A high power-handling RF MEMS tunable capacitor using quadruple series capacitor structure

Hiroaki Yamazaki, Tamio Ikehashi, Tomohiro Saito, Etsuji Ogawa, Takayuki Masunaga, Tatsuya Ohguro, Yoshiaki Sugizaki, Hideki Shibata

Research output: Chapter in Book/Report/Conference proceedingConference contribution

18 Citations (Scopus)

Abstract

This paper presents an RF MEMS tunable capacitor that achieves an excellent power-handling property with relatively low actuation voltage. The tunable capacitor consists of two fixed MIM (Metal-Insulator-Metal) capacitors and two MEMS capacitor elements, all connected in series. This quadruple series capacitor (QSC) structure enables reduction of the actuation voltage without sacrificing the power-handling capability, since the MIM capacitor reduces the RF voltage amplitude applied to the MEMS capacitors. The measured result demonstrates +36dBm hot-switching at 85°C with 21V pull-in voltage.

Original languageEnglish
Title of host publication2010 IEEE MTT-S International Microwave Symposium, MTT 2010
Pages1138-1141
Number of pages4
DOIs
Publication statusPublished - 2010 Oct 15
Externally publishedYes
Event2010 IEEE MTT-S International Microwave Symposium, MTT 2010 - Anaheim, CA, United States
Duration: 2010 May 232010 May 28

Publication series

NameIEEE MTT-S International Microwave Symposium Digest
ISSN (Print)0149-645X

Conference

Conference2010 IEEE MTT-S International Microwave Symposium, MTT 2010
CountryUnited States
CityAnaheim, CA
Period10/5/2310/5/28

Fingerprint

microelectromechanical systems
MEMS
capacitors
Capacitors
Electric potential
electric potential
Metals
actuation
metals
insulators
Chemical elements

Keywords

  • Hot-switching
  • Power-handling
  • RF MEMS
  • Tunable capacitor

ASJC Scopus subject areas

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Yamazaki, H., Ikehashi, T., Saito, T., Ogawa, E., Masunaga, T., Ohguro, T., ... Shibata, H. (2010). A high power-handling RF MEMS tunable capacitor using quadruple series capacitor structure. In 2010 IEEE MTT-S International Microwave Symposium, MTT 2010 (pp. 1138-1141). [5518281] (IEEE MTT-S International Microwave Symposium Digest). https://doi.org/10.1109/MWSYM.2010.5518281

A high power-handling RF MEMS tunable capacitor using quadruple series capacitor structure. / Yamazaki, Hiroaki; Ikehashi, Tamio; Saito, Tomohiro; Ogawa, Etsuji; Masunaga, Takayuki; Ohguro, Tatsuya; Sugizaki, Yoshiaki; Shibata, Hideki.

2010 IEEE MTT-S International Microwave Symposium, MTT 2010. 2010. p. 1138-1141 5518281 (IEEE MTT-S International Microwave Symposium Digest).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yamazaki, H, Ikehashi, T, Saito, T, Ogawa, E, Masunaga, T, Ohguro, T, Sugizaki, Y & Shibata, H 2010, A high power-handling RF MEMS tunable capacitor using quadruple series capacitor structure. in 2010 IEEE MTT-S International Microwave Symposium, MTT 2010., 5518281, IEEE MTT-S International Microwave Symposium Digest, pp. 1138-1141, 2010 IEEE MTT-S International Microwave Symposium, MTT 2010, Anaheim, CA, United States, 10/5/23. https://doi.org/10.1109/MWSYM.2010.5518281
Yamazaki H, Ikehashi T, Saito T, Ogawa E, Masunaga T, Ohguro T et al. A high power-handling RF MEMS tunable capacitor using quadruple series capacitor structure. In 2010 IEEE MTT-S International Microwave Symposium, MTT 2010. 2010. p. 1138-1141. 5518281. (IEEE MTT-S International Microwave Symposium Digest). https://doi.org/10.1109/MWSYM.2010.5518281
Yamazaki, Hiroaki ; Ikehashi, Tamio ; Saito, Tomohiro ; Ogawa, Etsuji ; Masunaga, Takayuki ; Ohguro, Tatsuya ; Sugizaki, Yoshiaki ; Shibata, Hideki. / A high power-handling RF MEMS tunable capacitor using quadruple series capacitor structure. 2010 IEEE MTT-S International Microwave Symposium, MTT 2010. 2010. pp. 1138-1141 (IEEE MTT-S International Microwave Symposium Digest).
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