A new method for cleaning the surface of ultra high-purity iron by high-purity ozone exposure and UV irradiation

Shigeru Suzuki, Shingo Ichimura, Akira Kurokawa, Yukio Ishikawa, Minoru Isshiki, Yoshio Waseda

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

A new method by applying high-purity ozone exposure and ultraviolet (UV) irradiation has been used for cleaning the surface of ultra high-purity iron with a carbon contaminated layer. The amount and chemical state of elements on the specimen surface were characterized by X-ray photoelectron spectroscopy. The intensity of the C 1s XPS peak due to carbon contamination was found to decrease with increasing ozone exposure at room temperature. UV irradiation during ozone exposure enhanced the cleaning rate. The XPS results show that contaminated carbon is mainly classified into major aliphatic carbon and minor carboxyl carbon, and their ratio depends upon the condition of ozone exposure. The role of ozone exposure and UV irradiation was discussed with respect to surface cleaning.

Original languageEnglish
Pages (from-to)451-456
Number of pages6
Journalmaterials transactions, jim
Volume38
Issue number5
DOIs
Publication statusPublished - 1997 Jan 1
Externally publishedYes

Fingerprint

Ozone
cleaning
ozone
Cleaning
purity
Carbon
Iron
Irradiation
iron
irradiation
carbon
X ray photoelectron spectroscopy
Surface cleaning
Chemical elements
contamination
Contamination
photoelectron spectroscopy
room temperature
x rays
Temperature

Keywords

  • Oxidation
  • Ozone
  • Surface cleaning
  • Ultra high-purity iron
  • X-ray photoelectron spectroscopy

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

A new method for cleaning the surface of ultra high-purity iron by high-purity ozone exposure and UV irradiation. / Suzuki, Shigeru; Ichimura, Shingo; Kurokawa, Akira; Ishikawa, Yukio; Isshiki, Minoru; Waseda, Yoshio.

In: materials transactions, jim, Vol. 38, No. 5, 01.01.1997, p. 451-456.

Research output: Contribution to journalArticle

Suzuki, Shigeru ; Ichimura, Shingo ; Kurokawa, Akira ; Ishikawa, Yukio ; Isshiki, Minoru ; Waseda, Yoshio. / A new method for cleaning the surface of ultra high-purity iron by high-purity ozone exposure and UV irradiation. In: materials transactions, jim. 1997 ; Vol. 38, No. 5. pp. 451-456.
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