Abstract
A surface plasmon resonance (SPR) sensor with a prism array made by silicon microfabrication techniques is proposed. We fabricated silicon prisms arrayed in 200 μm in pitch by anisotropic wet etching for deflecting light. We measured SPR curves in specimen of air, water and ethanol using near-infrared laser light (1550 nm) and obtained the SPR dip in each measurement. We fabricated a flexible flap, which was actuated by Lorentz force, to change the incident angle. The silicon prism chip was attached on the flap, the SPR curve was measured by scanning the incident angle of laser light with the flap.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| Pages | 522-525 |
| Number of pages | 4 |
| Volume | 2006 |
| Publication status | Published - 2006 |
| Externally published | Yes |
| Event | 19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul Duration: 2006 Jan 22 → 2006 Jan 26 |
Other
| Other | 19th IEEE International Conference on Micro Electro Mechanical Systems |
|---|---|
| City | Istanbul |
| Period | 06/1/22 → 06/1/26 |
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ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering
- Control and Systems Engineering
Cite this
A surface plasmon resonance sensor with A V-shaped silicon prism array. / Tsujiuchi, N.; Iwase, Eiji; Hoshino, K.; Matsumoto, K.; Shimoyama, I.
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). Vol. 2006 2006. p. 522-525 1627851.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - A surface plasmon resonance sensor with A V-shaped silicon prism array
AU - Tsujiuchi, N.
AU - Iwase, Eiji
AU - Hoshino, K.
AU - Matsumoto, K.
AU - Shimoyama, I.
PY - 2006
Y1 - 2006
N2 - A surface plasmon resonance (SPR) sensor with a prism array made by silicon microfabrication techniques is proposed. We fabricated silicon prisms arrayed in 200 μm in pitch by anisotropic wet etching for deflecting light. We measured SPR curves in specimen of air, water and ethanol using near-infrared laser light (1550 nm) and obtained the SPR dip in each measurement. We fabricated a flexible flap, which was actuated by Lorentz force, to change the incident angle. The silicon prism chip was attached on the flap, the SPR curve was measured by scanning the incident angle of laser light with the flap.
AB - A surface plasmon resonance (SPR) sensor with a prism array made by silicon microfabrication techniques is proposed. We fabricated silicon prisms arrayed in 200 μm in pitch by anisotropic wet etching for deflecting light. We measured SPR curves in specimen of air, water and ethanol using near-infrared laser light (1550 nm) and obtained the SPR dip in each measurement. We fabricated a flexible flap, which was actuated by Lorentz force, to change the incident angle. The silicon prism chip was attached on the flap, the SPR curve was measured by scanning the incident angle of laser light with the flap.
UR - http://www.scopus.com/inward/record.url?scp=33750102494&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33750102494&partnerID=8YFLogxK
M3 - Conference contribution
SN - 0780394755
SN - 9780780394759
VL - 2006
SP - 522
EP - 525
BT - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ER -