A piezoelectric quartz microactuator for a large pseudo-static displacement

Hiroshi Toshiyoshi, Dai Kobayashi, Hiroyuki Fujita, Toshitsugu Ueda

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

A piezoelectric quartz microactuator based on a new driving mechanism is reported. The actuator is fabricated by anisotropic etching of a Z-cut quartz substrate and operated by means of piezoelectricity. The uniqueness of the actuator is that large static displacement is generated under AC voltage at the mechanical resonant frequency (8.5 kHz). Therefore, we call it a pseudo-static displacement actuator. The pseudo-static displacement is relatively large (40 μm), considering the size of the actuator (5 mm across). Furthermore, it is 20 times larger than the displacement in true DC voltage operation.

Original languageEnglish
Pages (from-to)L1806-L1808
JournalJapanese Journal of Applied Physics
Volume33
Issue number12B
DOIs
Publication statusPublished - 1994
Externally publishedYes

Keywords

  • Microelectromechanical systems (MEMS)
  • Micromachine
  • Micromachining
  • Micromechatronics
  • Piezoelectricity
  • Pseudo-static displacement
  • Quartz microactuator

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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