Accurate extraction of kt2of piezoelectric film/substrate structure by conversion loss method for subtracting experimental acoustic losses in the substrate

Ryota Tatsumi, Takahiko Yanagitani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Electromechanical coupling coefficient (pmb{k}{mathbf{t}}{}-{mathbf{2}}) is an important parameter for determining the performances of RF BAW filter. The IEEE standard recommends a resonance-antiresonance method for determining the pmb{k}{mathbf{t}}{}-{mathbf{2}} of the piezoelectric films by using a self-standing film structure. The method for determining pmb{k}{mathbf{t}}{}-{mathbf{2}} from the film/wafer structure reduces the time and cost of wafer etching process. pmb{k}{mathbf{t}}{}-{mathbf{2}} is underestimated due to the acoustic losses in the substrate in the conventional conversion loss method, which can extract the pmb{k}{mathbf{t}}{}-{mathbf{2}} from HBAR. In this study, we introduce a method for subtracting the acoustic losses in the substrate.

Original languageEnglish
Title of host publicationIUS 2020 - International Ultrasonics Symposium, Proceedings
PublisherIEEE Computer Society
ISBN (Electronic)9781728154480
DOIs
Publication statusPublished - 2020 Sep 7
Event2020 IEEE International Ultrasonics Symposium, IUS 2020 - Las Vegas, United States
Duration: 2020 Sep 72020 Sep 11

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume2020-September
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Conference

Conference2020 IEEE International Ultrasonics Symposium, IUS 2020
CountryUnited States
CityLas Vegas
Period20/9/720/9/11

Keywords

  • Electromechanical coupling coefficient
  • HBAR
  • Piezoelectric film
  • Resonant frequency

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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