A piezoelectric gyroscope with tilted c-axis ScAlN thin-films

Yuna Koike, Ryo Seki, Takahiko Yanagitani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Transmission and detection type MEMS gyroscope with a combination of two c-axis tilted ScAlN films where in-plane tilt angles are orthogonal to each other are fabricated. Thus, the polarities of shear wave generated at input piezoelectric film and detected at output piezoelectric film are orthogonal. Although we could not fabricate the setup of the Coriolis force detection experiment for the thin film MEMS devices, a large measurement system for large PZT plate device could be prepared. A preliminary experiment to demonstrate the Coriolis force detection by the transmission and detection type gyroscope have been performed by using a combination of the large shear mode PZT plate operating in the MHz range, instead of the c-axis tilted ScAlN film devices operating in the sub GHz range. In addition, we developed the theoretical model of the transmission and detection type gyroscope device using Mason's equivalent circuit model.

Original languageEnglish
Title of host publicationIUS 2022 - IEEE International Ultrasonics Symposium
PublisherIEEE Computer Society
ISBN (Electronic)9781665466578
DOIs
Publication statusPublished - 2022
Event2022 IEEE International Ultrasonics Symposium, IUS 2022 - Venice, Italy
Duration: 2022 Oct 102022 Oct 13

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume2022-October
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Conference

Conference2022 IEEE International Ultrasonics Symposium, IUS 2022
Country/TerritoryItaly
CityVenice
Period22/10/1022/10/13

Keywords

  • c-axis tilted ScAln thin film
  • Shear wave transducer
  • Transmission and detection type MEMS gyroscope

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

Fingerprint

Dive into the research topics of 'A piezoelectric gyroscope with tilted c-axis ScAlN thin-films'. Together they form a unique fingerprint.

Cite this