A long-term reliability analysis of a creep-immune RF-MEMS tunable capacitor

Etsuji Ogawa; Kei Masunishi; Tamio Ikehashi; Tomohiro Saito; Hiroaki Yamazaki; Yasushi Tomizawa; Yoshiaki Sugizaki

doi:10.1109/TRANSDUCERS.2011.5969693

A long-term reliability analysis of a creep-immune RF-MEMS tunable capacitor

Etsuji Ogawa^*, Kei Masunishi, Tamio Ikehashi, Tomohiro Saito, Hiroaki Yamazaki, Yasushi Tomizawa, Yoshiaki Sugizaki

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

Actuators used in RF-MEMS tunable capacitors have an issue of creep-induced deformation. The creep is caused by a ductile-metal beam which is indispensable to attain the low loss. To avoid this issue, we previously reported an actuator structure that uses a brittle material, silicon nitride (SiN), at the stress-concentrated spring portions [1]. The present paper aims to clarify a long-term creep immunity of the actuator. We first determined parameters of Norton's law by measurements and then carried out Finite Element Method (FEM) simulations. As a result, we found that the shift of the up-state capacitance is 2.2% after keeping the actuator in down-state position for 3 years at 85°C.

Original language	English
Title of host publication	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages	2466-2469
Number of pages	4
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969693
Publication status	Published - 2011 Sept 1
Externally published	Yes
Event	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China Duration: 2011 Jun 5 → 2011 Jun 9

Publication series

Name	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Conference

Conference	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country/Territory	China
City	Beijing
Period	11/6/5 → 11/6/9

Keywords

Norton's law
RF-MEMS
brittle material
creep
electrostatic actuator
tunable capacitor

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/TRANSDUCERS.2011.5969693

Cite this

Ogawa, E., Masunishi, K., Ikehashi, T., Saito, T., Yamazaki, H., Tomizawa, Y., & Sugizaki, Y. (2011). A long-term reliability analysis of a creep-immune RF-MEMS tunable capacitor. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 2466-2469). [5969693] (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969693

A long-term reliability analysis of a creep-immune RF-MEMS tunable capacitor. / Ogawa, Etsuji; Masunishi, Kei; Ikehashi, Tamio et al.

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 2466-2469 5969693 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Ogawa, E, Masunishi, K, Ikehashi, T, Saito, T, Yamazaki, H, Tomizawa, Y & Sugizaki, Y 2011, A long-term reliability analysis of a creep-immune RF-MEMS tunable capacitor. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969693, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, pp. 2466-2469, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 11/6/5. https://doi.org/10.1109/TRANSDUCERS.2011.5969693

Ogawa E, Masunishi K, Ikehashi T, Saito T, Yamazaki H, Tomizawa Y et al. A long-term reliability analysis of a creep-immune RF-MEMS tunable capacitor. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 2466-2469. 5969693. (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). doi: 10.1109/TRANSDUCERS.2011.5969693

@inproceedings{52c1943f6ca44878b286d447e5f2b406,

title = "A long-term reliability analysis of a creep-immune RF-MEMS tunable capacitor",

abstract = "Actuators used in RF-MEMS tunable capacitors have an issue of creep-induced deformation. The creep is caused by a ductile-metal beam which is indispensable to attain the low loss. To avoid this issue, we previously reported an actuator structure that uses a brittle material, silicon nitride (SiN), at the stress-concentrated spring portions [1]. The present paper aims to clarify a long-term creep immunity of the actuator. We first determined parameters of Norton's law by measurements and then carried out Finite Element Method (FEM) simulations. As a result, we found that the shift of the up-state capacitance is 2.2% after keeping the actuator in down-state position for 3 years at 85°C.",

keywords = "Norton's law, RF-MEMS, brittle material, creep, electrostatic actuator, tunable capacitor",

author = "Etsuji Ogawa and Kei Masunishi and Tamio Ikehashi and Tomohiro Saito and Hiroaki Yamazaki and Yasushi Tomizawa and Yoshiaki Sugizaki",

year = "2011",

month = sep,

day = "1",

doi = "10.1109/TRANSDUCERS.2011.5969693",

language = "English",

isbn = "9781457701573",

series = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

pages = "2466--2469",

booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

note = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference date: 05-06-2011 Through 09-06-2011",

}

TY - GEN

T1 - A long-term reliability analysis of a creep-immune RF-MEMS tunable capacitor

AU - Ogawa, Etsuji

AU - Masunishi, Kei

AU - Ikehashi, Tamio

AU - Saito, Tomohiro

AU - Yamazaki, Hiroaki

AU - Tomizawa, Yasushi

AU - Sugizaki, Yoshiaki

PY - 2011/9/1

Y1 - 2011/9/1

N2 - Actuators used in RF-MEMS tunable capacitors have an issue of creep-induced deformation. The creep is caused by a ductile-metal beam which is indispensable to attain the low loss. To avoid this issue, we previously reported an actuator structure that uses a brittle material, silicon nitride (SiN), at the stress-concentrated spring portions [1]. The present paper aims to clarify a long-term creep immunity of the actuator. We first determined parameters of Norton's law by measurements and then carried out Finite Element Method (FEM) simulations. As a result, we found that the shift of the up-state capacitance is 2.2% after keeping the actuator in down-state position for 3 years at 85°C.

AB - Actuators used in RF-MEMS tunable capacitors have an issue of creep-induced deformation. The creep is caused by a ductile-metal beam which is indispensable to attain the low loss. To avoid this issue, we previously reported an actuator structure that uses a brittle material, silicon nitride (SiN), at the stress-concentrated spring portions [1]. The present paper aims to clarify a long-term creep immunity of the actuator. We first determined parameters of Norton's law by measurements and then carried out Finite Element Method (FEM) simulations. As a result, we found that the shift of the up-state capacitance is 2.2% after keeping the actuator in down-state position for 3 years at 85°C.

KW - Norton's law

KW - RF-MEMS

KW - brittle material

KW - creep

KW - electrostatic actuator

KW - tunable capacitor

UR - http://www.scopus.com/inward/record.url?scp=80052128447&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=80052128447&partnerID=8YFLogxK

U2 - 10.1109/TRANSDUCERS.2011.5969693

DO - 10.1109/TRANSDUCERS.2011.5969693

M3 - Conference contribution

AN - SCOPUS:80052128447

SN - 9781457701573

T3 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

SP - 2466

EP - 2469

BT - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

T2 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Y2 - 5 June 2011 through 9 June 2011

ER -

A long-term reliability analysis of a creep-immune RF-MEMS tunable capacitor

Abstract

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Keywords

ASJC Scopus subject areas

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