Aerosol deposition fabrication of transparent electro-optic films for optical modulator

Masafumi Nakada, Keishi Ohashi, Hiroki Tsuda, Jun Akedo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

High-transparent Pb(Zr,Ti)O3 and (Pb,La)(Zr,Ti)O3 films, over 1 μm thick, which have acceptable transmittance loss for use as optical devices, were directly deposited on glass substrates by AD. We found the ferroelectric Pb(Zr,Ti)O3 film by AD produced a fairly high EO coefficient (>150 pm/V), approximately 10 times larger than that of LiNbO3. We developed a Fabry-Perot (FP) optical modulator with electro-optic films fabricated by AD. Transmittance spectra of the FP optical modulator coincided with the optical simulation spectra, which indicated that optical scattering in AD films and at the surface/boundary were very small. We demonstrated an optical intensity modulation with applied electric field to EO film of ferroelectric Pb (Zr, Ti)O3.

Original languageEnglish
Title of host publicationIMAPS/ACerS - 2nd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2006
Pages482-487
Number of pages6
Publication statusPublished - 2006
Externally publishedYes
Event2nd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2006 - Denver, CO
Duration: 2006 Apr 242006 Apr 27

Other

Other2nd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2006
CityDenver, CO
Period06/4/2406/4/27

Fingerprint

Light modulators
Electrooptical effects
Aerosols
Fabrication
Ferroelectric materials
Optical devices
Electric fields
Modulation
Scattering
Glass
Substrates

Keywords

  • Aerosol deposition
  • Electro-optic
  • Fabry-Perot
  • Optical modulator
  • Optical properties
  • Thin film

ASJC Scopus subject areas

  • Hardware and Architecture
  • Ceramics and Composites

Cite this

Nakada, M., Ohashi, K., Tsuda, H., & Akedo, J. (2006). Aerosol deposition fabrication of transparent electro-optic films for optical modulator. In IMAPS/ACerS - 2nd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2006 (pp. 482-487)

Aerosol deposition fabrication of transparent electro-optic films for optical modulator. / Nakada, Masafumi; Ohashi, Keishi; Tsuda, Hiroki; Akedo, Jun.

IMAPS/ACerS - 2nd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2006. 2006. p. 482-487.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nakada, M, Ohashi, K, Tsuda, H & Akedo, J 2006, Aerosol deposition fabrication of transparent electro-optic films for optical modulator. in IMAPS/ACerS - 2nd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2006. pp. 482-487, 2nd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2006, Denver, CO, 06/4/24.
Nakada M, Ohashi K, Tsuda H, Akedo J. Aerosol deposition fabrication of transparent electro-optic films for optical modulator. In IMAPS/ACerS - 2nd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2006. 2006. p. 482-487
Nakada, Masafumi ; Ohashi, Keishi ; Tsuda, Hiroki ; Akedo, Jun. / Aerosol deposition fabrication of transparent electro-optic films for optical modulator. IMAPS/ACerS - 2nd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2006. 2006. pp. 482-487
@inproceedings{63ca1edf281c462db043517ea860b3dd,
title = "Aerosol deposition fabrication of transparent electro-optic films for optical modulator",
abstract = "High-transparent Pb(Zr,Ti)O3 and (Pb,La)(Zr,Ti)O3 films, over 1 μm thick, which have acceptable transmittance loss for use as optical devices, were directly deposited on glass substrates by AD. We found the ferroelectric Pb(Zr,Ti)O3 film by AD produced a fairly high EO coefficient (>150 pm/V), approximately 10 times larger than that of LiNbO3. We developed a Fabry-Perot (FP) optical modulator with electro-optic films fabricated by AD. Transmittance spectra of the FP optical modulator coincided with the optical simulation spectra, which indicated that optical scattering in AD films and at the surface/boundary were very small. We demonstrated an optical intensity modulation with applied electric field to EO film of ferroelectric Pb (Zr, Ti)O3.",
keywords = "Aerosol deposition, Electro-optic, Fabry-Perot, Optical modulator, Optical properties, Thin film",
author = "Masafumi Nakada and Keishi Ohashi and Hiroki Tsuda and Jun Akedo",
year = "2006",
language = "English",
isbn = "9781604236200",
pages = "482--487",
booktitle = "IMAPS/ACerS - 2nd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2006",

}

TY - GEN

T1 - Aerosol deposition fabrication of transparent electro-optic films for optical modulator

AU - Nakada, Masafumi

AU - Ohashi, Keishi

AU - Tsuda, Hiroki

AU - Akedo, Jun

PY - 2006

Y1 - 2006

N2 - High-transparent Pb(Zr,Ti)O3 and (Pb,La)(Zr,Ti)O3 films, over 1 μm thick, which have acceptable transmittance loss for use as optical devices, were directly deposited on glass substrates by AD. We found the ferroelectric Pb(Zr,Ti)O3 film by AD produced a fairly high EO coefficient (>150 pm/V), approximately 10 times larger than that of LiNbO3. We developed a Fabry-Perot (FP) optical modulator with electro-optic films fabricated by AD. Transmittance spectra of the FP optical modulator coincided with the optical simulation spectra, which indicated that optical scattering in AD films and at the surface/boundary were very small. We demonstrated an optical intensity modulation with applied electric field to EO film of ferroelectric Pb (Zr, Ti)O3.

AB - High-transparent Pb(Zr,Ti)O3 and (Pb,La)(Zr,Ti)O3 films, over 1 μm thick, which have acceptable transmittance loss for use as optical devices, were directly deposited on glass substrates by AD. We found the ferroelectric Pb(Zr,Ti)O3 film by AD produced a fairly high EO coefficient (>150 pm/V), approximately 10 times larger than that of LiNbO3. We developed a Fabry-Perot (FP) optical modulator with electro-optic films fabricated by AD. Transmittance spectra of the FP optical modulator coincided with the optical simulation spectra, which indicated that optical scattering in AD films and at the surface/boundary were very small. We demonstrated an optical intensity modulation with applied electric field to EO film of ferroelectric Pb (Zr, Ti)O3.

KW - Aerosol deposition

KW - Electro-optic

KW - Fabry-Perot

KW - Optical modulator

KW - Optical properties

KW - Thin film

UR - http://www.scopus.com/inward/record.url?scp=84878252638&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84878252638&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84878252638

SN - 9781604236200

SP - 482

EP - 487

BT - IMAPS/ACerS - 2nd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2006

ER -