Absolute rotary angular measurement by using multi electrode circular position sensitive detector

Hajime Nakajima, Kazuhiko Sumi, Hiroshi Inujima

Research output: Contribution to journalArticle

Abstract

A new type or circular semiconductor position sensitive detector (PSD) called multi electrode circular PSD (MbCPSD), which consists of a photosensitive region, a résister line, and 16 electrodes, is presented. The photosensitive region is in the shape of a ring, which is formed by the radial arrangement of long and narrow photodiodes. The outer ends of the photodiodes are connected to the continuous resistor line. Photoexcited carriers generated in the photodiode flow to the resistor line and are extracted by the multi electrode, which divides the resistor into 16 equal parts. The angular position of the light spot is calculated from the output current of the selected electrodes. Compared to conventional circular PSDs, the reliability of angular measurement is better, this is because the ME-CPSD does not have an undetectable region caused by unavoidable discontinuities in the structure of conventional circular PSDs. This device can not only measure the absolute angular position but also carry out a more precise angular measurement by selecting narrower electrode intervals. This device has the capability of realizing a high-precision noncontact angular measurement system with a simple construction.

Original languageEnglish
Pages (from-to)989-994
Number of pages6
JournalIEEJ Transactions on Industry Applications
Volume129
Issue number10
DOIs
Publication statusPublished - 2009

Fingerprint

Angle measurement
Detectors
Electrodes
Photodiodes
Resistors
Semiconductor materials

Keywords

  • Angular measurement
  • Multi electrodes
  • Position sensitive detector
  • Rotary encoders

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Industrial and Manufacturing Engineering

Cite this

Absolute rotary angular measurement by using multi electrode circular position sensitive detector. / Nakajima, Hajime; Sumi, Kazuhiko; Inujima, Hiroshi.

In: IEEJ Transactions on Industry Applications, Vol. 129, No. 10, 2009, p. 989-994.

Research output: Contribution to journalArticle

@article{9e6f33b077b7455c8e95580e02405d6d,
title = "Absolute rotary angular measurement by using multi electrode circular position sensitive detector",
abstract = "A new type or circular semiconductor position sensitive detector (PSD) called multi electrode circular PSD (MbCPSD), which consists of a photosensitive region, a r{\'e}sister line, and 16 electrodes, is presented. The photosensitive region is in the shape of a ring, which is formed by the radial arrangement of long and narrow photodiodes. The outer ends of the photodiodes are connected to the continuous resistor line. Photoexcited carriers generated in the photodiode flow to the resistor line and are extracted by the multi electrode, which divides the resistor into 16 equal parts. The angular position of the light spot is calculated from the output current of the selected electrodes. Compared to conventional circular PSDs, the reliability of angular measurement is better, this is because the ME-CPSD does not have an undetectable region caused by unavoidable discontinuities in the structure of conventional circular PSDs. This device can not only measure the absolute angular position but also carry out a more precise angular measurement by selecting narrower electrode intervals. This device has the capability of realizing a high-precision noncontact angular measurement system with a simple construction.",
keywords = "Angular measurement, Multi electrodes, Position sensitive detector, Rotary encoders",
author = "Hajime Nakajima and Kazuhiko Sumi and Hiroshi Inujima",
year = "2009",
doi = "10.1541/ieejias.129.989",
language = "English",
volume = "129",
pages = "989--994",
journal = "IEEJ Transactions on Industry Applications",
issn = "0913-6339",
publisher = "The Institute of Electrical Engineers of Japan",
number = "10",

}

TY - JOUR

T1 - Absolute rotary angular measurement by using multi electrode circular position sensitive detector

AU - Nakajima, Hajime

AU - Sumi, Kazuhiko

AU - Inujima, Hiroshi

PY - 2009

Y1 - 2009

N2 - A new type or circular semiconductor position sensitive detector (PSD) called multi electrode circular PSD (MbCPSD), which consists of a photosensitive region, a résister line, and 16 electrodes, is presented. The photosensitive region is in the shape of a ring, which is formed by the radial arrangement of long and narrow photodiodes. The outer ends of the photodiodes are connected to the continuous resistor line. Photoexcited carriers generated in the photodiode flow to the resistor line and are extracted by the multi electrode, which divides the resistor into 16 equal parts. The angular position of the light spot is calculated from the output current of the selected electrodes. Compared to conventional circular PSDs, the reliability of angular measurement is better, this is because the ME-CPSD does not have an undetectable region caused by unavoidable discontinuities in the structure of conventional circular PSDs. This device can not only measure the absolute angular position but also carry out a more precise angular measurement by selecting narrower electrode intervals. This device has the capability of realizing a high-precision noncontact angular measurement system with a simple construction.

AB - A new type or circular semiconductor position sensitive detector (PSD) called multi electrode circular PSD (MbCPSD), which consists of a photosensitive region, a résister line, and 16 electrodes, is presented. The photosensitive region is in the shape of a ring, which is formed by the radial arrangement of long and narrow photodiodes. The outer ends of the photodiodes are connected to the continuous resistor line. Photoexcited carriers generated in the photodiode flow to the resistor line and are extracted by the multi electrode, which divides the resistor into 16 equal parts. The angular position of the light spot is calculated from the output current of the selected electrodes. Compared to conventional circular PSDs, the reliability of angular measurement is better, this is because the ME-CPSD does not have an undetectable region caused by unavoidable discontinuities in the structure of conventional circular PSDs. This device can not only measure the absolute angular position but also carry out a more precise angular measurement by selecting narrower electrode intervals. This device has the capability of realizing a high-precision noncontact angular measurement system with a simple construction.

KW - Angular measurement

KW - Multi electrodes

KW - Position sensitive detector

KW - Rotary encoders

UR - http://www.scopus.com/inward/record.url?scp=70450137107&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=70450137107&partnerID=8YFLogxK

U2 - 10.1541/ieejias.129.989

DO - 10.1541/ieejias.129.989

M3 - Article

AN - SCOPUS:70450137107

VL - 129

SP - 989

EP - 994

JO - IEEJ Transactions on Industry Applications

JF - IEEJ Transactions on Industry Applications

SN - 0913-6339

IS - 10

ER -