A high sensitivity MEMS capacitive hydrogen sensor with inverted T-shaped electrode and ring-shaped palladium

Hiroaki Yamazaki*, Yumi Hayashi, Kei Masunishi, Daiki Ono, Tamio Ikehashi

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'A high sensitivity MEMS capacitive hydrogen sensor with inverted T-shaped electrode and ring-shaped palladium'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds