A large-solid-angle electron energy analyzer

Tsuyoshi Ishikawa, Masahiro Goto, Takeshi Nakajima, Hideo Iwai, Yoshimasa Nihei, Chuhei Oshima

Research output: Contribution to journalArticle

Abstract

We have developed new type electron energy analyzer equipped with an electrostatic compact electron source. A display-type electron analyzer was developed by Daimon et al. on 1988, but the energy analysis is done by the Combination of low energy pass and high energy pass filters, and hence, the system is very complex. By limiting the acceptable solid angle of the display-type electron analyzer, we realized the energy analysis without any additional filters. The features of our system are 1) a simple structure, 2) a large working space, 3) no angular aberration, 4) a relatively large acceptable solid angle, and 5) conservation of the angular information. We report the preriminary data of the performance of this analyzer.

Original languageEnglish
Pages (from-to)1013-1017
Number of pages5
JournalShinku/Journal of the Vacuum Society of Japan
Volume44
Issue number12
Publication statusPublished - 2001

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Surfaces and Interfaces

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    Ishikawa, T., Goto, M., Nakajima, T., Iwai, H., Nihei, Y., & Oshima, C. (2001). A large-solid-angle electron energy analyzer. Shinku/Journal of the Vacuum Society of Japan, 44(12), 1013-1017.