A micro chemical analyzing system integrated on a silicon wafer

Shigeru Nakagawa, Shuichi Shoji, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

49 Citations (Scopus)

Abstract

The fabrication of a three-way valve on a silicon wafer by micromachining techniques is presented. The valve consists of two silicon wafers, a pyrex glass, and a piezoelectric actuator. This three-way valve can control gas flow or liquid flow with voltage applied to the actuator. The liquid flow can be controlled from 0.1 μ1/min to 70 μ1/min. The results from integrating the three-way valve with a micropump to produce a flow injection analyzing system are discussed.

Original languageEnglish
Title of host publicationProceedings. IEEE Micro Electro Mechanical Systems-An Investigation of Micro Structures, Sensors, Actuators, Machines
Place of PublicationPiscataway, NJ, United States
PublisherPubl by IEEE
Pages89-94
Number of pages6
Publication statusPublished - 1990
Externally publishedYes
EventProceedings - IEEE Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Napa Valley, CA, USA
Duration: 1990 Feb 111990 Feb 14

Other

OtherProceedings - IEEE Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots
CityNapa Valley, CA, USA
Period90/2/1190/2/14

Fingerprint

Silicon wafers
Piezoelectric actuators
Micromachining
Liquids
Flow of gases
Actuators
Fabrication
Glass
Electric potential

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Nakagawa, S., Shoji, S., & Esashi, M. (1990). A micro chemical analyzing system integrated on a silicon wafer. In Proceedings. IEEE Micro Electro Mechanical Systems-An Investigation of Micro Structures, Sensors, Actuators, Machines (pp. 89-94). Piscataway, NJ, United States: Publ by IEEE.

A micro chemical analyzing system integrated on a silicon wafer. / Nakagawa, Shigeru; Shoji, Shuichi; Esashi, Masayoshi.

Proceedings. IEEE Micro Electro Mechanical Systems-An Investigation of Micro Structures, Sensors, Actuators, Machines. Piscataway, NJ, United States : Publ by IEEE, 1990. p. 89-94.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nakagawa, S, Shoji, S & Esashi, M 1990, A micro chemical analyzing system integrated on a silicon wafer. in Proceedings. IEEE Micro Electro Mechanical Systems-An Investigation of Micro Structures, Sensors, Actuators, Machines. Publ by IEEE, Piscataway, NJ, United States, pp. 89-94, Proceedings - IEEE Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots, Napa Valley, CA, USA, 90/2/11.
Nakagawa S, Shoji S, Esashi M. A micro chemical analyzing system integrated on a silicon wafer. In Proceedings. IEEE Micro Electro Mechanical Systems-An Investigation of Micro Structures, Sensors, Actuators, Machines. Piscataway, NJ, United States: Publ by IEEE. 1990. p. 89-94
Nakagawa, Shigeru ; Shoji, Shuichi ; Esashi, Masayoshi. / A micro chemical analyzing system integrated on a silicon wafer. Proceedings. IEEE Micro Electro Mechanical Systems-An Investigation of Micro Structures, Sensors, Actuators, Machines. Piscataway, NJ, United States : Publ by IEEE, 1990. pp. 89-94
@inproceedings{fa8fc1466f1c43a797ca1931ea1d44b3,
title = "A micro chemical analyzing system integrated on a silicon wafer",
abstract = "The fabrication of a three-way valve on a silicon wafer by micromachining techniques is presented. The valve consists of two silicon wafers, a pyrex glass, and a piezoelectric actuator. This three-way valve can control gas flow or liquid flow with voltage applied to the actuator. The liquid flow can be controlled from 0.1 μ1/min to 70 μ1/min. The results from integrating the three-way valve with a micropump to produce a flow injection analyzing system are discussed.",
author = "Shigeru Nakagawa and Shuichi Shoji and Masayoshi Esashi",
year = "1990",
language = "English",
pages = "89--94",
booktitle = "Proceedings. IEEE Micro Electro Mechanical Systems-An Investigation of Micro Structures, Sensors, Actuators, Machines",
publisher = "Publ by IEEE",

}

TY - GEN

T1 - A micro chemical analyzing system integrated on a silicon wafer

AU - Nakagawa, Shigeru

AU - Shoji, Shuichi

AU - Esashi, Masayoshi

PY - 1990

Y1 - 1990

N2 - The fabrication of a three-way valve on a silicon wafer by micromachining techniques is presented. The valve consists of two silicon wafers, a pyrex glass, and a piezoelectric actuator. This three-way valve can control gas flow or liquid flow with voltage applied to the actuator. The liquid flow can be controlled from 0.1 μ1/min to 70 μ1/min. The results from integrating the three-way valve with a micropump to produce a flow injection analyzing system are discussed.

AB - The fabrication of a three-way valve on a silicon wafer by micromachining techniques is presented. The valve consists of two silicon wafers, a pyrex glass, and a piezoelectric actuator. This three-way valve can control gas flow or liquid flow with voltage applied to the actuator. The liquid flow can be controlled from 0.1 μ1/min to 70 μ1/min. The results from integrating the three-way valve with a micropump to produce a flow injection analyzing system are discussed.

UR - http://www.scopus.com/inward/record.url?scp=0025638744&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0025638744&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0025638744

SP - 89

EP - 94

BT - Proceedings. IEEE Micro Electro Mechanical Systems-An Investigation of Micro Structures, Sensors, Actuators, Machines

PB - Publ by IEEE

CY - Piscataway, NJ, United States

ER -