A surface plasmon resonance sensor with A V-shaped silicon prism array

N. Tsujiuchi, Eiji Iwase, K. Hoshino, K. Matsumoto, I. Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

A surface plasmon resonance (SPR) sensor with a prism array made by silicon microfabrication techniques is proposed. We fabricated silicon prisms arrayed in 200 μm in pitch by anisotropic wet etching for deflecting light. We measured SPR curves in specimen of air, water and ethanol using near-infrared laser light (1550 nm) and obtained the SPR dip in each measurement. We fabricated a flexible flap, which was actuated by Lorentz force, to change the incident angle. The silicon prism chip was attached on the flap, the SPR curve was measured by scanning the incident angle of laser light with the flap.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages522-525
Number of pages4
Volume2006
Publication statusPublished - 2006
Externally publishedYes
Event19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul
Duration: 2006 Jan 222006 Jan 26

Other

Other19th IEEE International Conference on Micro Electro Mechanical Systems
CityIstanbul
Period06/1/2206/1/26

Fingerprint

Surface plasmon resonance
Prisms
Silicon
Sensors
Anisotropic etching
Lorentz force
Infrared lasers
Wet etching
Microfabrication
Ethanol
Scanning
Lasers
Air
Water

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

Cite this

Tsujiuchi, N., Iwase, E., Hoshino, K., Matsumoto, K., & Shimoyama, I. (2006). A surface plasmon resonance sensor with A V-shaped silicon prism array. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (Vol. 2006, pp. 522-525). [1627851]

A surface plasmon resonance sensor with A V-shaped silicon prism array. / Tsujiuchi, N.; Iwase, Eiji; Hoshino, K.; Matsumoto, K.; Shimoyama, I.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). Vol. 2006 2006. p. 522-525 1627851.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tsujiuchi, N, Iwase, E, Hoshino, K, Matsumoto, K & Shimoyama, I 2006, A surface plasmon resonance sensor with A V-shaped silicon prism array. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). vol. 2006, 1627851, pp. 522-525, 19th IEEE International Conference on Micro Electro Mechanical Systems, Istanbul, 06/1/22.
Tsujiuchi N, Iwase E, Hoshino K, Matsumoto K, Shimoyama I. A surface plasmon resonance sensor with A V-shaped silicon prism array. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). Vol. 2006. 2006. p. 522-525. 1627851
Tsujiuchi, N. ; Iwase, Eiji ; Hoshino, K. ; Matsumoto, K. ; Shimoyama, I. / A surface plasmon resonance sensor with A V-shaped silicon prism array. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). Vol. 2006 2006. pp. 522-525
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