TY - GEN
T1 - A new type wide-frequency-range shear viscosity sensor using c-axis tilted ScAlN thin film on temperature stable AT-cut quartz thick plate
AU - Yamakawa, Yui
AU - Sano, Ko Hei
AU - Karasawa, Rei
AU - Yanagitani, Takahiko
N1 - Funding Information:
ACKNOWLEDGMENT This work was supported by the Japan Science and Technology Agency, PRESTO (JST, PRESTO, No. JPMJPR16R8) and KAKENHI (Giant-in-Aid for Scientific Research (B), No16H04356).
Funding Information:
This work was supported by the Japan Science and Technology Agency, PRESTO (JST, PRESTO, No. JPMJPR16R8) and KAKENHI (Giant-in-Aid for Scientific Research (B), No. 16H04356).
PY - 2017/10/31
Y1 - 2017/10/31
N2 - In order to study relaxation characteristics of viscoelasticity of the liquid, a wide frequency sweep in the range of MHz to GHz is desired. We, therefore, report a new type HBAR (High overtone Bulk Acoustic Resonator) sensor which makes it possible to operate in a wide frequency range. We choose AT-cut quartz as the substrate whose TCF is zero at room temperature to suppress frequency shifts due to the temperature change. TCF of the HBAR in air is measured to be -3.2 ppm/°C, which demonstrates the great improvement of TCF compared with single ScAlN films (-62 ppm/°C) due to the zero TCF AT-cut quartz substrate. In this study, frequency shifts and frequency peak attenuations were measured for various concentration of glycerin solutions to demonstrate usefulness of the HBAR viscosity measurement.
AB - In order to study relaxation characteristics of viscoelasticity of the liquid, a wide frequency sweep in the range of MHz to GHz is desired. We, therefore, report a new type HBAR (High overtone Bulk Acoustic Resonator) sensor which makes it possible to operate in a wide frequency range. We choose AT-cut quartz as the substrate whose TCF is zero at room temperature to suppress frequency shifts due to the temperature change. TCF of the HBAR in air is measured to be -3.2 ppm/°C, which demonstrates the great improvement of TCF compared with single ScAlN films (-62 ppm/°C) due to the zero TCF AT-cut quartz substrate. In this study, frequency shifts and frequency peak attenuations were measured for various concentration of glycerin solutions to demonstrate usefulness of the HBAR viscosity measurement.
KW - AT-cut quartz crystal
KW - Glycerin
KW - HBAR
KW - ScAlN films
KW - Viscosity sensor
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U2 - 10.1109/ULTSYM.2017.8092486
DO - 10.1109/ULTSYM.2017.8092486
M3 - Conference contribution
AN - SCOPUS:85039460542
T3 - IEEE International Ultrasonics Symposium, IUS
BT - 2017 IEEE International Ultrasonics Symposium, IUS 2017
PB - IEEE Computer Society
T2 - 2017 IEEE International Ultrasonics Symposium, IUS 2017
Y2 - 6 September 2017 through 9 September 2017
ER -