A novel fabrication of in-channel 3-D micromesh structure using maskless multi-angle exposure and its microfilter application

Hironobu Sato, Takayuki Kakinuma, Jeung Sang Go, Shuichi Shoji

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    42 Citations (Scopus)

    Abstract

    This paper presents a novel fabrication method of in-channel three-dimensional micromesh structures using the conventional photolithography. The micromesh was realized by exposing UV light from the backside of the SU-8 coated metal-patterned glass substrate for different angles. Numbers of exposure and irradiation angle decided the shape and the size of micromesh. Based on this technique, three different micromesh-inserted microchannel structures were fabricated. For hydrodynamic characterization, their flow resistances were measured. Finally, for the application of Micro Total Analysis System (μTAS), the microfilter was fabricated and its filtering property was demonstrated.

    Original languageEnglish
    Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
    Pages223-226
    Number of pages4
    Publication statusPublished - 2003
    EventIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto
    Duration: 2003 Jan 192003 Jan 23

    Other

    OtherIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems
    CityKyoto
    Period03/1/1903/1/23

    Fingerprint

    Photolithography
    Microchannels
    Ultraviolet radiation
    Hydrodynamics
    Irradiation
    Fabrication
    Glass
    Substrates
    Metals

    ASJC Scopus subject areas

    • Mechanical Engineering
    • Electrical and Electronic Engineering
    • Control and Systems Engineering

    Cite this

    Sato, H., Kakinuma, T., Go, J. S., & Shoji, S. (2003). A novel fabrication of in-channel 3-D micromesh structure using maskless multi-angle exposure and its microfilter application. In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) (pp. 223-226)

    A novel fabrication of in-channel 3-D micromesh structure using maskless multi-angle exposure and its microfilter application. / Sato, Hironobu; Kakinuma, Takayuki; Go, Jeung Sang; Shoji, Shuichi.

    Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). 2003. p. 223-226.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Sato, H, Kakinuma, T, Go, JS & Shoji, S 2003, A novel fabrication of in-channel 3-D micromesh structure using maskless multi-angle exposure and its microfilter application. in Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). pp. 223-226, IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems, Kyoto, 03/1/19.
    Sato H, Kakinuma T, Go JS, Shoji S. A novel fabrication of in-channel 3-D micromesh structure using maskless multi-angle exposure and its microfilter application. In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). 2003. p. 223-226
    Sato, Hironobu ; Kakinuma, Takayuki ; Go, Jeung Sang ; Shoji, Shuichi. / A novel fabrication of in-channel 3-D micromesh structure using maskless multi-angle exposure and its microfilter application. Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). 2003. pp. 223-226
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