TY - GEN
T1 - A surface plasmon resonance sensor with A V-shaped silicon prism array
AU - Tsujiuchi, N.
AU - Iwase, E.
AU - Hoshino, K.
AU - Matsumoto, K.
AU - Shimoyama, I.
N1 - Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2006
Y1 - 2006
N2 - A surface plasmon resonance (SPR) sensor with a prism array made by silicon microfabrication techniques is proposed. We fabricated silicon prisms arrayed in 200 μm in pitch by anisotropic wet etching for deflecting light. We measured SPR curves in specimen of air, water and ethanol using near-infrared laser light (1550 nm) and obtained the SPR dip in each measurement. We fabricated a flexible flap, which was actuated by Lorentz force, to change the incident angle. The silicon prism chip was attached on the flap, the SPR curve was measured by scanning the incident angle of laser light with the flap.
AB - A surface plasmon resonance (SPR) sensor with a prism array made by silicon microfabrication techniques is proposed. We fabricated silicon prisms arrayed in 200 μm in pitch by anisotropic wet etching for deflecting light. We measured SPR curves in specimen of air, water and ethanol using near-infrared laser light (1550 nm) and obtained the SPR dip in each measurement. We fabricated a flexible flap, which was actuated by Lorentz force, to change the incident angle. The silicon prism chip was attached on the flap, the SPR curve was measured by scanning the incident angle of laser light with the flap.
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M3 - Conference contribution
AN - SCOPUS:33750102494
SN - 0780394755
SN - 9780780394759
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 522
EP - 525
BT - 19th IEEE International Conference on Micro Electro Mechanical Systems
T2 - 19th IEEE International Conference on Micro Electro Mechanical Systems
Y2 - 22 January 2006 through 26 January 2006
ER -