Adhesion force mesurement between silicon and carbon nanotubes synthesized by chemical vapor deposition

A. Hashimoto, Y. Takei, Eiji Iwase, K. Matsumoto, I. Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper reports on an evaluation of the adhesion force between silicon and carbon nanotubes (CNTs), which were directly synthesized on a silicon substrate by chemical vapor deposition (CVD). CNTs bridging between silicon tips were pushed with a force-sensing cantilever to break the adhesion between silicon and CNTs. We measured the force acting on the cantilever at the moment of breaking the adhesion between silicon and CNTs. This force was measured to be 28 nN.

Original languageEnglish
Title of host publicationTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages2066-2069
Number of pages4
DOIs
Publication statusPublished - 2009
Externally publishedYes
EventTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO
Duration: 2009 Jun 212009 Jun 25

Other

OtherTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
CityDenver, CO
Period09/6/2109/6/25

Fingerprint

Chemical vapor deposition
Carbon nanotubes
Adhesion
Silicon
Substrates

Keywords

  • Adhesion force
  • Carbon nanotubes
  • Chemical vapor deposition

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Hashimoto, A., Takei, Y., Iwase, E., Matsumoto, K., & Shimoyama, I. (2009). Adhesion force mesurement between silicon and carbon nanotubes synthesized by chemical vapor deposition. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 2066-2069). [5285641] https://doi.org/10.1109/SENSOR.2009.5285641

Adhesion force mesurement between silicon and carbon nanotubes synthesized by chemical vapor deposition. / Hashimoto, A.; Takei, Y.; Iwase, Eiji; Matsumoto, K.; Shimoyama, I.

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 2066-2069 5285641.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hashimoto, A, Takei, Y, Iwase, E, Matsumoto, K & Shimoyama, I 2009, Adhesion force mesurement between silicon and carbon nanotubes synthesized by chemical vapor deposition. in TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems., 5285641, pp. 2066-2069, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, CO, 09/6/21. https://doi.org/10.1109/SENSOR.2009.5285641
Hashimoto A, Takei Y, Iwase E, Matsumoto K, Shimoyama I. Adhesion force mesurement between silicon and carbon nanotubes synthesized by chemical vapor deposition. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 2066-2069. 5285641 https://doi.org/10.1109/SENSOR.2009.5285641
Hashimoto, A. ; Takei, Y. ; Iwase, Eiji ; Matsumoto, K. ; Shimoyama, I. / Adhesion force mesurement between silicon and carbon nanotubes synthesized by chemical vapor deposition. TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. pp. 2066-2069
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