A piezoelectric quartz microactuator based on a new driving mechanism is reported. The actuator is fabricated by anisotropic etching of a Z-cut quartz substrate and operated by means of piezoelectricity. The uniqueness of the actuator is that large static displacement is generated under AC voltage at the mechanical resonant frequency (8.5 kHz). Therefore, we call it a pseudo-static displacement actuator. The pseudo-static displacement is relatively large (40 μm), considering the size of the actuator (5 mm across). Furthermore, it is 20 times larger than the displacement in true DC voltage operation.
|Journal||Japanese Journal of Applied Physics|
|Publication status||Published - 1994|
- Microelectromechanical systems (MEMS)
- Pseudo-static displacement
- Quartz microactuator
ASJC Scopus subject areas
- Physics and Astronomy(all)