A method for evaluating acoustic Bragg reflector by ultrasonic microscope

Naoki Ishii, Keita Kondo, Takahiko Yanagitani

Research output: Contribution to journalConference articlepeer-review

Abstract

Bragg reflector in solidly mounted resonators (SMR) is usually evaluated by comparing entire impedance properties of SMR with the properties of free standing FBAR. Therefore, we cannot obtain piezoelectric layer and Bragg reflector separatory. We here present a experimental method for evaluating acoustic properties of Bragg reflectors using pulse-echo method in the GHz ranges. High quality Sc0.40Al0.60N film transducers with acoustic conversion loss of 5.4 dB and fractional band width of 106% were employed. Ta2O5/SiO2Bragg reflectors were prepared as a test sample. As a result, the experimentally extracted mechanical properties of Bragg reflector showed good agreement with theoretical prediction simulated by Mason's equivalent circuit model.

Original languageEnglish
JournalIEEE International Ultrasonics Symposium, IUS
DOIs
Publication statusPublished - 2021
Event2021 IEEE International Ultrasonics Symposium, IUS 2021 - Virtual, Online, China
Duration: 2011 Sep 112011 Sep 16

Keywords

  • Bragg reflector
  • Pulse echo method
  • SMR

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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