A New Ion Counting System Devised for Mass-Selective Detection of Sputtered Neutrals in Laser SNMS

Shingo Ichimura, Keisuke Goto, Kiyohide Kokubun, Hazime Shimizu, Shigeki Matsuura

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3 Citations (Scopus)


A new ion counting system was devised for time-of-flight mass detection in sputtered neutral mass spectrometry (SNMS), using a pulse laser for postionization. A microchannel plate (MCP) intensifier used as a detector was gated by a retarding grid in front of the MCP for particular masses. High peak-counting ability (exceeding 1010 counts per second) of the system for ionization with a laser pulse (20–30 ns) was maintained for mass-selective detection. The performance of the new counting system at a high count rate was analyzed, and the detection limit and the accuracy were discussed.

Original languageEnglish
Pages (from-to)L1209-L1212
JournalJapanese journal of applied physics
Issue number7
Publication statusPublished - 1990 Jul



  • Counting
  • Image processing
  • Laser
  • Postionization
  • Snms
  • Time of flight

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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