A New Ion Counting System Devised for Mass-Selective Detection of Sputtered Neutrals in Laser SNMS

Shingo Ichimura, Keisuke Goto, Kiyohide Kokubun, Hazime Shimizu, Shigeki Matsuura

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A new ion counting system was devised for time-of-flight mass detection in sputtered neutral mass spectrometry (SNMS), using a pulse laser for postionization. A microchannel plate (MCP) intensifier used as a detector was gated by a retarding grid in front of the MCP for particular masses. High peak-counting ability (exceeding 1010 counts per second) of the system for ionization with a laser pulse (20–30 ns) was maintained for mass-selective detection. The performance of the new counting system at a high count rate was analyzed, and the detection limit and the accuracy were discussed.

Original languageEnglish
Pages (from-to)L1209-L1212
JournalJapanese Journal of Applied Physics
Volume29
Issue number7
DOIs
Publication statusPublished - 1990 Jan 1
Externally publishedYes

Fingerprint

Microchannels
Mass spectrometry
Laser pulses
counting
mass spectroscopy
microchannel plates
Lasers
Ions
intensifiers
Ionization
lasers
ions
pulses
Detectors
grids
retarding
ionization
detectors

Keywords

  • Counting
  • Image processing
  • Laser
  • Postionization
  • Snms
  • Time of flight

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

A New Ion Counting System Devised for Mass-Selective Detection of Sputtered Neutrals in Laser SNMS. / Ichimura, Shingo; Goto, Keisuke; Kokubun, Kiyohide; Shimizu, Hazime; Matsuura, Shigeki.

In: Japanese Journal of Applied Physics, Vol. 29, No. 7, 01.01.1990, p. L1209-L1212.

Research output: Contribution to journalArticle

Ichimura, Shingo ; Goto, Keisuke ; Kokubun, Kiyohide ; Shimizu, Hazime ; Matsuura, Shigeki. / A New Ion Counting System Devised for Mass-Selective Detection of Sputtered Neutrals in Laser SNMS. In: Japanese Journal of Applied Physics. 1990 ; Vol. 29, No. 7. pp. L1209-L1212.
@article{4e849bdeade349f3a8c048086390afc6,
title = "A New Ion Counting System Devised for Mass-Selective Detection of Sputtered Neutrals in Laser SNMS",
abstract = "A new ion counting system was devised for time-of-flight mass detection in sputtered neutral mass spectrometry (SNMS), using a pulse laser for postionization. A microchannel plate (MCP) intensifier used as a detector was gated by a retarding grid in front of the MCP for particular masses. High peak-counting ability (exceeding 1010 counts per second) of the system for ionization with a laser pulse (20–30 ns) was maintained for mass-selective detection. The performance of the new counting system at a high count rate was analyzed, and the detection limit and the accuracy were discussed.",
keywords = "Counting, Image processing, Laser, Postionization, Snms, Time of flight",
author = "Shingo Ichimura and Keisuke Goto and Kiyohide Kokubun and Hazime Shimizu and Shigeki Matsuura",
year = "1990",
month = "1",
day = "1",
doi = "10.1143/JJAP.29.L1209",
language = "English",
volume = "29",
pages = "L1209--L1212",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "7",

}

TY - JOUR

T1 - A New Ion Counting System Devised for Mass-Selective Detection of Sputtered Neutrals in Laser SNMS

AU - Ichimura, Shingo

AU - Goto, Keisuke

AU - Kokubun, Kiyohide

AU - Shimizu, Hazime

AU - Matsuura, Shigeki

PY - 1990/1/1

Y1 - 1990/1/1

N2 - A new ion counting system was devised for time-of-flight mass detection in sputtered neutral mass spectrometry (SNMS), using a pulse laser for postionization. A microchannel plate (MCP) intensifier used as a detector was gated by a retarding grid in front of the MCP for particular masses. High peak-counting ability (exceeding 1010 counts per second) of the system for ionization with a laser pulse (20–30 ns) was maintained for mass-selective detection. The performance of the new counting system at a high count rate was analyzed, and the detection limit and the accuracy were discussed.

AB - A new ion counting system was devised for time-of-flight mass detection in sputtered neutral mass spectrometry (SNMS), using a pulse laser for postionization. A microchannel plate (MCP) intensifier used as a detector was gated by a retarding grid in front of the MCP for particular masses. High peak-counting ability (exceeding 1010 counts per second) of the system for ionization with a laser pulse (20–30 ns) was maintained for mass-selective detection. The performance of the new counting system at a high count rate was analyzed, and the detection limit and the accuracy were discussed.

KW - Counting

KW - Image processing

KW - Laser

KW - Postionization

KW - Snms

KW - Time of flight

UR - http://www.scopus.com/inward/record.url?scp=0025461789&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0025461789&partnerID=8YFLogxK

U2 - 10.1143/JJAP.29.L1209

DO - 10.1143/JJAP.29.L1209

M3 - Article

AN - SCOPUS:0025461789

VL - 29

SP - L1209-L1212

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 7

ER -