A Study on the Method to Embed the Thin Film Capacitor Fabricated by Semiconductor Technology

Mitsuhiro Watanabe, Ichiro Koiwa, Kinya Ashikaga, Makoto Terui, Tetsuya Osaka, Tomoya Kumagai, Akira Hashimoto, Hideo Honma, Yasushi Shiraishi, Yoshimi Sato, Noritaka Anzai, Takashi Ohsumi

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Engineering & Materials Science