A trend mining method for yield improvement based on trend in time series

Hidetaka Tsuda, Hidehiro Shirai, Masahiro Terabe, Kazuo Hashimoto, Ayumi Shinohara

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have developed a trend mining method for yield improvement which extracts non-random trend in time series buried in huge time series data. This method efficiently extracts failure causes based on trend in time series that had been almost unable to be analyzed by conventional methods.

Original languageEnglish
Title of host publicationIEEE International Symposium on Semiconductor Manufacturing Conference Proceedings
Pages247-250
Number of pages4
Publication statusPublished - 2008
Externally publishedYes
Event2008 17th International Symposium on Semiconductor Manufacturing, ISSM 2008 - Tokyo
Duration: 2008 Oct 272008 Oct 29

Other

Other2008 17th International Symposium on Semiconductor Manufacturing, ISSM 2008
CityTokyo
Period08/10/2708/10/29

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ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Industrial and Manufacturing Engineering

Cite this

Tsuda, H., Shirai, H., Terabe, M., Hashimoto, K., & Shinohara, A. (2008). A trend mining method for yield improvement based on trend in time series. In IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (pp. 247-250). [5714967]