A study of the critical factor determining the size of etched latent tracks formed on SiO 2 glass by swift-Cl-ion irradiation

Ken Ichi Nomura, Yoshimichi Ohki, Makoto Fujimaki, Xiaomin Wang, Koichi Awazu, Tetsuro Komatsubara

    Research output: Contribution to journalArticle

    1 Citation (Scopus)

    Abstract

    When a Cl ion with energy of the order of megaelectronvolts collides with SiO 2 glass, it penetrates the glass along a straight line. The region through which the ion passes and its vicinity, called the latent track, can be easily etched by hydrofluoric acid, resulting in the formation of a nanopore. With increasing ion energy, the nanopore radius first increases, reaches a maximum, and then decreases. In order to analyze this strange phenomenon, we investigated the radius of the region that melted upon ion irradiation, as one of the possible approaches. We calculated its radius using heat diffusion equations and compared it with the radius of nanopores. We found that both the radii depend on the ion energy in a similar manner.

    Original languageEnglish
    Pages (from-to)1-4
    Number of pages4
    JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
    Volume272
    DOIs
    Publication statusPublished - 2012 Feb 1

    Fingerprint

    Ion bombardment
    ion irradiation
    Nanopores
    Glass
    radii
    glass
    Ions
    ions
    Hydrofluoric acid
    hydrofluoric acid
    energy
    heat

    Keywords

    • Etching
    • Heat diffusion equation
    • Latent track
    • Nanopore
    • SiO glass
    • Swift heavy ion

    ASJC Scopus subject areas

    • Instrumentation
    • Nuclear and High Energy Physics

    Cite this

    A study of the critical factor determining the size of etched latent tracks formed on SiO 2 glass by swift-Cl-ion irradiation. / Nomura, Ken Ichi; Ohki, Yoshimichi; Fujimaki, Makoto; Wang, Xiaomin; Awazu, Koichi; Komatsubara, Tetsuro.

    In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 272, 01.02.2012, p. 1-4.

    Research output: Contribution to journalArticle

    @article{1e6a199ab6c74df29907a63957c83060,
    title = "A study of the critical factor determining the size of etched latent tracks formed on SiO 2 glass by swift-Cl-ion irradiation",
    abstract = "When a Cl ion with energy of the order of megaelectronvolts collides with SiO 2 glass, it penetrates the glass along a straight line. The region through which the ion passes and its vicinity, called the latent track, can be easily etched by hydrofluoric acid, resulting in the formation of a nanopore. With increasing ion energy, the nanopore radius first increases, reaches a maximum, and then decreases. In order to analyze this strange phenomenon, we investigated the radius of the region that melted upon ion irradiation, as one of the possible approaches. We calculated its radius using heat diffusion equations and compared it with the radius of nanopores. We found that both the radii depend on the ion energy in a similar manner.",
    keywords = "Etching, Heat diffusion equation, Latent track, Nanopore, SiO glass, Swift heavy ion",
    author = "Nomura, {Ken Ichi} and Yoshimichi Ohki and Makoto Fujimaki and Xiaomin Wang and Koichi Awazu and Tetsuro Komatsubara",
    year = "2012",
    month = "2",
    day = "1",
    doi = "10.1016/j.nimb.2011.01.020",
    language = "English",
    volume = "272",
    pages = "1--4",
    journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",
    issn = "0168-583X",
    publisher = "Elsevier",

    }

    TY - JOUR

    T1 - A study of the critical factor determining the size of etched latent tracks formed on SiO 2 glass by swift-Cl-ion irradiation

    AU - Nomura, Ken Ichi

    AU - Ohki, Yoshimichi

    AU - Fujimaki, Makoto

    AU - Wang, Xiaomin

    AU - Awazu, Koichi

    AU - Komatsubara, Tetsuro

    PY - 2012/2/1

    Y1 - 2012/2/1

    N2 - When a Cl ion with energy of the order of megaelectronvolts collides with SiO 2 glass, it penetrates the glass along a straight line. The region through which the ion passes and its vicinity, called the latent track, can be easily etched by hydrofluoric acid, resulting in the formation of a nanopore. With increasing ion energy, the nanopore radius first increases, reaches a maximum, and then decreases. In order to analyze this strange phenomenon, we investigated the radius of the region that melted upon ion irradiation, as one of the possible approaches. We calculated its radius using heat diffusion equations and compared it with the radius of nanopores. We found that both the radii depend on the ion energy in a similar manner.

    AB - When a Cl ion with energy of the order of megaelectronvolts collides with SiO 2 glass, it penetrates the glass along a straight line. The region through which the ion passes and its vicinity, called the latent track, can be easily etched by hydrofluoric acid, resulting in the formation of a nanopore. With increasing ion energy, the nanopore radius first increases, reaches a maximum, and then decreases. In order to analyze this strange phenomenon, we investigated the radius of the region that melted upon ion irradiation, as one of the possible approaches. We calculated its radius using heat diffusion equations and compared it with the radius of nanopores. We found that both the radii depend on the ion energy in a similar manner.

    KW - Etching

    KW - Heat diffusion equation

    KW - Latent track

    KW - Nanopore

    KW - SiO glass

    KW - Swift heavy ion

    UR - http://www.scopus.com/inward/record.url?scp=84655168051&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=84655168051&partnerID=8YFLogxK

    U2 - 10.1016/j.nimb.2011.01.020

    DO - 10.1016/j.nimb.2011.01.020

    M3 - Article

    VL - 272

    SP - 1

    EP - 4

    JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

    JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

    SN - 0168-583X

    ER -