Adhesion force mesurement between silicon and carbon nanotubes synthesized by chemical vapor deposition

A. Hashimoto; Y. Takei; E. Iwase; K. Matsumoto; I. Shimoyama

doi:10.1109/SENSOR.2009.5285641

Adhesion force mesurement between silicon and carbon nanotubes synthesized by chemical vapor deposition

A. Hashimoto^*, Y. Takei, E. Iwase, K. Matsumoto, I. Shimoyama

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

This paper reports on an evaluation of the adhesion force between silicon and carbon nanotubes (CNTs), which were directly synthesized on a silicon substrate by chemical vapor deposition (CVD). CNTs bridging between silicon tips were pushed with a force-sensing cantilever to break the adhesion between silicon and CNTs. We measured the force acting on the cantilever at the moment of breaking the adhesion between silicon and CNTs. This force was measured to be 28 nN.

Original language	English
Title of host publication	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	2066-2069
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2009.5285641
Publication status	Published - 2009 Dec 11
Externally published	Yes
Event	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States Duration: 2009 Jun 21 → 2009 Jun 25

Publication series

Name	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

Conference	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Country/Territory	United States
City	Denver, CO
Period	09/6/21 → 09/6/25

Keywords

Adhesion force
Carbon nanotubes
Chemical vapor deposition

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/SENSOR.2009.5285641

Cite this

Hashimoto, A., Takei, Y., Iwase, E., Matsumoto, K., & Shimoyama, I. (2009). Adhesion force mesurement between silicon and carbon nanotubes synthesized by chemical vapor deposition. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 2066-2069). [5285641] (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2009.5285641

Adhesion force mesurement between silicon and carbon nanotubes synthesized by chemical vapor deposition. / Hashimoto, A.; Takei, Y.; Iwase, E. et al.

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 2066-2069 5285641 (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Hashimoto, A, Takei, Y, Iwase, E, Matsumoto, K & Shimoyama, I 2009, Adhesion force mesurement between silicon and carbon nanotubes synthesized by chemical vapor deposition. in TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems., 5285641, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, pp. 2066-2069, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, CO, United States, 09/6/21. https://doi.org/10.1109/SENSOR.2009.5285641

Hashimoto A, Takei Y, Iwase E, Matsumoto K, Shimoyama I. Adhesion force mesurement between silicon and carbon nanotubes synthesized by chemical vapor deposition. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 2066-2069. 5285641. (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). doi: 10.1109/SENSOR.2009.5285641

Hashimoto, A. ; Takei, Y. ; Iwase, E. et al. / Adhesion force mesurement between silicon and carbon nanotubes synthesized by chemical vapor deposition. TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. pp. 2066-2069 (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems).

@inproceedings{69404ddb31944f8691aaf61a0f7c9bf7,

title = "Adhesion force mesurement between silicon and carbon nanotubes synthesized by chemical vapor deposition",

abstract = "This paper reports on an evaluation of the adhesion force between silicon and carbon nanotubes (CNTs), which were directly synthesized on a silicon substrate by chemical vapor deposition (CVD). CNTs bridging between silicon tips were pushed with a force-sensing cantilever to break the adhesion between silicon and CNTs. We measured the force acting on the cantilever at the moment of breaking the adhesion between silicon and CNTs. This force was measured to be 28 nN.",

keywords = "Adhesion force, Carbon nanotubes, Chemical vapor deposition",

author = "A. Hashimoto and Y. Takei and E. Iwase and K. Matsumoto and I. Shimoyama",

year = "2009",

month = dec,

day = "11",

doi = "10.1109/SENSOR.2009.5285641",

language = "English",

isbn = "9781424441938",

series = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems",

pages = "2066--2069",

booktitle = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems",

note = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems ; Conference date: 21-06-2009 Through 25-06-2009",

}

TY - GEN

T1 - Adhesion force mesurement between silicon and carbon nanotubes synthesized by chemical vapor deposition

AU - Hashimoto, A.

AU - Takei, Y.

AU - Iwase, E.

AU - Matsumoto, K.

AU - Shimoyama, I.

PY - 2009/12/11

Y1 - 2009/12/11

N2 - This paper reports on an evaluation of the adhesion force between silicon and carbon nanotubes (CNTs), which were directly synthesized on a silicon substrate by chemical vapor deposition (CVD). CNTs bridging between silicon tips were pushed with a force-sensing cantilever to break the adhesion between silicon and CNTs. We measured the force acting on the cantilever at the moment of breaking the adhesion between silicon and CNTs. This force was measured to be 28 nN.

AB - This paper reports on an evaluation of the adhesion force between silicon and carbon nanotubes (CNTs), which were directly synthesized on a silicon substrate by chemical vapor deposition (CVD). CNTs bridging between silicon tips were pushed with a force-sensing cantilever to break the adhesion between silicon and CNTs. We measured the force acting on the cantilever at the moment of breaking the adhesion between silicon and CNTs. This force was measured to be 28 nN.

KW - Adhesion force

KW - Carbon nanotubes

KW - Chemical vapor deposition

UR - http://www.scopus.com/inward/record.url?scp=71449084970&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=71449084970&partnerID=8YFLogxK

U2 - 10.1109/SENSOR.2009.5285641

DO - 10.1109/SENSOR.2009.5285641

M3 - Conference contribution

AN - SCOPUS:71449084970

SN - 9781424441938

T3 - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

SP - 2066

EP - 2069

BT - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

T2 - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Y2 - 21 June 2009 through 25 June 2009

ER -

Adhesion force mesurement between silicon and carbon nanotubes synthesized by chemical vapor deposition

Abstract

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Keywords

ASJC Scopus subject areas

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