A high sensitivity MEMS capacitive hydrogen sensor with inverted T-shaped electrode and ring-shaped palladium

Hiroaki Yamazaki, Yumi Hayashi, Kei Masunishi, Daiki Ono, Tamio Ikehashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

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Chemical Compounds

Physics & Astronomy

Engineering & Materials Science