A kinetic study of the chemical vapor deposition of silicon carbide from dichlorodimethylsilane precursors

T. Takeuchi, Y. Egashira, Toshio Ohsawa, H. Komiyama

Research output: Contribution to journalArticlepeer-review

19 Citations (Scopus)

Fingerprint Dive into the research topics of 'A kinetic study of the chemical vapor deposition of silicon carbide from dichlorodimethylsilane precursors'. Together they form a unique fingerprint.

Chemical Compounds

Physics & Astronomy

Engineering & Materials Science