Abstract
In order to study relaxation characteristics of viscoelasticity of the liquid, a wide frequency sweep in the range of MHz to GHz is desired. We, therefore, report a new type HBAR (High overtone Bulk Acoustic Resonator) sensor which makes it possible to operate in a wide frequency range. We choose AT-cut quartz as the substrate whose TCF is zero at room temperature to suppress frequency shifts due to the temperature change. TCF of the HBAR in air is measured to be -3.2 ppm/°C, which demonstrates the great improvement of TCF compared with single ScAlN films (-62 ppm/°C) due to the zero TCF AT-cut quartz substrate. In this study, frequency shifts and frequency peak attenuations were measured for various concentration of glycerin solutions to demonstrate usefulness of the HBAR viscosity measurement.
Original language | English |
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Title of host publication | 2017 IEEE International Ultrasonics Symposium, IUS 2017 |
Publisher | IEEE Computer Society |
ISBN (Electronic) | 9781538633830 |
DOIs | |
Publication status | Published - 2017 Oct 31 |
Event | 2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States Duration: 2017 Sep 6 → 2017 Sep 9 |
Other
Other | 2017 IEEE International Ultrasonics Symposium, IUS 2017 |
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Country | United States |
City | Washington |
Period | 17/9/6 → 17/9/9 |
Keywords
- AT-cut quartz crystal
- Glycerin
- HBAR
- ScAlN films
- Viscosity sensor
ASJC Scopus subject areas
- Acoustics and Ultrasonics