Aerosol deposition fabrication of transparent electro-optic films for optical modulator

Masafumi Nakada, Keishi Ohashi, Hiroki Tsuda, Jun Akedo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

High-transparent Pb(Zr,Ti)O3 and (Pb,La)(Zr,Ti)O3 films, over 1 μm thick, which have acceptable transmittance loss for use as optical devices, were directly deposited on glass substrates by AD. We found the ferroelectric Pb(Zr,Ti)O3 film by AD produced a fairly high EO coefficient (>150 pm/V), approximately 10 times larger than that of LiNbO3. We developed a Fabry-Perot (FP) optical modulator with electro-optic films fabricated by AD. Transmittance spectra of the FP optical modulator coincided with the optical simulation spectra, which indicated that optical scattering in AD films and at the surface/boundary were very small. We demonstrated an optical intensity modulation with applied electric field to EO film of ferroelectric Pb (Zr, Ti)O3.

Original languageEnglish
Title of host publicationIMAPS/ACerS - 2nd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2006
Pages482-487
Number of pages6
Publication statusPublished - 2006 Dec 1
Externally publishedYes
Event2nd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2006 - Denver, CO, United States
Duration: 2006 Apr 242006 Apr 27

Publication series

NameIMAPS/ACerS - 2nd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2006

Conference

Conference2nd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2006
CountryUnited States
CityDenver, CO
Period06/4/2406/4/27

Keywords

  • Aerosol deposition
  • Electro-optic
  • Fabry-Perot
  • Optical modulator
  • Optical properties
  • Thin film

ASJC Scopus subject areas

  • Hardware and Architecture
  • Ceramics and Composites

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  • Cite this

    Nakada, M., Ohashi, K., Tsuda, H., & Akedo, J. (2006). Aerosol deposition fabrication of transparent electro-optic films for optical modulator. In IMAPS/ACerS - 2nd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2006 (pp. 482-487). (IMAPS/ACerS - 2nd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2006).