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A Review of Capacitive MEMS Hydrogen Sensor using Pd based Metallic Glass with Fast Response and Low Power Consumption
Hiroaki Yamazaki*, Yumi Hayashi, Kei Masunishi, Daiki Ono, Tamio Ikehashi
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
7
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(Scopus)