Adhesion force mesurement between silicon and carbon nanotubes synthesized by chemical vapor deposition

A. Hashimoto, Y. Takei, E. Iwase, K. Matsumoto, I. Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This paper reports on an evaluation of the adhesion force between silicon and carbon nanotubes (CNTs), which were directly synthesized on a silicon substrate by chemical vapor deposition (CVD). CNTs bridging between silicon tips were pushed with a force-sensing cantilever to break the adhesion between silicon and CNTs. We measured the force acting on the cantilever at the moment of breaking the adhesion between silicon and CNTs. This force was measured to be 28 nN.

Original languageEnglish
Title of host publicationTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages2066-2069
Number of pages4
DOIs
Publication statusPublished - 2009 Dec 11
Externally publishedYes
EventTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States
Duration: 2009 Jun 212009 Jun 25

Publication series

NameTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

ConferenceTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
CountryUnited States
CityDenver, CO
Period09/6/2109/6/25

Keywords

  • Adhesion force
  • Carbon nanotubes
  • Chemical vapor deposition

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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