A photoresponse-compensated parallel piezoresistive cantilever for cellular force measurements

Uijin G. Jung, Kenta Kuwana, Yoshiharu Ajiki, Hidetoshi Takahashi, Tetsuo Kan, Yusuke Takei, Kentaro Noda, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

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    Abstract

    This paper describes a parallel piezoresistive cantilever that is composed of a force-sensing cantilever in addition to a reference cantilever for photoresponse compensation. Piezoresistive cantilevers have been applied in many cellular mechanical measurement studies because of their high sensitivity, high time resolution and ease of handling. However, the electrical resistance changes in response to the excitation light of the fluorescence microscope, which affects the cell measurements. We measured the I-V characteristics of a piezoresistive layer. These photoresponses occurred due to the internal photoelectric effect. We canceled the photoresponses using the reference cantilever. This paper demonstrates compensation of the cantilever photoresponse under irradiation at different angles, wavelengths and light intensities. As a result, the photoresponse could be decreased by 87%.

    Original languageEnglish
    Article number045015
    JournalJournal of Micromechanics and Microengineering
    Volume23
    Issue number4
    DOIs
    Publication statusPublished - 2013 Apr

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    ASJC Scopus subject areas

    • Mechanical Engineering
    • Electrical and Electronic Engineering
    • Mechanics of Materials
    • Electronic, Optical and Magnetic Materials

    Cite this

    Jung, U. G., Kuwana, K., Ajiki, Y., Takahashi, H., Kan, T., Takei, Y., Noda, K., Iwase, E., Matsumoto, K., & Shimoyama, I. (2013). A photoresponse-compensated parallel piezoresistive cantilever for cellular force measurements. Journal of Micromechanics and Microengineering, 23(4), [045015]. https://doi.org/10.1088/0960-1317/23/4/045015