A micro chemical analyzing system integrated on a silicon wafer

Shigeru Nakagawa, Shuichi Shoji, Masayoshi Esashi

Research output: Contribution to conferencePaperpeer-review

50 Citations (Scopus)

Abstract

The fabrication of a three-way valve on a silicon wafer by micromachining techniques is presented. The valve consists of two silicon wafers, a pyrex glass, and a piezoelectric actuator. This three-way valve can control gas flow or liquid flow with voltage applied to the actuator. The liquid flow can be controlled from 0.1 μ1/min to 70 μ1/min. The results from integrating the three-way valve with a micropump to produce a flow injection analyzing system are discussed.

Original languageEnglish
Pages89-94
Number of pages6
Publication statusPublished - 1990 Dec 1
Externally publishedYes
EventProceedings - IEEE Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Napa Valley, CA, USA
Duration: 1990 Feb 111990 Feb 14

Other

OtherProceedings - IEEE Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots
CityNapa Valley, CA, USA
Period90/2/1190/2/14

ASJC Scopus subject areas

  • Engineering(all)

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