Advanced retrograde well technology for 90-nm-node embedded static random access memory using high-energy parallel beam

Tomohiro Yamashita, Masashi Kltazawa, Yoji Kawasaki, Hiroyuki Takashino, Takashi Kuroi, Yasuo Inoue, Masahide Inuishi

Research output: Contribution to journalArticle

11 Citations (Scopus)

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Physics & Astronomy

Engineering & Materials Science