A Ta2O5 solid-electrolyte switch with improved reliability

Toshitsugu Sakamoto, Naoki Banno, Noriyuki Iguchi, Hisao Kawaura, Hiroshi Sunamura, Shinji Fujieda, Kazuya Terabe, Tsuyoshi Hasegawa, Masakazu Aono

Research output: Contribution to journalConference articlepeer-review

68 Citations (Scopus)


We present a novel solid-electrolyte switch ("NanoBridge") promising for application to field programmable gate array (FPGA). We replace a former solid electrolyte of CU2S with Ta2O5, which has a Siprocess compatibility, . As a result, we successfully control the turn-on voltage to adapt to CMOS operation. The Ta2O 5-NanoBridge exhibits a high reliability of cycling endurance (> 104) and a stability against EM (> 10years at 2.6mA at RT). Furthermore, we demonstrate that the conducting path of the switch is a Cu precipitate with 30nm in diameter, which possibly enables to scale down the switch.

Original languageEnglish
Article number4339718
Pages (from-to)38-39
Number of pages2
JournalDigest of Technical Papers - Symposium on VLSI Technology
Publication statusPublished - 2007 Dec 1
Externally publishedYes
Event2007 Symposium on VLSI Technology, VLSIT 2007 - Kyoto, Japan
Duration: 2007 Jun 122007 Jun 14

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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