume-free and leak-free monolithic PDMS microvalve. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (Vol. 1, pp. 643-646). [1215555] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1215555