A Review of Capacitive MEMS Hydrogen Sensor using Pd based Metallic Glass with Fast Response and Low Power Consumption

Hiroaki Yamazaki, Yumi Hayashi, Kei Masunishi, Daiki Ono, Tamio Ikehashi

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

This paper addresses a capacitive MEMS hydrogen sensor using Pd based metallic glass for future hydrogen society. Firstly, we investigate PdCuSi as Pd based metallic glass (MG) and show this material is promising for capacitive MEMS hydrogen sensor. Secondly, we apply the Pd based MG to a hydrogen sensor having inverted T-shaped electrode. The sensor was fabricated by a surface micromachining process. We show that the fabricated hydrogen sensor exhibits hysteresis free and fast response property at room temperature.

Original languageEnglish
Pages (from-to)312-318
Number of pages7
Journalieej transactions on sensors and micromachines
Volume138
Issue number7
DOIs
Publication statusPublished - 2018 Jan 1
Externally publishedYes

Keywords

  • Capacitive
  • Hydrogen sensor
  • Hydrogen society
  • MEMS
  • Pd based metallic glass

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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