A study on a diode-bridge type differential capacitance detection circuit

Takahiro Matsuo, Joanna Pawłat, Jinxing Liang, Ken Kunitomo, Toshitsugu Ueda

    Research output: Contribution to journalArticlepeer-review

    2 Citations (Scopus)

    Abstract

    Differential capacitance sensor with movable electrodes is usually applied for accelerometers, pressure gauges, etc. because of its high sensitivity and resolution. Two axis inclination sensor with differential capacitance structure using MEMS (Micro Electro Mechanical Systems) technology has recently been designed for industrial and environmental purposes. The initial capacitance of the sensor should be very low, as few pF, therefore, a C-V converter circuit, which is able to detect very small capacitance variations is required. In this study, the particular principle of a "diode-bridge type differential capacitance detection circuit" has been analyzed. After the mathematical simulations performed by using PSpice simulator, the detection of the capacitance variations in fF order resolution are considered.

    Original languageEnglish
    Pages (from-to)156-159
    Number of pages4
    JournalJournal of Advanced Oxidation Technologies
    Volume9
    Issue number2
    Publication statusPublished - 2006 Jul 31

    Keywords

    • A Diode-bridge Type C-V Converter
    • Differential Capacitance
    • MEMS
    • Two Axis Inclination Sensor

    ASJC Scopus subject areas

    • Physical and Theoretical Chemistry
    • Chemistry(all)

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