A single-atom electron source in practical gun of an extreme high vacuum

Tomohiro Urata, Tsuyoshi Ishikawa, Boklae Cho, Eiji Rokuta, E. Rokuta, Chuhei Oshima, Ryozo Nonogaki, Hidekazu Saito, Akira Yonezawa

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

For developing electron microscopes mounted with a single-atom electron source, we constructed a practical gun chamber of an extreme high vacuum (XHV), and demonstrated excellent characteristics of its emission beams; the stable beam with the current fluctuation of ̃0.8 % was observed at the total current of 20 nA in the XHV of 1 × 10-9 Pa.

Original languageEnglish
Pages (from-to)68-71
Number of pages4
Journale-Journal of Surface Science and Nanotechnology
Volume6
DOIs
Publication statusPublished - 2008 Feb 21

Keywords

  • Electron emission
  • Extreme High Vacuum (XHV)
  • Scanning Electron Microscopy (SEM)
  • Single-atom electron source

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Materials Science (miscellaneous)

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  • Cite this

    Urata, T., Ishikawa, T., Cho, B., Rokuta, E., Rokuta, E., Oshima, C., Nonogaki, R., Saito, H., & Yonezawa, A. (2008). A single-atom electron source in practical gun of an extreme high vacuum. e-Journal of Surface Science and Nanotechnology, 6, 68-71. https://doi.org/10.1380/ejssnt.2008.68