A high sensitivity MEMS capacitive hydrogen sensor with inverted T-shaped electrode and ring-shaped palladium

Hiroaki Yamazaki, Yumi Hayashi, Kei Masunishi, Daiki Ono, Tamio Ikehashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We report on a novel Palladium (Pd)-based MEMS capacitive hydrogen gas sensor which has an 'inverted T-shaped' electrode and a 'ring-shaped palladium' layer that enable high sensitivity. Thanks to these structures, deformation of the membrane caused by hydrogen absorption can be efficiently transduced to the capacitance change. The capacitance change was found to be 3 times larger than that of the conventional structure. The prototype sensors were fabricated by a CMOS compatible process. The sensor operation was confirmed up to the lower explosive limit of 4%vol. hydrogen. We also show that the proposed sensor has a broad design window that attains high sensitivity.

Original languageEnglish
Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages226-229
Number of pages4
ISBN (Electronic)9781538627310
DOIs
Publication statusPublished - 2017 Jul 26
Externally publishedYes
Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
Duration: 2017 Jun 182017 Jun 22

Publication series

NameTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
CountryTaiwan, Province of China
CityKaohsiung
Period17/6/1817/6/22

Keywords

  • capacitance
  • Hydrogen sensor
  • MEMS
  • Palladium (Pd)

ASJC Scopus subject areas

  • Chemical Health and Safety
  • Instrumentation
  • Electrical and Electronic Engineering

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  • Cite this

    Yamazaki, H., Hayashi, Y., Masunishi, K., Ono, D., & Ikehashi, T. (2017). A high sensitivity MEMS capacitive hydrogen sensor with inverted T-shaped electrode and ring-shaped palladium. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 226-229). [7994029] (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2017.7994029