A Review of Capacitive MEMS Hydrogen Sensor using Pd based Metallic Glass with Fast Response and Low Power Consumption

Hiroaki Yamazaki; Yumi Hayashi; Kei Masunishi; Daiki Ono; Tamio Ikehashi

doi:10.1541/ieejsmas.138.312

A Review of Capacitive MEMS Hydrogen Sensor using Pd based Metallic Glass with Fast Response and Low Power Consumption

Hiroaki Yamazaki^*, Yumi Hayashi, Kei Masunishi, Daiki Ono, Tamio Ikehashi

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

This paper addresses a capacitive MEMS hydrogen sensor using Pd based metallic glass for future hydrogen society. Firstly, we investigate PdCuSi as Pd based metallic glass (MG) and show this material is promising for capacitive MEMS hydrogen sensor. Secondly, we apply the Pd based MG to a hydrogen sensor having inverted T-shaped electrode. The sensor was fabricated by a surface micromachining process. We show that the fabricated hydrogen sensor exhibits hysteresis free and fast response property at room temperature.

Original language	English
Pages (from-to)	312-318
Number of pages	7
Journal	ieej transactions on sensors and micromachines
Volume	138
Issue number	7
DOIs	https://doi.org/10.1541/ieejsmas.138.312
Publication status	Published - 2018 Jan 1
Externally published	Yes

Keywords

Capacitive
Hydrogen sensor
Hydrogen society
MEMS
Pd based metallic glass

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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10.1541/ieejsmas.138.312

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@article{90065cf2efd049fab9cf9c956a893145,

title = "A Review of Capacitive MEMS Hydrogen Sensor using Pd based Metallic Glass with Fast Response and Low Power Consumption",

abstract = "This paper addresses a capacitive MEMS hydrogen sensor using Pd based metallic glass for future hydrogen society. Firstly, we investigate PdCuSi as Pd based metallic glass (MG) and show this material is promising for capacitive MEMS hydrogen sensor. Secondly, we apply the Pd based MG to a hydrogen sensor having inverted T-shaped electrode. The sensor was fabricated by a surface micromachining process. We show that the fabricated hydrogen sensor exhibits hysteresis free and fast response property at room temperature.",

keywords = "Capacitive, Hydrogen sensor, Hydrogen society, MEMS, Pd based metallic glass",

author = "Hiroaki Yamazaki and Yumi Hayashi and Kei Masunishi and Daiki Ono and Tamio Ikehashi",

year = "2018",

month = jan,

day = "1",

doi = "10.1541/ieejsmas.138.312",

language = "English",

volume = "138",

pages = "312--318",

journal = "IEEJ Transactions on Sensors and Micromachines",

issn = "1341-8939",

publisher = "The Institute of Electrical Engineers of Japan",

number = "7",

}

TY - JOUR

T1 - A Review of Capacitive MEMS Hydrogen Sensor using Pd based Metallic Glass with Fast Response and Low Power Consumption

AU - Yamazaki, Hiroaki

AU - Hayashi, Yumi

AU - Masunishi, Kei

AU - Ono, Daiki

AU - Ikehashi, Tamio

PY - 2018/1/1

Y1 - 2018/1/1

N2 - This paper addresses a capacitive MEMS hydrogen sensor using Pd based metallic glass for future hydrogen society. Firstly, we investigate PdCuSi as Pd based metallic glass (MG) and show this material is promising for capacitive MEMS hydrogen sensor. Secondly, we apply the Pd based MG to a hydrogen sensor having inverted T-shaped electrode. The sensor was fabricated by a surface micromachining process. We show that the fabricated hydrogen sensor exhibits hysteresis free and fast response property at room temperature.

AB - This paper addresses a capacitive MEMS hydrogen sensor using Pd based metallic glass for future hydrogen society. Firstly, we investigate PdCuSi as Pd based metallic glass (MG) and show this material is promising for capacitive MEMS hydrogen sensor. Secondly, we apply the Pd based MG to a hydrogen sensor having inverted T-shaped electrode. The sensor was fabricated by a surface micromachining process. We show that the fabricated hydrogen sensor exhibits hysteresis free and fast response property at room temperature.

KW - Capacitive

KW - Hydrogen sensor

KW - Hydrogen society

KW - MEMS

KW - Pd based metallic glass

UR - http://www.scopus.com/inward/record.url?scp=85049373779&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85049373779&partnerID=8YFLogxK

U2 - 10.1541/ieejsmas.138.312

DO - 10.1541/ieejsmas.138.312

M3 - Article

AN - SCOPUS:85049373779

SN - 1341-8939

VL - 138

SP - 312

EP - 318

JO - IEEJ Transactions on Sensors and Micromachines

JF - IEEJ Transactions on Sensors and Micromachines

IS - 7

ER -

A Review of Capacitive MEMS Hydrogen Sensor using Pd based Metallic Glass with Fast Response and Low Power Consumption

Abstract

Keywords

ASJC Scopus subject areas

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