A review of capacitive MEMS hydrogen sensor using Pd-based metallic glass with fast response and low power consumption

Hiroaki Yamazaki, Yumi Hayashi, Kei Masunishi, Daiki Ono, Tamio Ikehashi

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1 Citation (Scopus)

Abstract

This paper reports on a capacitive MEMS hydrogen sensor using Pd-based metallic glass (MG) for future hydrogen society. First, we investigate PdCuSi as a Pd-based MG and show that this material is promising for capacitive MEMS hydrogen sensor. Second, we employ the Pd-based MG in a hydrogen sensor that has an inverted T-shaped electrode. The sensor is fabricated by a surface micromachining process. We show that the fabricated hydrogen sensor exhibits hysteresis-free and fast response properties at room temperature.

Original languageEnglish
Pages (from-to)70-77
Number of pages8
JournalElectronics and Communications in Japan
Volume102
Issue number3
DOIs
Publication statusPublished - 2019 Mar

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Keywords

  • MEMS
  • Pd-based metallic glass
  • capacitive
  • hydrogen sensor
  • hydrogen society

ASJC Scopus subject areas

  • Signal Processing
  • Physics and Astronomy(all)
  • Computer Networks and Communications
  • Electrical and Electronic Engineering
  • Applied Mathematics

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