A new type wide-frequency-range shear viscosity sensor using c-axis tilted ScAlN thin film on temperature stable AT-cut quartz thick plate

Yui Yamakawa; Ko Hei Sano; Rei Karasawa; Takahiko Yanagitani

doi:10.1109/ULTSYM.2017.8092486

A new type wide-frequency-range shear viscosity sensor using c-axis tilted ScAlN thin film on temperature stable AT-cut quartz thick plate

Yui Yamakawa, Ko Hei Sano, Rei Karasawa, Takahiko Yanagitani

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In order to study relaxation characteristics of viscoelasticity of the liquid, a wide frequency sweep in the range of MHz to GHz is desired. We, therefore, report a new type HBAR (High overtone Bulk Acoustic Resonator) sensor which makes it possible to operate in a wide frequency range. We choose AT-cut quartz as the substrate whose TCF is zero at room temperature to suppress frequency shifts due to the temperature change. TCF of the HBAR in air is measured to be -3.2 ppm/°C, which demonstrates the great improvement of TCF compared with single ScAlN films (-62 ppm/°C) due to the zero TCF AT-cut quartz substrate. In this study, frequency shifts and frequency peak attenuations were measured for various concentration of glycerin solutions to demonstrate usefulness of the HBAR viscosity measurement.

Original language	English
Title of host publication	2017 IEEE International Ultrasonics Symposium, IUS 2017
Publisher	IEEE Computer Society
ISBN (Electronic)	9781538633830
DOIs	https://doi.org/10.1109/ULTSYM.2017.8092486
Publication status	Published - 2017 Oct 31
Event	2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States Duration: 2017 Sep 6 → 2017 Sep 9

Other

Other	2017 IEEE International Ultrasonics Symposium, IUS 2017
Country	United States
City	Washington
Period	17/9/6 → 17/9/9

Keywords

AT-cut quartz crystal
Glycerin
HBAR
ScAlN films
Viscosity sensor

ASJC Scopus subject areas

Acoustics and Ultrasonics

Access to Document

10.1109/ULTSYM.2017.8092486

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A new type wide-frequency-range shear viscosity sensor using c-axis tilted ScAlN thin film on temperature stable AT-cut quartz thick plate. / Yamakawa, Yui; Sano, Ko Hei; Karasawa, Rei; Yanagitani, Takahiko.

2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 2017. 8092486.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Yamakawa, Y, Sano, KH, Karasawa, R & Yanagitani, T 2017, A new type wide-frequency-range shear viscosity sensor using c-axis tilted ScAlN thin film on temperature stable AT-cut quartz thick plate. in 2017 IEEE International Ultrasonics Symposium, IUS 2017., 8092486, IEEE Computer Society, 2017 IEEE International Ultrasonics Symposium, IUS 2017, Washington, United States, 17/9/6. https://doi.org/10.1109/ULTSYM.2017.8092486

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title = "A new type wide-frequency-range shear viscosity sensor using c-axis tilted ScAlN thin film on temperature stable AT-cut quartz thick plate",

abstract = "In order to study relaxation characteristics of viscoelasticity of the liquid, a wide frequency sweep in the range of MHz to GHz is desired. We, therefore, report a new type HBAR (High overtone Bulk Acoustic Resonator) sensor which makes it possible to operate in a wide frequency range. We choose AT-cut quartz as the substrate whose TCF is zero at room temperature to suppress frequency shifts due to the temperature change. TCF of the HBAR in air is measured to be -3.2 ppm/°C, which demonstrates the great improvement of TCF compared with single ScAlN films (-62 ppm/°C) due to the zero TCF AT-cut quartz substrate. In this study, frequency shifts and frequency peak attenuations were measured for various concentration of glycerin solutions to demonstrate usefulness of the HBAR viscosity measurement.",

keywords = "AT-cut quartz crystal, Glycerin, HBAR, ScAlN films, Viscosity sensor",

author = "Yui Yamakawa and Sano, {Ko Hei} and Rei Karasawa and Takahiko Yanagitani",

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N2 - In order to study relaxation characteristics of viscoelasticity of the liquid, a wide frequency sweep in the range of MHz to GHz is desired. We, therefore, report a new type HBAR (High overtone Bulk Acoustic Resonator) sensor which makes it possible to operate in a wide frequency range. We choose AT-cut quartz as the substrate whose TCF is zero at room temperature to suppress frequency shifts due to the temperature change. TCF of the HBAR in air is measured to be -3.2 ppm/°C, which demonstrates the great improvement of TCF compared with single ScAlN films (-62 ppm/°C) due to the zero TCF AT-cut quartz substrate. In this study, frequency shifts and frequency peak attenuations were measured for various concentration of glycerin solutions to demonstrate usefulness of the HBAR viscosity measurement.

AB - In order to study relaxation characteristics of viscoelasticity of the liquid, a wide frequency sweep in the range of MHz to GHz is desired. We, therefore, report a new type HBAR (High overtone Bulk Acoustic Resonator) sensor which makes it possible to operate in a wide frequency range. We choose AT-cut quartz as the substrate whose TCF is zero at room temperature to suppress frequency shifts due to the temperature change. TCF of the HBAR in air is measured to be -3.2 ppm/°C, which demonstrates the great improvement of TCF compared with single ScAlN films (-62 ppm/°C) due to the zero TCF AT-cut quartz substrate. In this study, frequency shifts and frequency peak attenuations were measured for various concentration of glycerin solutions to demonstrate usefulness of the HBAR viscosity measurement.

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