A trend mining method for yield improvement based on trend in time series

Hidetaka Tsuda; Hidehiro Shirai; Masahiro Terabe; Kazuo Hashimoto; Ayumi Shinohara

A trend mining method for yield improvement based on trend in time series

Hidetaka Tsuda^*, Hidehiro Shirai, Masahiro Terabe, Kazuo Hashimoto, Ayumi Shinohara

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We have developed a trend mining method for yield improvement which extracts non-random trend in time series buried in huge time series data. This method efficiently extracts failure causes based on trend in time series that had been almost unable to be analyzed by conventional methods.

Original language	English
Title of host publication	2008 International Symposium on Semiconductor Manufacturing, ISSM 2008
Pages	247-250
Number of pages	4
Publication status	Published - 2008 Dec 1
Externally published	Yes
Event	2008 17th International Symposium on Semiconductor Manufacturing, ISSM 2008 - Tokyo, Japan Duration: 2008 Oct 27 → 2008 Oct 29

Publication series

Name	IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings
ISSN (Print)	1523-553X

Conference

Conference	2008 17th International Symposium on Semiconductor Manufacturing, ISSM 2008
Country/Territory	Japan
City	Tokyo
Period	08/10/27 → 08/10/29

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Engineering(all)
Industrial and Manufacturing Engineering
Electrical and Electronic Engineering

Cite this

A trend mining method for yield improvement based on trend in time series. / Tsuda, Hidetaka; Shirai, Hidehiro; Terabe, Masahiro et al.

2008 International Symposium on Semiconductor Manufacturing, ISSM 2008. 2008. p. 247-250 5714967 (IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Tsuda, H, Shirai, H, Terabe, M, Hashimoto, K & Shinohara, A 2008, A trend mining method for yield improvement based on trend in time series. in 2008 International Symposium on Semiconductor Manufacturing, ISSM 2008., 5714967, IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings, pp. 247-250, 2008 17th International Symposium on Semiconductor Manufacturing, ISSM 2008, Tokyo, Japan, 08/10/27.

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abstract = "We have developed a trend mining method for yield improvement which extracts non-random trend in time series buried in huge time series data. This method efficiently extracts failure causes based on trend in time series that had been almost unable to be analyzed by conventional methods.",

author = "Hidetaka Tsuda and Hidehiro Shirai and Masahiro Terabe and Kazuo Hashimoto and Ayumi Shinohara",

year = "2008",

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AU - Tsuda, Hidetaka

AU - Shirai, Hidehiro

AU - Terabe, Masahiro

AU - Hashimoto, Kazuo

AU - Shinohara, Ayumi

PY - 2008/12/1

Y1 - 2008/12/1

N2 - We have developed a trend mining method for yield improvement which extracts non-random trend in time series buried in huge time series data. This method efficiently extracts failure causes based on trend in time series that had been almost unable to be analyzed by conventional methods.

AB - We have developed a trend mining method for yield improvement which extracts non-random trend in time series buried in huge time series data. This method efficiently extracts failure causes based on trend in time series that had been almost unable to be analyzed by conventional methods.

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M3 - Conference contribution

AN - SCOPUS:79952567362

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T3 - IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

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BT - 2008 International Symposium on Semiconductor Manufacturing, ISSM 2008

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Y2 - 27 October 2008 through 29 October 2008

ER -

A trend mining method for yield improvement based on trend in time series

Abstract

Publication series

Conference

ASJC Scopus subject areas

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