A surface plasmon resonance sensor with A V-shaped silicon prism array

N. Tsujiuchi, E. Iwase, K. Hoshino, K. Matsumoto, I. Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

A surface plasmon resonance (SPR) sensor with a prism array made by silicon microfabrication techniques is proposed. We fabricated silicon prisms arrayed in 200 μm in pitch by anisotropic wet etching for deflecting light. We measured SPR curves in specimen of air, water and ethanol using near-infrared laser light (1550 nm) and obtained the SPR dip in each measurement. We fabricated a flexible flap, which was actuated by Lorentz force, to change the incident angle. The silicon prism chip was attached on the flap, the SPR curve was measured by scanning the incident angle of laser light with the flap.

Original languageEnglish
Title of host publication19th IEEE International Conference on Micro Electro Mechanical Systems
Pages522-525
Number of pages4
Publication statusPublished - 2006
Externally publishedYes
Event19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
Duration: 2006 Jan 222006 Jan 26

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2006
ISSN (Print)1084-6999

Conference

Conference19th IEEE International Conference on Micro Electro Mechanical Systems
CountryTurkey
CityIstanbul
Period06/1/2206/1/26

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Tsujiuchi, N., Iwase, E., Hoshino, K., Matsumoto, K., & Shimoyama, I. (2006). A surface plasmon resonance sensor with A V-shaped silicon prism array. In 19th IEEE International Conference on Micro Electro Mechanical Systems (pp. 522-525). [1627851] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2006).