A large scale, flip-flop RAM imitating a logic LSI for fast development of process technology

M. Fujii, K. Nii, H. Makino, S. Ohbayashi, M. Igarashi, T. Kawamura, M. Yokota, N. Tsuda, T. Yoshizawa, T. Tsutsui, N. Takeshita, N. Murata, T. Tanaka, T. Fujiwara, K. Asahina, M. Okada, K. Tomita, M. Takeuchi, H. Shinohara

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Abstract

We propose a new, large-scale, logic TEG, which is called flip-flop RAM (FF-RAM), to improve the total process quality before and during initial mass production. It is designed to be as convenient as an SRAM for measurement and imitates a logic LSI. We implemented a 10-Mgate FF-RAM using our 65 nm CMOS process. The test results show that it is effortless to detect failure locations and layers by using fail bit maps. Owing to this TEG, we can significantly shorten the development period for advanced CMOS technology.

Original languageEnglish
Title of host publication2007 IEEE International Conference on Microelectronic Test Structures, ICMTS - Conference Proceedings
Pages131-134
Number of pages4
DOIs
Publication statusPublished - 2007
Externally publishedYes
Event2007 IEEE International Conference on Microelectronic Test Structures, ICMTS '07 - Bunkyo-ku, Japan
Duration: 2007 Mar 192007 Mar 22

Publication series

NameIEEE International Conference on Microelectronic Test Structures

Other

Other2007 IEEE International Conference on Microelectronic Test Structures, ICMTS '07
CountryJapan
CityBunkyo-ku
Period07/3/1907/3/22

Keywords

  • Large-scale integration
  • Logic circuit fault diagnosis
  • SRAM
  • Yield optimization

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Fujii, M., Nii, K., Makino, H., Ohbayashi, S., Igarashi, M., Kawamura, T., Yokota, M., Tsuda, N., Yoshizawa, T., Tsutsui, T., Takeshita, N., Murata, N., Tanaka, T., Fujiwara, T., Asahina, K., Okada, M., Tomita, K., Takeuchi, M., & Shinohara, H. (2007). A large scale, flip-flop RAM imitating a logic LSI for fast development of process technology. In 2007 IEEE International Conference on Microelectronic Test Structures, ICMTS - Conference Proceedings (pp. 131-134). [4252419] (IEEE International Conference on Microelectronic Test Structures). https://doi.org/10.1109/ICMTS.2007.374469