A surface plasmon resonance sensor with A V-shaped silicon prism array

N. Tsujiuchi; E. Iwase; K. Hoshino; K. Matsumoto; I. Shimoyama

A surface plasmon resonance sensor with A V-shaped silicon prism array

N. Tsujiuchi, E. Iwase, K. Hoshino, K. Matsumoto, I. Shimoyama

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A surface plasmon resonance (SPR) sensor with a prism array made by silicon microfabrication techniques is proposed. We fabricated silicon prisms arrayed in 200 μm in pitch by anisotropic wet etching for deflecting light. We measured SPR curves in specimen of air, water and ethanol using near-infrared laser light (1550 nm) and obtained the SPR dip in each measurement. We fabricated a flexible flap, which was actuated by Lorentz force, to change the incident angle. The silicon prism chip was attached on the flap, the SPR curve was measured by scanning the incident angle of laser light with the flap.

Original language	English
Title of host publication	19th IEEE International Conference on Micro Electro Mechanical Systems
Pages	522-525
Number of pages	4
Publication status	Published - 2006
Externally published	Yes
Event	19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey Duration: 2006 Jan 22 → 2006 Jan 26

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2006
ISSN (Print)	1084-6999

Conference

Conference	19th IEEE International Conference on Micro Electro Mechanical Systems
Country/Territory	Turkey
City	Istanbul
Period	06/1/22 → 06/1/26

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Cite this

A surface plasmon resonance sensor with A V-shaped silicon prism array. / Tsujiuchi, N.; Iwase, E.; Hoshino, K.; Matsumoto, K.; Shimoyama, I.

19th IEEE International Conference on Micro Electro Mechanical Systems. 2006. p. 522-525 1627851 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2006).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Tsujiuchi, N, Iwase, E, Hoshino, K, Matsumoto, K & Shimoyama, I 2006, A surface plasmon resonance sensor with A V-shaped silicon prism array. in 19th IEEE International Conference on Micro Electro Mechanical Systems., 1627851, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2006, pp. 522-525, 19th IEEE International Conference on Micro Electro Mechanical Systems, Istanbul, Turkey, 06/1/22.

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AU - Shimoyama, I.

PY - 2006

Y1 - 2006

N2 - A surface plasmon resonance (SPR) sensor with a prism array made by silicon microfabrication techniques is proposed. We fabricated silicon prisms arrayed in 200 μm in pitch by anisotropic wet etching for deflecting light. We measured SPR curves in specimen of air, water and ethanol using near-infrared laser light (1550 nm) and obtained the SPR dip in each measurement. We fabricated a flexible flap, which was actuated by Lorentz force, to change the incident angle. The silicon prism chip was attached on the flap, the SPR curve was measured by scanning the incident angle of laser light with the flap.

AB - A surface plasmon resonance (SPR) sensor with a prism array made by silicon microfabrication techniques is proposed. We fabricated silicon prisms arrayed in 200 μm in pitch by anisotropic wet etching for deflecting light. We measured SPR curves in specimen of air, water and ethanol using near-infrared laser light (1550 nm) and obtained the SPR dip in each measurement. We fabricated a flexible flap, which was actuated by Lorentz force, to change the incident angle. The silicon prism chip was attached on the flap, the SPR curve was measured by scanning the incident angle of laser light with the flap.

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T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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BT - 19th IEEE International Conference on Micro Electro Mechanical Systems

T2 - 19th IEEE International Conference on Micro Electro Mechanical Systems

Y2 - 22 January 2006 through 26 January 2006

ER -

A surface plasmon resonance sensor with A V-shaped silicon prism array

Abstract

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Conference

ASJC Scopus subject areas

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