A MEMS rate integrating gyroscope based on catch-and-release mechanism for low-noise continuous angle measurement

Ryunosuke Gando, Shunta Maeda, Kei Masunishi, Yasushi Tomizawa, Etsuji Ogawa, Yohei Hatakeyama, Tetsuro Itakura, Tamio Ikehashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We present two new techniques effective in realizing high precision MEMS Rate Integrating Gyroscope (RIG). First one is the application of the Catch-and-Release (CR) scheme, reported previously, to the RIG. We show that continuous angle measurement can be attained by catching and releasing a pair of CR-RIGs in a complementary manner. Direct angle measurement is also demonstrated by adopting a doughnut-shaped CR-RIG. Second one is a resistive tunable damper that can compensate the damping asymmetry, a major cause of the angle drift. In this tunable damper, the mechanical damping factor can be tuned by resistance and voltage. We show that the theoretical model fits well with the experimental results.

Original languageEnglish
Title of host publication2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages944-947
Number of pages4
ISBN (Electronic)9781538647820
DOIs
Publication statusPublished - 2018 Apr 24
Externally publishedYes
Event31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom
Duration: 2018 Jan 212018 Jan 25

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2018-January
ISSN (Print)1084-6999

Other

Other31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
CountryUnited Kingdom
CityBelfast
Period18/1/2118/1/25

Fingerprint

Gyroscopes
gyroscopes
Angle measurement
low noise
microelectromechanical systems
MEMS
dampers
Damping
damping
releasing
asymmetry
causes
Electric potential
electric potential

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Gando, R., Maeda, S., Masunishi, K., Tomizawa, Y., Ogawa, E., Hatakeyama, Y., ... Ikehashi, T. (2018). A MEMS rate integrating gyroscope based on catch-and-release mechanism for low-noise continuous angle measurement. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 (pp. 944-947). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2018.8346713

A MEMS rate integrating gyroscope based on catch-and-release mechanism for low-noise continuous angle measurement. / Gando, Ryunosuke; Maeda, Shunta; Masunishi, Kei; Tomizawa, Yasushi; Ogawa, Etsuji; Hatakeyama, Yohei; Itakura, Tetsuro; Ikehashi, Tamio.

2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 944-947 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Gando, R, Maeda, S, Masunishi, K, Tomizawa, Y, Ogawa, E, Hatakeyama, Y, Itakura, T & Ikehashi, T 2018, A MEMS rate integrating gyroscope based on catch-and-release mechanism for low-noise continuous angle measurement. in 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2018-January, Institute of Electrical and Electronics Engineers Inc., pp. 944-947, 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom, 18/1/21. https://doi.org/10.1109/MEMSYS.2018.8346713
Gando R, Maeda S, Masunishi K, Tomizawa Y, Ogawa E, Hatakeyama Y et al. A MEMS rate integrating gyroscope based on catch-and-release mechanism for low-noise continuous angle measurement. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc. 2018. p. 944-947. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2018.8346713
Gando, Ryunosuke ; Maeda, Shunta ; Masunishi, Kei ; Tomizawa, Yasushi ; Ogawa, Etsuji ; Hatakeyama, Yohei ; Itakura, Tetsuro ; Ikehashi, Tamio. / A MEMS rate integrating gyroscope based on catch-and-release mechanism for low-noise continuous angle measurement. 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. pp. 944-947 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).
@inproceedings{fd58c5c1304b481bbcb88abc268f80f2,
title = "A MEMS rate integrating gyroscope based on catch-and-release mechanism for low-noise continuous angle measurement",
abstract = "We present two new techniques effective in realizing high precision MEMS Rate Integrating Gyroscope (RIG). First one is the application of the Catch-and-Release (CR) scheme, reported previously, to the RIG. We show that continuous angle measurement can be attained by catching and releasing a pair of CR-RIGs in a complementary manner. Direct angle measurement is also demonstrated by adopting a doughnut-shaped CR-RIG. Second one is a resistive tunable damper that can compensate the damping asymmetry, a major cause of the angle drift. In this tunable damper, the mechanical damping factor can be tuned by resistance and voltage. We show that the theoretical model fits well with the experimental results.",
author = "Ryunosuke Gando and Shunta Maeda and Kei Masunishi and Yasushi Tomizawa and Etsuji Ogawa and Yohei Hatakeyama and Tetsuro Itakura and Tamio Ikehashi",
year = "2018",
month = "4",
day = "24",
doi = "10.1109/MEMSYS.2018.8346713",
language = "English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "944--947",
booktitle = "2018 IEEE Micro Electro Mechanical Systems, MEMS 2018",

}

TY - GEN

T1 - A MEMS rate integrating gyroscope based on catch-and-release mechanism for low-noise continuous angle measurement

AU - Gando, Ryunosuke

AU - Maeda, Shunta

AU - Masunishi, Kei

AU - Tomizawa, Yasushi

AU - Ogawa, Etsuji

AU - Hatakeyama, Yohei

AU - Itakura, Tetsuro

AU - Ikehashi, Tamio

PY - 2018/4/24

Y1 - 2018/4/24

N2 - We present two new techniques effective in realizing high precision MEMS Rate Integrating Gyroscope (RIG). First one is the application of the Catch-and-Release (CR) scheme, reported previously, to the RIG. We show that continuous angle measurement can be attained by catching and releasing a pair of CR-RIGs in a complementary manner. Direct angle measurement is also demonstrated by adopting a doughnut-shaped CR-RIG. Second one is a resistive tunable damper that can compensate the damping asymmetry, a major cause of the angle drift. In this tunable damper, the mechanical damping factor can be tuned by resistance and voltage. We show that the theoretical model fits well with the experimental results.

AB - We present two new techniques effective in realizing high precision MEMS Rate Integrating Gyroscope (RIG). First one is the application of the Catch-and-Release (CR) scheme, reported previously, to the RIG. We show that continuous angle measurement can be attained by catching and releasing a pair of CR-RIGs in a complementary manner. Direct angle measurement is also demonstrated by adopting a doughnut-shaped CR-RIG. Second one is a resistive tunable damper that can compensate the damping asymmetry, a major cause of the angle drift. In this tunable damper, the mechanical damping factor can be tuned by resistance and voltage. We show that the theoretical model fits well with the experimental results.

UR - http://www.scopus.com/inward/record.url?scp=85047008826&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85047008826&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2018.8346713

DO - 10.1109/MEMSYS.2018.8346713

M3 - Conference contribution

AN - SCOPUS:85047008826

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 944

EP - 947

BT - 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018

PB - Institute of Electrical and Electronics Engineers Inc.

ER -