Abstract
In order to study relaxation characteristics of viscoelasticity of the liquid, a wide frequency sweep in the range of MHz to GHz is desired. We, therefore, report a new type HBAR (High overtone Bulk Acoustic Resonator) sensor which makes it possible to operate in a wide frequency range. We choose AT-cut quartz as the substrate whose TCF is zero at room temperature to suppress frequency shifts due to the temperature change. TCF of the HBAR in air is measured to be -3.2 ppm/°C, which demonstrates the great improvement of TCF compared with single ScAlN films (-62 ppm/°C) due to the zero TCF AT-cut quartz substrate. In this study, frequency shifts and frequency peak attenuations were measured for various concentration of glycerin solutions to demonstrate usefulness of the HBAR viscosity measurement.
| Original language | English |
|---|---|
| Title of host publication | 2017 IEEE International Ultrasonics Symposium, IUS 2017 |
| Publisher | IEEE Computer Society |
| ISBN (Electronic) | 9781538633830 |
| DOIs | |
| Publication status | Published - 2017 Oct 31 |
| Event | 2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States Duration: 2017 Sep 6 → 2017 Sep 9 |
Other
| Other | 2017 IEEE International Ultrasonics Symposium, IUS 2017 |
|---|---|
| Country | United States |
| City | Washington |
| Period | 17/9/6 → 17/9/9 |
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Keywords
- AT-cut quartz crystal
- Glycerin
- HBAR
- ScAlN films
- Viscosity sensor
ASJC Scopus subject areas
- Acoustics and Ultrasonics
Cite this
A new type wide-frequency-range shear viscosity sensor using c-axis tilted ScAlN thin film on temperature stable AT-cut quartz thick plate. / Yamakawa, Yui; Sano, Ko Hei; Karasawa, Rei; Yanagitani, Takahiko.
2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 2017. 8092486.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - A new type wide-frequency-range shear viscosity sensor using c-axis tilted ScAlN thin film on temperature stable AT-cut quartz thick plate
AU - Yamakawa, Yui
AU - Sano, Ko Hei
AU - Karasawa, Rei
AU - Yanagitani, Takahiko
PY - 2017/10/31
Y1 - 2017/10/31
N2 - In order to study relaxation characteristics of viscoelasticity of the liquid, a wide frequency sweep in the range of MHz to GHz is desired. We, therefore, report a new type HBAR (High overtone Bulk Acoustic Resonator) sensor which makes it possible to operate in a wide frequency range. We choose AT-cut quartz as the substrate whose TCF is zero at room temperature to suppress frequency shifts due to the temperature change. TCF of the HBAR in air is measured to be -3.2 ppm/°C, which demonstrates the great improvement of TCF compared with single ScAlN films (-62 ppm/°C) due to the zero TCF AT-cut quartz substrate. In this study, frequency shifts and frequency peak attenuations were measured for various concentration of glycerin solutions to demonstrate usefulness of the HBAR viscosity measurement.
AB - In order to study relaxation characteristics of viscoelasticity of the liquid, a wide frequency sweep in the range of MHz to GHz is desired. We, therefore, report a new type HBAR (High overtone Bulk Acoustic Resonator) sensor which makes it possible to operate in a wide frequency range. We choose AT-cut quartz as the substrate whose TCF is zero at room temperature to suppress frequency shifts due to the temperature change. TCF of the HBAR in air is measured to be -3.2 ppm/°C, which demonstrates the great improvement of TCF compared with single ScAlN films (-62 ppm/°C) due to the zero TCF AT-cut quartz substrate. In this study, frequency shifts and frequency peak attenuations were measured for various concentration of glycerin solutions to demonstrate usefulness of the HBAR viscosity measurement.
KW - AT-cut quartz crystal
KW - Glycerin
KW - HBAR
KW - ScAlN films
KW - Viscosity sensor
UR - http://www.scopus.com/inward/record.url?scp=85039460542&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85039460542&partnerID=8YFLogxK
U2 - 10.1109/ULTSYM.2017.8092486
DO - 10.1109/ULTSYM.2017.8092486
M3 - Conference contribution
AN - SCOPUS:85039460542
BT - 2017 IEEE International Ultrasonics Symposium, IUS 2017
PB - IEEE Computer Society
ER -