A piezoelectric quartz microactuator for a large pseudo-static displacement

Hiroshi Toshiyoshi; Dai Kobayashi; Hiroyuki Fujita; Toshitsugu Ueda

doi:10.1143/JJAP.33.L1806

A piezoelectric quartz microactuator for a large pseudo-static displacement

Hiroshi Toshiyoshi, Dai Kobayashi, Hiroyuki Fujita, Toshitsugu Ueda^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

A piezoelectric quartz microactuator based on a new driving mechanism is reported. The actuator is fabricated by anisotropic etching of a Z-cut quartz substrate and operated by means of piezoelectricity. The uniqueness of the actuator is that large static displacement is generated under AC voltage at the mechanical resonant frequency (8.5 kHz). Therefore, we call it a pseudo-static displacement actuator. The pseudo-static displacement is relatively large (40 μm), considering the size of the actuator (5 mm across). Furthermore, it is 20 times larger than the displacement in true DC voltage operation.

Original language	English
Pages (from-to)	L1806-L1808
Journal	Japanese Journal of Applied Physics
Volume	33
Issue number	12B
DOIs	https://doi.org/10.1143/JJAP.33.L1806
Publication status	Published - 1994
Externally published	Yes

Keywords

Microelectromechanical systems (MEMS)
Micromachine
Micromachining
Micromechatronics
Piezoelectricity
Pseudo-static displacement
Quartz microactuator

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/JJAP.33.L1806

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title = "A piezoelectric quartz microactuator for a large pseudo-static displacement",

abstract = "A piezoelectric quartz microactuator based on a new driving mechanism is reported. The actuator is fabricated by anisotropic etching of a Z-cut quartz substrate and operated by means of piezoelectricity. The uniqueness of the actuator is that large static displacement is generated under AC voltage at the mechanical resonant frequency (8.5 kHz). Therefore, we call it a pseudo-static displacement actuator. The pseudo-static displacement is relatively large (40 μm), considering the size of the actuator (5 mm across). Furthermore, it is 20 times larger than the displacement in true DC voltage operation.",

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year = "1994",

doi = "10.1143/JJAP.33.L1806",

language = "English",

volume = "33",

pages = "L1806--L1808",

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number = "12B",

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T1 - A piezoelectric quartz microactuator for a large pseudo-static displacement

AU - Toshiyoshi, Hiroshi

AU - Kobayashi, Dai

AU - Fujita, Hiroyuki

AU - Ueda, Toshitsugu

PY - 1994

Y1 - 1994

N2 - A piezoelectric quartz microactuator based on a new driving mechanism is reported. The actuator is fabricated by anisotropic etching of a Z-cut quartz substrate and operated by means of piezoelectricity. The uniqueness of the actuator is that large static displacement is generated under AC voltage at the mechanical resonant frequency (8.5 kHz). Therefore, we call it a pseudo-static displacement actuator. The pseudo-static displacement is relatively large (40 μm), considering the size of the actuator (5 mm across). Furthermore, it is 20 times larger than the displacement in true DC voltage operation.

AB - A piezoelectric quartz microactuator based on a new driving mechanism is reported. The actuator is fabricated by anisotropic etching of a Z-cut quartz substrate and operated by means of piezoelectricity. The uniqueness of the actuator is that large static displacement is generated under AC voltage at the mechanical resonant frequency (8.5 kHz). Therefore, we call it a pseudo-static displacement actuator. The pseudo-static displacement is relatively large (40 μm), considering the size of the actuator (5 mm across). Furthermore, it is 20 times larger than the displacement in true DC voltage operation.

KW - Microelectromechanical systems (MEMS)

KW - Micromachine

KW - Micromachining

KW - Micromechatronics

KW - Piezoelectricity

KW - Pseudo-static displacement

KW - Quartz microactuator

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SP - L1806-L1808

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

IS - 12B

ER -

A piezoelectric quartz microactuator for a large pseudo-static displacement

Abstract

Keywords

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