A scalable Si-based micro thermoelectric generator

Takanobu Watanabe, Shuhei Asada, Taiyu Xu, Shuichiro Hashimoto, Shunsuke Ohba, Yuya Himeda, Ryo Yamato, Hui Zhang, Motohiro Tomita, Takashi Matsukawa, Yoshinari Kamakura, Hiroya Ikeda

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Citations (Scopus)

Abstract

A new device architecture of micro thermoelectric generator (μ-TEG) is proposed. The μ-TEG utilizes silicon nanowires as the thermoelectric (TE) material, and it can be fabricated by the CMOS-compatible process. It is driven by an 'evanescent thermal field' exuding around a heat flow perpendicular to the substrate. We demonstrate experimentally that the TE power increases in the shorter TE leg lengths. The results show that the TE power density is scalable by miniaturizing and integrating the proposed structure.

Original languageEnglish
Title of host publication2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages86-87
Number of pages2
ISBN (Electronic)9781509046591
DOIs
Publication statusPublished - 2017 Jun 13
Event2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Toyama, Japan
Duration: 2017 Feb 282017 Mar 2

Other

Other2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017
CountryJapan
CityToyama
Period17/2/2817/3/2

Keywords

  • Energy harvester
  • Si nanowire
  • thermoelectrics

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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    Watanabe, T., Asada, S., Xu, T., Hashimoto, S., Ohba, S., Himeda, Y., Yamato, R., Zhang, H., Tomita, M., Matsukawa, T., Kamakura, Y., & Ikeda, H. (2017). A scalable Si-based micro thermoelectric generator. In 2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings (pp. 86-87). [7947519] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/EDTM.2017.7947519